JPS63314499A - X-ray takeout window - Google Patents
X-ray takeout windowInfo
- Publication number
- JPS63314499A JPS63314499A JP15183587A JP15183587A JPS63314499A JP S63314499 A JPS63314499 A JP S63314499A JP 15183587 A JP15183587 A JP 15183587A JP 15183587 A JP15183587 A JP 15183587A JP S63314499 A JPS63314499 A JP S63314499A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- ray transmitting
- window
- foil
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011888 foil Substances 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 238000000605 extraction Methods 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 abstract description 2
- 238000001015 X-ray lithography Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- X-Ray Techniques (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はＸ線を扱う技術分野におけるＸ線取出し窓に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray extraction window in the technical field of handling X-rays.
近年、Ｘ線を利用する産業分野が急速に広がってきてい
る。Ｘ線技術の中での一つの技術的問題点は、Ｘ線取出
し窓である。特に、Ｘ線リソグラフィでは、薄いＸ線透
過箔を付けたＸ線取出し窓が使用される。第２図に従来
技術によるＸ線取出し窓の一例を示す。これはＸ線透過
領域１をくり抜いた金属基板２上に該領域１を覆ってそ
の口縁４に薄い透過箔３をろう付けしたものである。In recent years, industrial fields that utilize X-rays have been rapidly expanding. One technical problem in x-ray technology is the x-ray extraction window. In particular, in X-ray lithography, an X-ray extraction window with a thin X-ray transparent foil is used. FIG. 2 shows an example of an X-ray extraction window according to the prior art. This is a metal substrate 2 in which an X-ray transparent area 1 is cut out, and a thin transparent foil 3 is brazed to the edge 4 of the metal substrate 2 to cover the area 1.
ところで、Ｘ線リソグラフィでは、Ｘ線透過箔３として
通常１０〜２５−膜厚を有し、１０１角以上の大径のＢ
ｅ箔が使用される。しかも真空装置からの大気中への取
出し部に、Ｘ線窓を使用することが多いので膜面には１
気圧が加わる。従ってＢｅ箔の破壊事故の可能性が高く
、装置の構成要素であるＸ線窓としての信頼性が極めて
悪いという欠点がある。By the way, in X-ray lithography, the X-ray transparent foil 3 usually has a film thickness of 10 to 25 mm and has a large diameter of 101 squares or more.
e-foil is used. Moreover, since an X-ray window is often used at the outlet from the vacuum device to the atmosphere, the membrane surface
Air pressure is added. Therefore, there is a high possibility that the Be foil will be destroyed, and the reliability of the X-ray window, which is a component of the device, is extremely poor.
本発明の目的はこのような従来の問題点を除去し、高い
信頼性を有するＸ線取出し窓を提供することにある。An object of the present invention is to eliminate such conventional problems and provide an X-ray extraction window with high reliability.
本発明はＸ線透過領域をくり抜いた金属基板と、該金属
基板のＸ線領域に臨ませるＸ線透過箔と、該Ｘ線透過箔
の箔面を支持させる桟を備えたサポートとを有すること
を特徴とするＸ線取出し窓である。The present invention includes a metal substrate with an X-ray transparent area cut out, an X-ray transparent foil that faces the X-ray area of the metal substrate, and a support that includes a crosspiece that supports the foil surface of the X-ray transparent foil. This is an X-ray extraction window characterized by:
以下本発明の実施例について、図面を参照しながら説明
する。Embodiments of the present invention will be described below with reference to the drawings.
第１図（ａ）、 （ｂ）において、金属基板１０の板面
にＸ線透過領域１１がくり抜かれている点は従来と同じ
である。本発明はＸ線透過領域１１の開口縁に縦桟１２
と横桟１３との組合せにより格子状に区画された窓孔１
４を有するサポート１５を固定し、さらにサポート１５
の窓孔１４の開口縁１４ａにＸ線透過箔１６をろう付け
したものである。これによって、Ｘ線透過箔１６はサポ
ート１５の窓孔１４の開口縁１４ａと縦桟１２および横
桟１３とに支えられ、実質上Ｘ線透過箔は１／４の面積
となり、圧力に対する強度ははるかに増大する。In FIGS. 1(a) and 1(b), the point that the X-ray transparent region 11 is hollowed out in the plate surface of the metal substrate 10 is the same as in the conventional method. The present invention provides vertical bars 12 at the opening edge of the X-ray transmission area 11.
A window hole 1 partitioned into a grid pattern by a combination of and horizontal bars 13
Fix the support 15 with 4 and further support 15
An X-ray transparent foil 16 is brazed to the opening edge 14a of the window hole 14. As a result, the X-ray transparent foil 16 is supported by the opening edge 14a of the window hole 14 of the support 15, the vertical bars 12, and the horizontal bars 13, and the area of the X-ray transparent foil becomes substantially 1/4, and the strength against pressure is reduced. will increase significantly.
なお、サポート１５の窓孔１４は縦横１本の桟によって
区画する場合に限らず、２本以上の桟を用いて４以上に
区画する場合はもとより、横方向、縦方向あるいは斜方
向の１本の桟で２つに区画する場合も含むものである。Note that the window hole 14 of the support 15 is not limited to the case where the window hole 14 is partitioned by one vertical and horizontal crosspiece, and it can also be divided into four or more sections using two or more crosspieces, as well as one horizontally, vertically, or diagonally. This also includes the case where the area is divided into two sections by a crosspiece.
〔発明の効果〕
以上のように本発明はＸ線透過箔をその口縁とともにそ
の口縁を区画する桟によって支持させることにより薄膜
を用いて強度が大きい、高信頼性のＸ線取出し窓を得る
ことができる効果を有する。[Effects of the Invention] As described above, the present invention provides a strong and reliable X-ray extraction window using a thin film by supporting the X-ray transparent foil along with its mouth edge by the crosspieces that partition the mouth edge. It has the effect that can be obtained.
第１図（ａ）は本発明の一実施例におけるＸ線取出し窓
の一部断面正面図、（ｂ）は同側面図、第２図は従来の
Ｘ線取出し窓の斜視図である。
１０・・・金属基板 １１・・・Ｘ線透過領
域１２・・・縦桟 １３・・・横桟１４
・・・窓孔 １５・・・サポート１６・
・・Ｘ線透過箔FIG. 1(a) is a partially sectional front view of an X-ray extraction window according to an embodiment of the present invention, FIG. 1(b) is a side view of the same, and FIG. 2 is a perspective view of a conventional X-ray extraction window. 10... Metal substrate 11... X-ray transmission area 12... Vertical bar 13... Horizontal bar 14
...Window hole 15...Support 16.
・・X-ray transparent foil
Claims (1)
板のＸ線領域に臨ませるＸ線透過箔と、該Ｘ線透過箔の
箔面を支持させる桟を備えたサポートとを有することを
特徴とするＸ線取出し窓。(1) It has a metal substrate with an X-ray transparent area cut out, an X-ray transparent foil that faces the X-ray area of the metal substrate, and a support equipped with a crosspiece that supports the foil surface of the X-ray transparent foil. An X-ray extraction window featuring
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15183587A JPS63314499A (en) | 1987-06-17 | 1987-06-17 | X-ray takeout window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15183587A JPS63314499A (en) | 1987-06-17 | 1987-06-17 | X-ray takeout window |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63314499A true JPS63314499A (en) | 1988-12-22 |
Family
ID=15527339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15183587A Pending JPS63314499A (en) | 1987-06-17 | 1987-06-17 | X-ray takeout window |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63314499A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009058519A (en) * | 2001-03-20 | 2009-03-19 | Advanced Electron Beams Inc | X-ray irradiator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5025599A (en) * | 1973-07-07 | 1975-03-18 | ||
| JPS50118199A (en) * | 1974-03-01 | 1975-09-16 | ||
| JPS6013300A (en) * | 1983-07-04 | 1985-01-23 | 株式会社トーキン | Window for electron ray |
-
1987
- 1987-06-17 JP JP15183587A patent/JPS63314499A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5025599A (en) * | 1973-07-07 | 1975-03-18 | ||
| JPS50118199A (en) * | 1974-03-01 | 1975-09-16 | ||
| JPS6013300A (en) * | 1983-07-04 | 1985-01-23 | 株式会社トーキン | Window for electron ray |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009058519A (en) * | 2001-03-20 | 2009-03-19 | Advanced Electron Beams Inc | X-ray irradiator |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63314499A (en) | X-ray takeout window | |
| US2101996A (en) | Manufacture of table tops and other articles of furniture or equipment | |
| KR960043011A (en) | Chuck assembly and method for supporting a wafer to concentrate the plasma onto the surface of the substrate during plasma processing | |
| CN114525470A (en) | Mask plate | |
| IT1253635B (en) | METALLIC GRID CURTAIN WALL PANEL. | |
| USD242790S (en) | Microscope vertical fluorescent illuminator | |
| JPS53139283A (en) | Method for blanking press material | |
| JPS5321570A (en) | Bonding method of semiconductor substrates | |
| JP3159460B2 (en) | Grid for electron beam generation system | |
| JPH0534652U (en) | Fluorescent display tube | |
| KR920702016A (en) | Substrate Support for CVD Equipment | |
| JPS6017995Y2 (en) | stereo audio equipment | |
| JPS5949136A (en) | Flat display panel | |
| US4983821A (en) | Photomultiplier tube with electrode supports | |
| KR200160814Y1 (en) | Jig for a test | |
| JPH04163839A (en) | Fluorescent character display tube | |
| JPS5220783A (en) | Semi-conductor unit | |
| JP2642965B2 (en) | Spinneret spinning hole drilling method | |
| JPS60218817A (en) | Sputtering apparatus | |
| JPH09284876A (en) | Cabinet fixture | |
| USD274936S (en) | Clot detection apparatus | |
| JPS6130235U (en) | plasma etching equipment | |
| JPS5219913A (en) | Wire television amplifier | |
| Plummer et al. | Mechanical microthinning: An alternative to chemical or ion-beam thinning for TEM specimen preparation | |
| JPS59124725A (en) | Plasma etching apparatus |