JPS6339960Y2 - - Google Patents
Info
- Publication number
- JPS6339960Y2 JPS6339960Y2 JP3293681U JP3293681U JPS6339960Y2 JP S6339960 Y2 JPS6339960 Y2 JP S6339960Y2 JP 3293681 U JP3293681 U JP 3293681U JP 3293681 U JP3293681 U JP 3293681U JP S6339960 Y2 JPS6339960 Y2 JP S6339960Y2
- Authority
- JP
- Japan
- Prior art keywords
- curved
- gas
- filter
- reaction chamber
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 239000012071 phase Substances 0.000 claims description 6
- 239000012808 vapor phase Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 239000003921 oil Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 238000001914 filtration Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3293681U JPS6339960Y2 (de) | 1981-03-09 | 1981-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3293681U JPS6339960Y2 (de) | 1981-03-09 | 1981-03-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57146329U JPS57146329U (de) | 1982-09-14 |
| JPS6339960Y2 true JPS6339960Y2 (de) | 1988-10-19 |
Family
ID=29830315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3293681U Expired JPS6339960Y2 (de) | 1981-03-09 | 1981-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339960Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6197119B1 (en) * | 1999-02-18 | 2001-03-06 | Mks Instruments, Inc. | Method and apparatus for controlling polymerized teos build-up in vacuum pump lines |
-
1981
- 1981-03-09 JP JP3293681U patent/JPS6339960Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57146329U (de) | 1982-09-14 |
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