JPS6339656Y2 - - Google Patents
Info
- Publication number
- JPS6339656Y2 JPS6339656Y2 JP13174382U JP13174382U JPS6339656Y2 JP S6339656 Y2 JPS6339656 Y2 JP S6339656Y2 JP 13174382 U JP13174382 U JP 13174382U JP 13174382 U JP13174382 U JP 13174382U JP S6339656 Y2 JPS6339656 Y2 JP S6339656Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- measured
- probe
- stage
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 18
- 230000007246 mechanism Effects 0.000 claims description 17
- 239000002470 thermal conductor Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 12
- 238000001816 cooling Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 7
- 239000003507 refrigerant Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13174382U JPS5935876U (ja) | 1982-08-31 | 1982-08-31 | 低温用プロ−バ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13174382U JPS5935876U (ja) | 1982-08-31 | 1982-08-31 | 低温用プロ−バ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5935876U JPS5935876U (ja) | 1984-03-06 |
JPS6339656Y2 true JPS6339656Y2 (enrdf_load_stackoverflow) | 1988-10-18 |
Family
ID=30297740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13174382U Granted JPS5935876U (ja) | 1982-08-31 | 1982-08-31 | 低温用プロ−バ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5935876U (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0622255B2 (ja) * | 1986-12-26 | 1994-03-23 | 東京エレクトロン株式会社 | プローバ |
-
1982
- 1982-08-31 JP JP13174382U patent/JPS5935876U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5935876U (ja) | 1984-03-06 |
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