JPS56140225A - Detecting device for microweight load, microdisplacement, etc. - Google Patents

Detecting device for microweight load, microdisplacement, etc.

Info

Publication number
JPS56140225A
JPS56140225A JP4275980A JP4275980A JPS56140225A JP S56140225 A JPS56140225 A JP S56140225A JP 4275980 A JP4275980 A JP 4275980A JP 4275980 A JP4275980 A JP 4275980A JP S56140225 A JPS56140225 A JP S56140225A
Authority
JP
Japan
Prior art keywords
piezoelectric element
board
vibration
detection
microweight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4275980A
Other languages
Japanese (ja)
Other versions
JPS6339847B2 (en
Inventor
Tadashi Iino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yazaki Corp
Original Assignee
Yazaki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yazaki Corp filed Critical Yazaki Corp
Priority to JP4275980A priority Critical patent/JPS56140225A/en
Publication of JPS56140225A publication Critical patent/JPS56140225A/en
Publication of JPS6339847B2 publication Critical patent/JPS6339847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To measure a microweight load a microdisplacement applied to a vibration board by attaching two pieces of piezoelectric element on the both sides of a vibration board whose both ends are free, vibrating one of the piezolectric elements through the medium of an oscillator and detecting a vibrating through the other piezoelectric element. CONSTITUTION:A vibration board 1 whose both ends are free, the first piezoelectric element 3 attached on one surface of the said board, e.g. with the help of an adhesive, an oscillator 4 which applies an electric signal to the said element, the second piezoelectric element 4 attached on the other surface of the board 1 for detecting a vibration through the board 1 where the piezoelectric element 3 is attached, and a voltmeter 6 for reading an electric output from the element 5, are the consituents of the device. A vibration applied through the piezoelectric element 1 is significantly influenced by resonance properties, if an external force such as microload, etc. is applied to the vibration board 1, and appears in the form of an detection output from the second piezoelectric element. Under this constitution, it is possible to realize a detection device capable of a high-sensitivity detection and a wide-band detection and low electric consumption and satisfactory transient properties for the detection of microweight load, microdisplacement, etc.
JP4275980A 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc. Granted JPS56140225A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4275980A JPS56140225A (en) 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4275980A JPS56140225A (en) 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc.

Publications (2)

Publication Number Publication Date
JPS56140225A true JPS56140225A (en) 1981-11-02
JPS6339847B2 JPS6339847B2 (en) 1988-08-08

Family

ID=12644909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4275980A Granted JPS56140225A (en) 1980-04-03 1980-04-03 Detecting device for microweight load, microdisplacement, etc.

Country Status (1)

Country Link
JP (1) JPS56140225A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0139495A2 (en) * 1983-09-28 1985-05-02 Pennwalt Corporation Piezoelectric resonator force transducer
JP2007040967A (en) * 2005-06-29 2007-02-15 Seiko Epson Corp Drive amount detection device of piezoelectric actuator and electronic equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55159129A (en) * 1979-05-30 1980-12-11 Takazawa Seisakusho:Kk Pressure detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55159129A (en) * 1979-05-30 1980-12-11 Takazawa Seisakusho:Kk Pressure detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0139495A2 (en) * 1983-09-28 1985-05-02 Pennwalt Corporation Piezoelectric resonator force transducer
JP2007040967A (en) * 2005-06-29 2007-02-15 Seiko Epson Corp Drive amount detection device of piezoelectric actuator and electronic equipment
JP4586754B2 (en) * 2005-06-29 2010-11-24 セイコーエプソン株式会社 Piezoelectric actuator drive amount detection device and electronic device

Also Published As

Publication number Publication date
JPS6339847B2 (en) 1988-08-08

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