JPS58177266U - 研摩液供給装置 - Google Patents

研摩液供給装置

Info

Publication number
JPS58177266U
JPS58177266U JP7215082U JP7215082U JPS58177266U JP S58177266 U JPS58177266 U JP S58177266U JP 7215082 U JP7215082 U JP 7215082U JP 7215082 U JP7215082 U JP 7215082U JP S58177266 U JPS58177266 U JP S58177266U
Authority
JP
Japan
Prior art keywords
polishing liquid
supply device
liquid supply
cock
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7215082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6337169Y2 (enrdf_load_stackoverflow
Inventor
石川　通夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7215082U priority Critical patent/JPS58177266U/ja
Publication of JPS58177266U publication Critical patent/JPS58177266U/ja
Application granted granted Critical
Publication of JPS6337169Y2 publication Critical patent/JPS6337169Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP7215082U 1982-05-18 1982-05-18 研摩液供給装置 Granted JPS58177266U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7215082U JPS58177266U (ja) 1982-05-18 1982-05-18 研摩液供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7215082U JPS58177266U (ja) 1982-05-18 1982-05-18 研摩液供給装置

Publications (2)

Publication Number Publication Date
JPS58177266U true JPS58177266U (ja) 1983-11-26
JPS6337169Y2 JPS6337169Y2 (enrdf_load_stackoverflow) 1988-10-03

Family

ID=30081724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7215082U Granted JPS58177266U (ja) 1982-05-18 1982-05-18 研摩液供給装置

Country Status (1)

Country Link
JP (1) JPS58177266U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6337169Y2 (enrdf_load_stackoverflow) 1988-10-03

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