JPS6339936U - - Google Patents
Info
- Publication number
- JPS6339936U JPS6339936U JP13229086U JP13229086U JPS6339936U JP S6339936 U JPS6339936 U JP S6339936U JP 13229086 U JP13229086 U JP 13229086U JP 13229086 U JP13229086 U JP 13229086U JP S6339936 U JPS6339936 U JP S6339936U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- disposed below
- carbide layer
- heating reactor
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13229086U JPS6339936U (enExample) | 1986-08-29 | 1986-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13229086U JPS6339936U (enExample) | 1986-08-29 | 1986-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339936U true JPS6339936U (enExample) | 1988-03-15 |
Family
ID=31031532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13229086U Pending JPS6339936U (enExample) | 1986-08-29 | 1986-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339936U (enExample) |
-
1986
- 1986-08-29 JP JP13229086U patent/JPS6339936U/ja active Pending