JPS6075574A - 溶融金属蒸発源装置 - Google Patents

溶融金属蒸発源装置

Info

Publication number
JPS6075574A
JPS6075574A JP18083383A JP18083383A JPS6075574A JP S6075574 A JPS6075574 A JP S6075574A JP 18083383 A JP18083383 A JP 18083383A JP 18083383 A JP18083383 A JP 18083383A JP S6075574 A JPS6075574 A JP S6075574A
Authority
JP
Japan
Prior art keywords
molten
metal
vapor
pot
melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18083383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338426B2 (enExample
Inventor
Hirosane Takei
武井　宏真
Seiji Miyagawa
宮川　清次
Hidenori Suwa
秀則 諏訪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP18083383A priority Critical patent/JPS6075574A/ja
Publication of JPS6075574A publication Critical patent/JPS6075574A/ja
Publication of JPS6338426B2 publication Critical patent/JPS6338426B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP18083383A 1983-09-30 1983-09-30 溶融金属蒸発源装置 Granted JPS6075574A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18083383A JPS6075574A (ja) 1983-09-30 1983-09-30 溶融金属蒸発源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18083383A JPS6075574A (ja) 1983-09-30 1983-09-30 溶融金属蒸発源装置

Publications (2)

Publication Number Publication Date
JPS6075574A true JPS6075574A (ja) 1985-04-27
JPS6338426B2 JPS6338426B2 (enExample) 1988-07-29

Family

ID=16090153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18083383A Granted JPS6075574A (ja) 1983-09-30 1983-09-30 溶融金属蒸発源装置

Country Status (1)

Country Link
JP (1) JPS6075574A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116769A (ja) * 1983-11-30 1985-06-24 Shinko Electric Ind Co Ltd 蒸着装置
JPH03170662A (ja) * 1989-11-29 1991-07-24 Matsushita Electric Ind Co Ltd 蒸着装置および蒸着方法
JP2010059461A (ja) * 2008-09-03 2010-03-18 Panasonic Corp 成膜装置
JP2011162831A (ja) * 2010-02-09 2011-08-25 Panasonic Corp 蒸着用ボートおよびこれを用いた蒸着装置
JP2018123389A (ja) * 2017-02-02 2018-08-09 株式会社アルバック 蒸着用金材料、蒸着用金材料製造方法
CN114892139A (zh) * 2022-03-31 2022-08-12 宣城开盛新能源科技有限公司 一种控制蒸发源材料水分及杂质的方法及装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116769A (ja) * 1983-11-30 1985-06-24 Shinko Electric Ind Co Ltd 蒸着装置
JPH03170662A (ja) * 1989-11-29 1991-07-24 Matsushita Electric Ind Co Ltd 蒸着装置および蒸着方法
JP2010059461A (ja) * 2008-09-03 2010-03-18 Panasonic Corp 成膜装置
JP2011162831A (ja) * 2010-02-09 2011-08-25 Panasonic Corp 蒸着用ボートおよびこれを用いた蒸着装置
JP2018123389A (ja) * 2017-02-02 2018-08-09 株式会社アルバック 蒸着用金材料、蒸着用金材料製造方法
CN114892139A (zh) * 2022-03-31 2022-08-12 宣城开盛新能源科技有限公司 一种控制蒸发源材料水分及杂质的方法及装置

Also Published As

Publication number Publication date
JPS6338426B2 (enExample) 1988-07-29

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