JPS6335379B2 - - Google Patents

Info

Publication number
JPS6335379B2
JPS6335379B2 JP57008882A JP888282A JPS6335379B2 JP S6335379 B2 JPS6335379 B2 JP S6335379B2 JP 57008882 A JP57008882 A JP 57008882A JP 888282 A JP888282 A JP 888282A JP S6335379 B2 JPS6335379 B2 JP S6335379B2
Authority
JP
Japan
Prior art keywords
grinding wheel
rotation axis
workpiece
groove
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57008882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58126055A (ja
Inventor
Shigeru Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP888282A priority Critical patent/JPS58126055A/ja
Priority to US06/377,008 priority patent/US4517769A/en
Priority to GB8214280A priority patent/GB2098893B/en
Priority to DE3218953A priority patent/DE3218953C2/de
Publication of JPS58126055A publication Critical patent/JPS58126055A/ja
Publication of JPS6335379B2 publication Critical patent/JPS6335379B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP888282A 1981-05-20 1982-01-25 斜め溝加工方法 Granted JPS58126055A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP888282A JPS58126055A (ja) 1982-01-25 1982-01-25 斜め溝加工方法
US06/377,008 US4517769A (en) 1981-05-20 1982-05-11 Method and apparatus for forming oblique groove in semiconductor device
GB8214280A GB2098893B (en) 1981-05-20 1982-05-17 Method and apparatus for forming oblique groove in semiconductor device
DE3218953A DE3218953C2 (de) 1981-05-20 1982-05-19 Verfahren und Vorrichtung zur Ausbildung einer Schrägrille in einer Halbleitervorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP888282A JPS58126055A (ja) 1982-01-25 1982-01-25 斜め溝加工方法

Publications (2)

Publication Number Publication Date
JPS58126055A JPS58126055A (ja) 1983-07-27
JPS6335379B2 true JPS6335379B2 (enrdf_load_stackoverflow) 1988-07-14

Family

ID=11705040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP888282A Granted JPS58126055A (ja) 1981-05-20 1982-01-25 斜め溝加工方法

Country Status (1)

Country Link
JP (1) JPS58126055A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014003216A (ja) * 2012-06-20 2014-01-09 Disco Abrasive Syst Ltd ウェーハの加工方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2462232A1 (fr) * 1979-08-02 1981-02-13 Treuillet Bernard Perfectionnements aux machines pour l'affutage des outils d'usinage

Also Published As

Publication number Publication date
JPS58126055A (ja) 1983-07-27

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