JPS6337169Y2 - - Google Patents
Info
- Publication number
- JPS6337169Y2 JPS6337169Y2 JP7215082U JP7215082U JPS6337169Y2 JP S6337169 Y2 JPS6337169 Y2 JP S6337169Y2 JP 7215082 U JP7215082 U JP 7215082U JP 7215082 U JP7215082 U JP 7215082U JP S6337169 Y2 JPS6337169 Y2 JP S6337169Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing liquid
- tank
- pipe
- polishing
- abrasive grains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 45
- 239000007788 liquid Substances 0.000 claims description 43
- 239000006061 abrasive grain Substances 0.000 claims description 14
- 239000002002 slurry Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000003756 stirring Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Lift Valve (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7215082U JPS58177266U (ja) | 1982-05-18 | 1982-05-18 | 研摩液供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7215082U JPS58177266U (ja) | 1982-05-18 | 1982-05-18 | 研摩液供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58177266U JPS58177266U (ja) | 1983-11-26 |
| JPS6337169Y2 true JPS6337169Y2 (enrdf_load_stackoverflow) | 1988-10-03 |
Family
ID=30081724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7215082U Granted JPS58177266U (ja) | 1982-05-18 | 1982-05-18 | 研摩液供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58177266U (enrdf_load_stackoverflow) |
-
1982
- 1982-05-18 JP JP7215082U patent/JPS58177266U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58177266U (ja) | 1983-11-26 |
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