JPS6335990U - - Google Patents

Info

Publication number
JPS6335990U
JPS6335990U JP1986129079U JP12907986U JPS6335990U JP S6335990 U JPS6335990 U JP S6335990U JP 1986129079 U JP1986129079 U JP 1986129079U JP 12907986 U JP12907986 U JP 12907986U JP S6335990 U JPS6335990 U JP S6335990U
Authority
JP
Japan
Prior art keywords
stage
precision moving
support base
travel
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986129079U
Other languages
English (en)
Other versions
JPH04317Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986129079U priority Critical patent/JPH04317Y2/ja
Publication of JPS6335990U publication Critical patent/JPS6335990U/ja
Priority to US07/700,952 priority patent/US5115354A/en
Application granted granted Critical
Publication of JPH04317Y2 publication Critical patent/JPH04317Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1824—Manual alignment
    • G02B7/1825—Manual alignment made by screws, e.g. for laser mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Electron Beam Exposure (AREA)
  • Machine Tool Units (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る高精度移動ステージ装置
の第１実施例を示す平面図、第２図は同じく断面
図、第３図は同じくステージと支持台との結合状
態を示す拡大断面図、第４図は同じくステージの
歪み変形状態を示す説明図、第５図は本考案に係
る第２実施例を示す平面図、第６図は同じく断面
図、第７図は本考案に係る第３実施例を示す平面
図、第８図は同じく断面図、第９図は従来の高精
度移動ステージ装置を示す平面図、第１０図は同
じく断面図である。 １……ベース、２……ガイドウエイ、３……Ｘ
ステージ、５……Ｙステージ、６……被処理材固
定具、７……レーザミラー、１１……支持台、１
２……受けぴん、１３……弾性部材、Ｗ……被処
理材。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ガイドウエイを介して少なくとも一軸方向
    に移動可能で位置測定用レーザミラー及び被処理
    材が備えられる高精度移動ステージ装置において
    、ステージ上に複数点で支持され、ステージ走行
    方向を含む平面に対してほぼ平行な取付面を有す
    る支持台を配置するとともに、前記支持台を、ス
    テージ走行方向または走行平面方向に対して剛性
    が高くかつその走行平面と直交する上下方向に対
    して低剛性の弾性部材で前記ステージに結合した
    ことを特徴とする高精度移動ステージ装置。 (2) 支持台を、ステージ走行方向を含む平面と
    直交する上下方向に対して少なくとも３点以上で
    ステージ上に接触支持させたことを特徴とする実
    用新案登録請求の範囲第１項に記載の高精度移動
    ステージ装置。 (3) 支持台を、ステージ走行方向を含む平面と
    直交する上下方向に対して少なくとも３点以上で
    ステージ上に接触支持させるとともに、これら各
    々の接触支持部の一部もしくは全部を上下移動可
    能にしたことを特徴とする実用新案登録請求の範
    囲第１項に記載の高精度移動ステージ装置。 (4) 各々の接触支持部の一部もしくは全部にピ
    エゾ素子を用いて上下移動可能にしたことを特徴
    とする実用新案登録請求の範囲第３項に記載の高
    精度移動ステージ装置。
JP1986129079U 1986-08-25 1986-08-25 Expired JPH04317Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986129079U JPH04317Y2 (ja) 1986-08-25 1986-08-25
US07/700,952 US5115354A (en) 1986-08-25 1991-05-14 High accuracy traveling table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129079U JPH04317Y2 (ja) 1986-08-25 1986-08-25

Publications (2)

Publication Number Publication Date
JPS6335990U true JPS6335990U (ja) 1988-03-08
JPH04317Y2 JPH04317Y2 (ja) 1992-01-07

Family

ID=15000558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129079U Expired JPH04317Y2 (ja) 1986-08-25 1986-08-25

Country Status (2)

Country Link
US (1) US5115354A (ja)
JP (1) JPH04317Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140989A (ja) * 1986-11-20 1988-06-13 アテツク・コ−ポレ−シヨン 位置決め装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5341709A (en) * 1992-12-17 1994-08-30 Speranza Specialty Machining Portable vertical boring machine
US5341700A (en) * 1992-12-17 1994-08-30 Speranza Specialty Machining X-Y movement mechanism
US6813053B1 (en) * 2000-05-19 2004-11-02 The Regents Of The University Of California Apparatus and method for controlled cantilever motion through torsional beams and a counterweight
US6601524B2 (en) * 2001-03-28 2003-08-05 Newport Corporation Translation table with a spring biased dovetail bearing
CN108278972B (zh) * 2018-04-17 2024-02-27 徐州利宝机械科技有限公司 一种回转件测量装置以及其后台控制方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6112092U (ja) * 1984-06-28 1986-01-24 株式会社ニコン 載物台の送りねじ装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746065A (en) * 1980-09-01 1982-03-16 Mazda Motor Corp Ignition system of engine
JPS5790607A (en) * 1980-11-28 1982-06-05 Fujitsu Ltd Optical glass fitting device
US4492356A (en) * 1982-02-26 1985-01-08 Hitachi, Ltd. Precision parallel translation system
US4421386A (en) * 1982-03-03 1983-12-20 Honeywell Inc. Stress-free window for laser applications
JPS6082212A (ja) * 1983-10-05 1985-05-10 Nippon Steel Corp 被圧延材のキヤンバ−制御方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6112092U (ja) * 1984-06-28 1986-01-24 株式会社ニコン 載物台の送りねじ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140989A (ja) * 1986-11-20 1988-06-13 アテツク・コ−ポレ−シヨン 位置決め装置

Also Published As

Publication number Publication date
JPH04317Y2 (ja) 1992-01-07
US5115354A (en) 1992-05-19

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