JPS6336046Y2 - - Google Patents
Info
- Publication number
- JPS6336046Y2 JPS6336046Y2 JP16172686U JP16172686U JPS6336046Y2 JP S6336046 Y2 JPS6336046 Y2 JP S6336046Y2 JP 16172686 U JP16172686 U JP 16172686U JP 16172686 U JP16172686 U JP 16172686U JP S6336046 Y2 JPS6336046 Y2 JP S6336046Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- turntable
- substrate
- rotating body
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 80
- 239000000758 substrate Substances 0.000 claims description 41
- 239000007788 liquid Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 238000005406 washing Methods 0.000 claims description 9
- 230000000694 effects Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000003657 drainage water Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16172686U JPS6336046Y2 (cs) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16172686U JPS6336046Y2 (cs) | 1986-10-22 | 1986-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6369160U JPS6369160U (cs) | 1988-05-10 |
| JPS6336046Y2 true JPS6336046Y2 (cs) | 1988-09-26 |
Family
ID=31088309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16172686U Expired JPS6336046Y2 (cs) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336046Y2 (cs) |
-
1986
- 1986-10-22 JP JP16172686U patent/JPS6336046Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6369160U (cs) | 1988-05-10 |
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