JPS56140225A - Detecting device for microweight load, microdisplacement, etc. - Google Patents
Detecting device for microweight load, microdisplacement, etc.Info
- Publication number
- JPS56140225A JPS56140225A JP4275980A JP4275980A JPS56140225A JP S56140225 A JPS56140225 A JP S56140225A JP 4275980 A JP4275980 A JP 4275980A JP 4275980 A JP4275980 A JP 4275980A JP S56140225 A JPS56140225 A JP S56140225A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- board
- vibration
- detection
- microweight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 abstract 5
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 230000001052 transient effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
PURPOSE:To measure a microweight load a microdisplacement applied to a vibration board by attaching two pieces of piezoelectric element on the both sides of a vibration board whose both ends are free, vibrating one of the piezolectric elements through the medium of an oscillator and detecting a vibrating through the other piezoelectric element. CONSTITUTION:A vibration board 1 whose both ends are free, the first piezoelectric element 3 attached on one surface of the said board, e.g. with the help of an adhesive, an oscillator 4 which applies an electric signal to the said element, the second piezoelectric element 4 attached on the other surface of the board 1 for detecting a vibration through the board 1 where the piezoelectric element 3 is attached, and a voltmeter 6 for reading an electric output from the element 5, are the consituents of the device. A vibration applied through the piezoelectric element 1 is significantly influenced by resonance properties, if an external force such as microload, etc. is applied to the vibration board 1, and appears in the form of an detection output from the second piezoelectric element. Under this constitution, it is possible to realize a detection device capable of a high-sensitivity detection and a wide-band detection and low electric consumption and satisfactory transient properties for the detection of microweight load, microdisplacement, etc.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4275980A JPS56140225A (en) | 1980-04-03 | 1980-04-03 | Detecting device for microweight load, microdisplacement, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4275980A JPS56140225A (en) | 1980-04-03 | 1980-04-03 | Detecting device for microweight load, microdisplacement, etc. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56140225A true JPS56140225A (en) | 1981-11-02 |
JPS6339847B2 JPS6339847B2 (en) | 1988-08-08 |
Family
ID=12644909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4275980A Granted JPS56140225A (en) | 1980-04-03 | 1980-04-03 | Detecting device for microweight load, microdisplacement, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56140225A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0139495A2 (en) * | 1983-09-28 | 1985-05-02 | Pennwalt Corporation | Piezoelectric resonator force transducer |
JP2007040967A (en) * | 2005-06-29 | 2007-02-15 | Seiko Epson Corp | Drive amount detection device of piezoelectric actuator and electronic equipment |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55159129A (en) * | 1979-05-30 | 1980-12-11 | Takazawa Seisakusho:Kk | Pressure detector |
-
1980
- 1980-04-03 JP JP4275980A patent/JPS56140225A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55159129A (en) * | 1979-05-30 | 1980-12-11 | Takazawa Seisakusho:Kk | Pressure detector |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0139495A2 (en) * | 1983-09-28 | 1985-05-02 | Pennwalt Corporation | Piezoelectric resonator force transducer |
JP2007040967A (en) * | 2005-06-29 | 2007-02-15 | Seiko Epson Corp | Drive amount detection device of piezoelectric actuator and electronic equipment |
JP4586754B2 (en) * | 2005-06-29 | 2010-11-24 | セイコーエプソン株式会社 | Piezoelectric actuator drive amount detection device and electronic device |
Also Published As
Publication number | Publication date |
---|---|
JPS6339847B2 (en) | 1988-08-08 |
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