JPS6339847B2 - - Google Patents

Info

Publication number
JPS6339847B2
JPS6339847B2 JP55042759A JP4275980A JPS6339847B2 JP S6339847 B2 JPS6339847 B2 JP S6339847B2 JP 55042759 A JP55042759 A JP 55042759A JP 4275980 A JP4275980 A JP 4275980A JP S6339847 B2 JPS6339847 B2 JP S6339847B2
Authority
JP
Japan
Prior art keywords
diaphragm
piezoelectric element
frequency
minute
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55042759A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56140225A (en
Inventor
Tadashi Iino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yazaki Corp
Original Assignee
Yazaki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yazaki Corp filed Critical Yazaki Corp
Priority to JP4275980A priority Critical patent/JPS56140225A/ja
Publication of JPS56140225A publication Critical patent/JPS56140225A/ja
Publication of JPS6339847B2 publication Critical patent/JPS6339847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP4275980A 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc. Granted JPS56140225A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4275980A JPS56140225A (en) 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4275980A JPS56140225A (en) 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc.

Publications (2)

Publication Number Publication Date
JPS56140225A JPS56140225A (en) 1981-11-02
JPS6339847B2 true JPS6339847B2 (enExample) 1988-08-08

Family

ID=12644909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4275980A Granted JPS56140225A (en) 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc.

Country Status (1)

Country Link
JP (1) JPS56140225A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4586754B2 (ja) * 2005-06-29 2010-11-24 セイコーエプソン株式会社 圧電アクチュエータの駆動量検出装置および電子機器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55159129A (en) * 1979-05-30 1980-12-11 Takazawa Seisakusho:Kk Pressure detector

Also Published As

Publication number Publication date
JPS56140225A (en) 1981-11-02

Similar Documents

Publication Publication Date Title
Zhang et al. Ferroelectret nanogenerator with large transverse piezoelectric activity
US4546658A (en) Piezoelectric force/pressure sensor
US3238789A (en) Vibrating bar transducer
JPH07505472A (ja) ロードセル
CN106629571A (zh) 一种基于模态局部化效应的弱耦合mems谐振式加速度计
JPH09170927A (ja) 振動型角速度検出装置
CN100401073C (zh) 用于非接触静电探测器的传感器及其操作方法
GB1601547A (en) Force detector
CN116754107B (zh) 具有放大结构的高灵敏度谐振压力传感器及信号调理方法
US3456508A (en) Vibrating diaphragm pressure sensor apparatus
CN108731790B (zh) 高灵敏宽频带压电式mems矢量水听器
Gehin et al. Design and characterisation of a new force resonant sensor
Zhang et al. A mode-localized MEMS accelerometer in the modal overlap regime employing parametric pump
Seshia Mode-localized sensing in micro-and nano-mechanical resonator arrays
JPS6339847B2 (enExample)
US7343802B2 (en) Dynamic-quantity sensor
JPH03293565A (ja) Ｐｗｍ静電サーボ式加速度計
JP2008029111A (ja) センサー機能付アクチュエータ装置および粘弾性測定装置
US20140260647A1 (en) Pressure sensor stabilization
JPH0131937Y2 (enExample)
JPH0641888B2 (ja) Ｓａｗフオ−スセンサ
KR970004820Y1 (ko) 압전재료를 이용한 하중센서
SU815527A2 (ru) Ультразвуковой пьезоэлектрическийдАТчиК
US3307410A (en) Accelerometer
SU1064165A1 (ru) Устройство дл измерени нормальных механических напр жений