JPS63299245A - ウエハ存否検出装置 - Google Patents
ウエハ存否検出装置Info
- Publication number
- JPS63299245A JPS63299245A JP62131773A JP13177387A JPS63299245A JP S63299245 A JPS63299245 A JP S63299245A JP 62131773 A JP62131773 A JP 62131773A JP 13177387 A JP13177387 A JP 13177387A JP S63299245 A JPS63299245 A JP S63299245A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- light
- light beams
- circular contour
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims description 22
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 14
- 230000005855 radiation Effects 0.000 abstract description 13
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000005611 electricity Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 153
- 230000007246 mechanism Effects 0.000 description 13
- 238000012545 processing Methods 0.000 description 10
- 238000012546 transfer Methods 0.000 description 10
- 241000257465 Echinoidea Species 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Landscapes
- Geophysics And Detection Of Objects (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62131773A JPS63299245A (ja) | 1987-05-29 | 1987-05-29 | ウエハ存否検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62131773A JPS63299245A (ja) | 1987-05-29 | 1987-05-29 | ウエハ存否検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63299245A true JPS63299245A (ja) | 1988-12-06 |
| JPH0152897B2 JPH0152897B2 (enrdf_load_stackoverflow) | 1989-11-10 |
Family
ID=15065816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62131773A Granted JPS63299245A (ja) | 1987-05-29 | 1987-05-29 | ウエハ存否検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63299245A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002098586A (ja) * | 2000-09-27 | 2002-04-05 | Sunx Ltd | 反射型センサ |
| US6423978B1 (en) | 1999-07-16 | 2002-07-23 | Sunx Limited | System for detecting disk-shaped object such as semiconductor wafer or magnetic disk |
-
1987
- 1987-05-29 JP JP62131773A patent/JPS63299245A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6423978B1 (en) | 1999-07-16 | 2002-07-23 | Sunx Limited | System for detecting disk-shaped object such as semiconductor wafer or magnetic disk |
| JP2002098586A (ja) * | 2000-09-27 | 2002-04-05 | Sunx Ltd | 反射型センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0152897B2 (enrdf_load_stackoverflow) | 1989-11-10 |
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