JPS6334941U - - Google Patents

Info

Publication number
JPS6334941U
JPS6334941U JP12788886U JP12788886U JPS6334941U JP S6334941 U JPS6334941 U JP S6334941U JP 12788886 U JP12788886 U JP 12788886U JP 12788886 U JP12788886 U JP 12788886U JP S6334941 U JPS6334941 U JP S6334941U
Authority
JP
Japan
Prior art keywords
air blowing
clean room
substantially parallel
plane
blowing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12788886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332916Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12788886U priority Critical patent/JPH0332916Y2/ja
Publication of JPS6334941U publication Critical patent/JPS6334941U/ja
Application granted granted Critical
Publication of JPH0332916Y2 publication Critical patent/JPH0332916Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP12788886U 1986-08-22 1986-08-22 Expired JPH0332916Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12788886U JPH0332916Y2 (en, 2012) 1986-08-22 1986-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12788886U JPH0332916Y2 (en, 2012) 1986-08-22 1986-08-22

Publications (2)

Publication Number Publication Date
JPS6334941U true JPS6334941U (en, 2012) 1988-03-07
JPH0332916Y2 JPH0332916Y2 (en, 2012) 1991-07-12

Family

ID=31023069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12788886U Expired JPH0332916Y2 (en, 2012) 1986-08-22 1986-08-22

Country Status (1)

Country Link
JP (1) JPH0332916Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH0332916Y2 (en, 2012) 1991-07-12

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