JPS6338954Y2 - - Google Patents

Info

Publication number
JPS6338954Y2
JPS6338954Y2 JP1984063352U JP6335284U JPS6338954Y2 JP S6338954 Y2 JPS6338954 Y2 JP S6338954Y2 JP 1984063352 U JP1984063352 U JP 1984063352U JP 6335284 U JP6335284 U JP 6335284U JP S6338954 Y2 JPS6338954 Y2 JP S6338954Y2
Authority
JP
Japan
Prior art keywords
substrate
processed
liquid
cleaning device
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984063352U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60176288U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6335284U priority Critical patent/JPS60176288U/ja
Publication of JPS60176288U publication Critical patent/JPS60176288U/ja
Application granted granted Critical
Publication of JPS6338954Y2 publication Critical patent/JPS6338954Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP6335284U 1984-04-28 1984-04-28 洗浄装置 Granted JPS60176288U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6335284U JPS60176288U (ja) 1984-04-28 1984-04-28 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6335284U JPS60176288U (ja) 1984-04-28 1984-04-28 洗浄装置

Publications (2)

Publication Number Publication Date
JPS60176288U JPS60176288U (ja) 1985-11-21
JPS6338954Y2 true JPS6338954Y2 (enrdf_load_stackoverflow) 1988-10-13

Family

ID=30593412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6335284U Granted JPS60176288U (ja) 1984-04-28 1984-04-28 洗浄装置

Country Status (1)

Country Link
JP (1) JPS60176288U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623298U (enrdf_load_stackoverflow) * 1979-07-25 1981-03-02

Also Published As

Publication number Publication date
JPS60176288U (ja) 1985-11-21

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