JPS6339656Y2 - - Google Patents

Info

Publication number
JPS6339656Y2
JPS6339656Y2 JP13174382U JP13174382U JPS6339656Y2 JP S6339656 Y2 JPS6339656 Y2 JP S6339656Y2 JP 13174382 U JP13174382 U JP 13174382U JP 13174382 U JP13174382 U JP 13174382U JP S6339656 Y2 JPS6339656 Y2 JP S6339656Y2
Authority
JP
Japan
Prior art keywords
chamber
measured
probe
stage
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13174382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5935876U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13174382U priority Critical patent/JPS5935876U/ja
Publication of JPS5935876U publication Critical patent/JPS5935876U/ja
Application granted granted Critical
Publication of JPS6339656Y2 publication Critical patent/JPS6339656Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13174382U 1982-08-31 1982-08-31 低温用プロ−バ Granted JPS5935876U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13174382U JPS5935876U (ja) 1982-08-31 1982-08-31 低温用プロ−バ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13174382U JPS5935876U (ja) 1982-08-31 1982-08-31 低温用プロ−バ

Publications (2)

Publication Number Publication Date
JPS5935876U JPS5935876U (ja) 1984-03-06
JPS6339656Y2 true JPS6339656Y2 (enrdf_load_stackoverflow) 1988-10-18

Family

ID=30297740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13174382U Granted JPS5935876U (ja) 1982-08-31 1982-08-31 低温用プロ−バ

Country Status (1)

Country Link
JP (1) JPS5935876U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0622255B2 (ja) * 1986-12-26 1994-03-23 東京エレクトロン株式会社 プローバ

Also Published As

Publication number Publication date
JPS5935876U (ja) 1984-03-06

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