JPS6338426B2 - - Google Patents

Info

Publication number
JPS6338426B2
JPS6338426B2 JP58180833A JP18083383A JPS6338426B2 JP S6338426 B2 JPS6338426 B2 JP S6338426B2 JP 58180833 A JP58180833 A JP 58180833A JP 18083383 A JP18083383 A JP 18083383A JP S6338426 B2 JPS6338426 B2 JP S6338426B2
Authority
JP
Japan
Prior art keywords
evaporation section
molten metal
evaporation
resistor
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58180833A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6075574A (ja
Inventor
Hirosane Takei
Seiji Myagawa
Hidenori Suwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP18083383A priority Critical patent/JPS6075574A/ja
Publication of JPS6075574A publication Critical patent/JPS6075574A/ja
Publication of JPS6338426B2 publication Critical patent/JPS6338426B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP18083383A 1983-09-30 1983-09-30 溶融金属蒸発源装置 Granted JPS6075574A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18083383A JPS6075574A (ja) 1983-09-30 1983-09-30 溶融金属蒸発源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18083383A JPS6075574A (ja) 1983-09-30 1983-09-30 溶融金属蒸発源装置

Publications (2)

Publication Number Publication Date
JPS6075574A JPS6075574A (ja) 1985-04-27
JPS6338426B2 true JPS6338426B2 (enExample) 1988-07-29

Family

ID=16090153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18083383A Granted JPS6075574A (ja) 1983-09-30 1983-09-30 溶融金属蒸発源装置

Country Status (1)

Country Link
JP (1) JPS6075574A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116769A (ja) * 1983-11-30 1985-06-24 Shinko Electric Ind Co Ltd 蒸着装置
JPH03170662A (ja) * 1989-11-29 1991-07-24 Matsushita Electric Ind Co Ltd 蒸着装置および蒸着方法
JP2010059461A (ja) * 2008-09-03 2010-03-18 Panasonic Corp 成膜装置
JP5621269B2 (ja) * 2010-02-09 2014-11-12 パナソニック株式会社 蒸着用ボートおよびこれを用いた蒸着装置
JP6998659B2 (ja) * 2017-02-02 2022-01-18 株式会社アルバック 蒸着用金材料製造方法
CN114892139A (zh) * 2022-03-31 2022-08-12 宣城开盛新能源科技有限公司 一种控制蒸发源材料水分及杂质的方法及装置

Also Published As

Publication number Publication date
JPS6075574A (ja) 1985-04-27

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