JPS6336450B2 - - Google Patents
Info
- Publication number
- JPS6336450B2 JPS6336450B2 JP7857179A JP7857179A JPS6336450B2 JP S6336450 B2 JPS6336450 B2 JP S6336450B2 JP 7857179 A JP7857179 A JP 7857179A JP 7857179 A JP7857179 A JP 7857179A JP S6336450 B2 JPS6336450 B2 JP S6336450B2
- Authority
- JP
- Japan
- Prior art keywords
- chart
- mtf
- output signal
- photo
- level area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004364 calculation method Methods 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 15
- 238000012360 testing method Methods 0.000 claims description 8
- 238000005286 illumination Methods 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 22
- 230000007246 mechanism Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 238000012546 transfer Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7857179A JPS562517A (en) | 1979-06-21 | 1979-06-21 | Signal processing method of mtf measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7857179A JPS562517A (en) | 1979-06-21 | 1979-06-21 | Signal processing method of mtf measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS562517A JPS562517A (en) | 1981-01-12 |
| JPS6336450B2 true JPS6336450B2 (enrdf_load_stackoverflow) | 1988-07-20 |
Family
ID=13665579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7857179A Granted JPS562517A (en) | 1979-06-21 | 1979-06-21 | Signal processing method of mtf measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS562517A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3203984C2 (de) * | 1982-02-05 | 1984-10-31 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und Anordnung zur Darstellung der Abbildungsgüte von optischen Systemen |
-
1979
- 1979-06-21 JP JP7857179A patent/JPS562517A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS562517A (en) | 1981-01-12 |
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