JPS6332937Y2 - - Google Patents

Info

Publication number
JPS6332937Y2
JPS6332937Y2 JP7362584U JP7362584U JPS6332937Y2 JP S6332937 Y2 JPS6332937 Y2 JP S6332937Y2 JP 7362584 U JP7362584 U JP 7362584U JP 7362584 U JP7362584 U JP 7362584U JP S6332937 Y2 JPS6332937 Y2 JP S6332937Y2
Authority
JP
Japan
Prior art keywords
exhaust outlet
exhaust
lid
vacuum pump
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7362584U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60185075U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7362584U priority Critical patent/JPS60185075U/ja
Publication of JPS60185075U publication Critical patent/JPS60185075U/ja
Application granted granted Critical
Publication of JPS6332937Y2 publication Critical patent/JPS6332937Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exhaust Silencers (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP7362584U 1984-05-19 1984-05-19 真空ポンプの消音器 Granted JPS60185075U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7362584U JPS60185075U (ja) 1984-05-19 1984-05-19 真空ポンプの消音器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7362584U JPS60185075U (ja) 1984-05-19 1984-05-19 真空ポンプの消音器

Publications (2)

Publication Number Publication Date
JPS60185075U JPS60185075U (ja) 1985-12-07
JPS6332937Y2 true JPS6332937Y2 (enExample) 1988-09-02

Family

ID=30613166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7362584U Granted JPS60185075U (ja) 1984-05-19 1984-05-19 真空ポンプの消音器

Country Status (1)

Country Link
JP (1) JPS60185075U (enExample)

Also Published As

Publication number Publication date
JPS60185075U (ja) 1985-12-07

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