JPS633157Y2 - - Google Patents
Info
- Publication number
- JPS633157Y2 JPS633157Y2 JP14090183U JP14090183U JPS633157Y2 JP S633157 Y2 JPS633157 Y2 JP S633157Y2 JP 14090183 U JP14090183 U JP 14090183U JP 14090183 U JP14090183 U JP 14090183U JP S633157 Y2 JPS633157 Y2 JP S633157Y2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- thin
- arm
- different sizes
- claws
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 19
- 210000000078 claw Anatomy 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14090183U JPS6049636U (ja) | 1983-09-13 | 1983-09-13 | 薄片把持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14090183U JPS6049636U (ja) | 1983-09-13 | 1983-09-13 | 薄片把持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6049636U JPS6049636U (ja) | 1985-04-08 |
| JPS633157Y2 true JPS633157Y2 (enrdf_load_stackoverflow) | 1988-01-26 |
Family
ID=30315304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14090183U Granted JPS6049636U (ja) | 1983-09-13 | 1983-09-13 | 薄片把持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6049636U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2553722Y2 (ja) * | 1991-06-17 | 1997-11-12 | 株式会社小松製作所 | ロボットのハンド装置 |
-
1983
- 1983-09-13 JP JP14090183U patent/JPS6049636U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6049636U (ja) | 1985-04-08 |
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