JPS6333275B2 - - Google Patents
Info
- Publication number
- JPS6333275B2 JPS6333275B2 JP56007951A JP795181A JPS6333275B2 JP S6333275 B2 JPS6333275 B2 JP S6333275B2 JP 56007951 A JP56007951 A JP 56007951A JP 795181 A JP795181 A JP 795181A JP S6333275 B2 JPS6333275 B2 JP S6333275B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- microwave
- temperature
- support
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000012544 monitoring process Methods 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 54
- 229920002120 photoresistant polymer Polymers 0.000 description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 238000012545 processing Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 229910001873 dinitrogen Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Control Of High-Frequency Heating Circuits (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP795181A JPS57123679A (en) | 1981-01-23 | 1981-01-23 | Heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP795181A JPS57123679A (en) | 1981-01-23 | 1981-01-23 | Heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57123679A JPS57123679A (en) | 1982-08-02 |
| JPS6333275B2 true JPS6333275B2 (fr) | 1988-07-05 |
Family
ID=11679794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP795181A Granted JPS57123679A (en) | 1981-01-23 | 1981-01-23 | Heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57123679A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01225119A (ja) * | 1988-03-03 | 1989-09-08 | Nec Corp | ホットプレート式ベーキング装置 |
| FR2854022A1 (fr) * | 2003-04-16 | 2004-10-22 | Rimm Technologies Corp N V | Dispositif a micro-ondes ou a radio-frequences comprenant trois generateurs decouples |
| JP2007228219A (ja) * | 2006-02-23 | 2007-09-06 | Idx Corp | マイクロ波装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244922U (fr) * | 1975-09-26 | 1977-03-30 | ||
| JPS53129349A (en) * | 1977-04-18 | 1978-11-11 | Hitachi Heating Appliance Co Ltd | High frequency heater |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217160Y2 (fr) * | 1972-08-21 | 1977-04-18 | ||
| JPS5055951U (fr) * | 1973-09-20 | 1975-05-27 |
-
1981
- 1981-01-23 JP JP795181A patent/JPS57123679A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244922U (fr) * | 1975-09-26 | 1977-03-30 | ||
| JPS53129349A (en) * | 1977-04-18 | 1978-11-11 | Hitachi Heating Appliance Co Ltd | High frequency heater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57123679A (en) | 1982-08-02 |
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