JPS6332983Y2 - - Google Patents
Info
- Publication number
- JPS6332983Y2 JPS6332983Y2 JP1983148159U JP14815983U JPS6332983Y2 JP S6332983 Y2 JPS6332983 Y2 JP S6332983Y2 JP 1983148159 U JP1983148159 U JP 1983148159U JP 14815983 U JP14815983 U JP 14815983U JP S6332983 Y2 JPS6332983 Y2 JP S6332983Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- accumulator
- pump
- gas
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003068 static effect Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000002706 hydrostatic effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14815983U JPS6056823U (ja) | 1983-09-27 | 1983-09-27 | 静圧気体軸受の気体供給制御装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14815983U JPS6056823U (ja) | 1983-09-27 | 1983-09-27 | 静圧気体軸受の気体供給制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6056823U JPS6056823U (ja) | 1985-04-20 |
JPS6332983Y2 true JPS6332983Y2 (US20030220297A1-20031127-C00074.png) | 1988-09-02 |
Family
ID=30329261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14815983U Granted JPS6056823U (ja) | 1983-09-27 | 1983-09-27 | 静圧気体軸受の気体供給制御装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6056823U (US20030220297A1-20031127-C00074.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4594031B2 (ja) * | 2004-10-18 | 2010-12-08 | 大日本スクリーン製造株式会社 | 基板保持装置 |
US20230272808A1 (en) * | 2020-07-30 | 2023-08-31 | Fanuc Corporation | Pressurized fluid supply system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022150A (US20030220297A1-20031127-C00074.png) * | 1973-06-21 | 1975-03-10 | ||
JPS56138502A (en) * | 1980-03-31 | 1981-10-29 | Agency Of Ind Science & Technol | Oil pressure servo driving device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5423041Y2 (US20030220297A1-20031127-C00074.png) * | 1972-06-13 | 1979-08-09 | ||
JPS57117401U (US20030220297A1-20031127-C00074.png) * | 1981-01-14 | 1982-07-21 |
-
1983
- 1983-09-27 JP JP14815983U patent/JPS6056823U/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022150A (US20030220297A1-20031127-C00074.png) * | 1973-06-21 | 1975-03-10 | ||
JPS56138502A (en) * | 1980-03-31 | 1981-10-29 | Agency Of Ind Science & Technol | Oil pressure servo driving device |
Also Published As
Publication number | Publication date |
---|---|
JPS6056823U (ja) | 1985-04-20 |
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