JPS6337899B2 - - Google Patents
Info
- Publication number
- JPS6337899B2 JPS6337899B2 JP55038673A JP3867380A JPS6337899B2 JP S6337899 B2 JPS6337899 B2 JP S6337899B2 JP 55038673 A JP55038673 A JP 55038673A JP 3867380 A JP3867380 A JP 3867380A JP S6337899 B2 JPS6337899 B2 JP S6337899B2
- Authority
- JP
- Japan
- Prior art keywords
- sample device
- circuit
- signal
- sample
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000031700 light absorption Effects 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000002604 ultrasonography Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 description 19
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 17
- 230000003287 optical effect Effects 0.000 description 17
- 238000005070 sampling Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003957 acoustic microscopy Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/26—Scanned objects
- G01N2291/269—Various geometry objects
- G01N2291/2697—Wafer or (micro)electronic parts
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3867380A JPS56135153A (en) | 1980-03-26 | 1980-03-26 | Laser-scan-type ultrasonic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3867380A JPS56135153A (en) | 1980-03-26 | 1980-03-26 | Laser-scan-type ultrasonic microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56135153A JPS56135153A (en) | 1981-10-22 |
| JPS6337899B2 true JPS6337899B2 (enrdf_load_stackoverflow) | 1988-07-27 |
Family
ID=12531785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3867380A Granted JPS56135153A (en) | 1980-03-26 | 1980-03-26 | Laser-scan-type ultrasonic microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56135153A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5872052A (ja) * | 1981-10-27 | 1983-04-28 | Noritoshi Nakabachi | 反射型超音波顕微鏡装置 |
| US4518992A (en) * | 1982-11-17 | 1985-05-21 | Sonoscan, Inc. | Acoustic imaging system and method |
| JPS59111058A (ja) * | 1982-12-08 | 1984-06-27 | ジヨ−ジ、マ−キン | 構造解析方法および装置 |
-
1980
- 1980-03-26 JP JP3867380A patent/JPS56135153A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56135153A (en) | 1981-10-22 |
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