JPS6334468Y2 - - Google Patents
Info
- Publication number
- JPS6334468Y2 JPS6334468Y2 JP1099583U JP1099583U JPS6334468Y2 JP S6334468 Y2 JPS6334468 Y2 JP S6334468Y2 JP 1099583 U JP1099583 U JP 1099583U JP 1099583 U JP1099583 U JP 1099583U JP S6334468 Y2 JPS6334468 Y2 JP S6334468Y2
- Authority
- JP
- Japan
- Prior art keywords
- armature
- linear motor
- armature coil
- field magnet
- motor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 7
- 238000004804 winding Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1099583U JPS59119786U (ja) | 1983-01-31 | 1983-01-31 | 直流リニアモ−タ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1099583U JPS59119786U (ja) | 1983-01-31 | 1983-01-31 | 直流リニアモ−タ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59119786U JPS59119786U (ja) | 1984-08-13 |
JPS6334468Y2 true JPS6334468Y2 (US06521211-20030218-C00004.png) | 1988-09-13 |
Family
ID=30142420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1099583U Granted JPS59119786U (ja) | 1983-01-31 | 1983-01-31 | 直流リニアモ−タ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59119786U (US06521211-20030218-C00004.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4399984B2 (ja) * | 1998-03-13 | 2010-01-20 | 株式会社ニコン | リニアモータ製造方法、リニアモータ、該リニアモータを備えたステージ装置、および露光装置 |
-
1983
- 1983-01-31 JP JP1099583U patent/JPS59119786U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59119786U (ja) | 1984-08-13 |
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