JPS6336290Y2 - - Google Patents
Info
- Publication number
- JPS6336290Y2 JPS6336290Y2 JP18226782U JP18226782U JPS6336290Y2 JP S6336290 Y2 JPS6336290 Y2 JP S6336290Y2 JP 18226782 U JP18226782 U JP 18226782U JP 18226782 U JP18226782 U JP 18226782U JP S6336290 Y2 JPS6336290 Y2 JP S6336290Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- detection
- optical fiber
- article
- optical fibers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013307 optical fiber Substances 0.000 claims description 39
- 238000001514 detection method Methods 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Optical Radar Systems And Details Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18226782U JPS5985977U (ja) | 1982-12-01 | 1982-12-01 | 密閉容器内の物品の検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18226782U JPS5985977U (ja) | 1982-12-01 | 1982-12-01 | 密閉容器内の物品の検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5985977U JPS5985977U (ja) | 1984-06-11 |
JPS6336290Y2 true JPS6336290Y2 (enrdf_load_stackoverflow) | 1988-09-27 |
Family
ID=30394763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18226782U Granted JPS5985977U (ja) | 1982-12-01 | 1982-12-01 | 密閉容器内の物品の検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5985977U (enrdf_load_stackoverflow) |
-
1982
- 1982-12-01 JP JP18226782U patent/JPS5985977U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5985977U (ja) | 1984-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4451197A (en) | Object detection apparatus and method | |
US4899585A (en) | Liquid level detector and method for a vapor deposition container | |
JPS6336290Y2 (enrdf_load_stackoverflow) | ||
JPS59208741A (ja) | 半導体ウエ−ハ用吸着チヤツク装置 | |
KR20050016607A (ko) | 기판 검출을 위해 각을 이루는 센서들 | |
JPH0421098Y2 (enrdf_load_stackoverflow) | ||
JP2001237300A (ja) | 半導体製造装置 | |
JPH078503Y2 (ja) | カード位置検出部の構造 | |
JPH0412251A (ja) | 反応室の汚れ検出装置 | |
JP2515971Y2 (ja) | 光電センサー | |
JPS6123827Y2 (enrdf_load_stackoverflow) | ||
JPS6148785A (ja) | 光フアイバ−スイツチ | |
CN209766370U (zh) | 一种工艺腔及用于腔室的位置检测装置 | |
JPH04128605A (ja) | オリエンテーションフラット検出装置 | |
JPH03118428A (ja) | 赤外線温度計 | |
JPH0613445Y2 (ja) | 密封容器の真空度検査装置 | |
JPH0769406A (ja) | 真空内ウェハ搬送装置 | |
JPH0610244Y2 (ja) | 物体位置検出器 | |
JPH01225128A (ja) | ウェハ移載ハンド | |
JPS62122230A (ja) | 真空吸着状態検出装置 | |
JP2000269308A (ja) | 密閉形基板収納器及び密閉型基板収納器内の基板検知方法 | |
JPS6065658U (ja) | 真空スイツチ管の真空度判定装置 | |
JPH02201974A (ja) | 発光素子パッケージ | |
JPH0525148Y2 (enrdf_load_stackoverflow) | ||
JPH04130905U (ja) | 光フイードスルー |