JPS63297217A - Production of oxide superconductor - Google Patents
Production of oxide superconductorInfo
- Publication number
- JPS63297217A JPS63297217A JP62133955A JP13395587A JPS63297217A JP S63297217 A JPS63297217 A JP S63297217A JP 62133955 A JP62133955 A JP 62133955A JP 13395587 A JP13395587 A JP 13395587A JP S63297217 A JPS63297217 A JP S63297217A
- Authority
- JP
- Japan
- Prior art keywords
- oxide superconductor
- fluorine
- oxygen
- production
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000001301 oxygen Substances 0.000 claims abstract description 17
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 17
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 10
- 239000011737 fluorine Substances 0.000 claims abstract description 10
- 229910052788 barium Inorganic materials 0.000 claims abstract description 5
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 4
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 3
- 229910052691 Erbium Inorganic materials 0.000 claims abstract description 3
- 229910052693 Europium Inorganic materials 0.000 claims abstract description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 3
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 3
- 229910052765 Lutetium Inorganic materials 0.000 claims abstract description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 3
- 229910052772 Samarium Inorganic materials 0.000 claims abstract description 3
- 229910052775 Thulium Inorganic materials 0.000 claims abstract description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 3
- 229910052706 scandium Inorganic materials 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 8
- 230000007547 defect Effects 0.000 claims description 4
- 125000001153 fluoro group Chemical group F* 0.000 claims description 4
- 230000002950 deficient Effects 0.000 claims description 3
- -1 fluorine ions Chemical class 0.000 claims 1
- 150000002500 ions Chemical class 0.000 abstract description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 abstract description 4
- 238000010304 firing Methods 0.000 abstract description 4
- 229910004014 SiF4 Inorganic materials 0.000 abstract description 3
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 abstract description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract 3
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 238000006467 substitution reaction Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 239000010949 copper Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021594 Copper(II) fluoride Inorganic materials 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000005493 condensed matter Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- GWFAVIIMQDUCRA-UHFFFAOYSA-L copper(ii) fluoride Chemical compound [F-].[F-].[Cu+2] GWFAVIIMQDUCRA-UHFFFAOYSA-L 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012856 weighed raw material Substances 0.000 description 1
- 229940105963 yttrium fluoride Drugs 0.000 description 1
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
- H10N60/855—Ceramic materials
- H10N60/857—Ceramic materials comprising copper oxide
Abstract
Description
【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） 本発明は酸化物超電導体の製造方法に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a method for manufacturing an oxide superconductor.
（従来の技術）
近年、Ｂａ−Ｌａ−Ｃｕ−０系の層状ペロブスカイト型
酸化物が高い臨界温度を有する可能性のあることが発表
されて以来、各所で酸化物超電導体の研究が行なわれて
いる（Ｚ、Ｐｈｙｓ、Ｂ Ｃｏｎｄｅｎｓｅｄ Ｍａｔ
ｔｅｒ ６４゜１８９−１９３（１９８Ｂ） 、その中
でもＹ−Ｂａ−Ｃｕ−０系に代表される酸素欠陥ををす
る欠陥ペロブスカイト型（ＡＢ ＣＯ型）の酸化物超
電導体は、Ｔｅ２３７−δ
が９０に以上と液体窒素以上の高い温度を示すため非常
に有望な材料である（Ｐｈｙｓ、Ｉ？ｅｖ、Ｌｅｔｔ、
ｖｏｌ、５ｇＮｏ、９．ｐ９０８−９１０）。(Prior Art) In recent years, since it was announced that layered perovskite oxides based on Ba-La-Cu-0 may have a high critical temperature, research on oxide superconductors has been conducted in various places. There is (Z, Phys, B Condensed Mat
ter 64゜189-193 (198B), among which defective perovskite type (AB CO type) oxide superconductors with oxygen defects represented by the Y-Ba-Cu-0 system have a Te237-δ of 90. It is a very promising material because it exhibits a temperature higher than that of liquid nitrogen (Phys, I?ev, Lett,
vol, 5gNo, 9. p908-910).
（発明が解決しようとする問題点）
この様にペロブスカイト型の酸化物超電導体は前述の如
く非常に有望な材料であるが、より高い臨界温度への発
展が望まれている。(Problems to be Solved by the Invention) As described above, perovskite-type oxide superconductors are very promising materials, but it is desired to develop them to higher critical temperatures.
本発明はこの様な問題点を解決するためになされたもの
であり、臨界温度の高い酸化物超電導体を得ることを目
的としてなされたものである。The present invention has been made to solve these problems, and has been made for the purpose of obtaining an oxide superconductor with a high critical temperature.
［発明の構成］
（問題点を解決するための手段及び作用）本発明は、Ｌ
ｎ元元素ＬｎはＹ 、 Ｌａ 、 Ｓｃ 、 Ｎｄ 、
Ｓｍ 、 Ｅｕ 、 Ｇｄ 。[Structure of the invention] (Means and effects for solving the problems) The present invention is based on L
The n-element Ln is Y, La, Sc, Nd,
Sm, Eu, Gd.
Ｄｙ、Ｈｏ、Ｅｒ、Ｔｍ、Ｙｂ、Ｌｕの少なくとも一種
”） 、ＡＥ元素（Ｂａ、Ｃａ及びＳｒの少なくとも一
種）及びＣｕを含有するペロブスカイト構造の酸化物超
電導体の製造方法に於いて、弗素イオンを注入すること
により酸素の一部を弗素で置換することを特徴とする酸
化物超電導体の製造方法である。In a method for manufacturing an oxide superconductor having a perovskite structure containing at least one of Dy, Ho, Er, Tm, Yb, and Lu), an AE element (at least one of Ba, Ca, and Sr), and Cu, fluorine ion This method of manufacturing an oxide superconductor is characterized in that a part of oxygen is replaced with fluorine by implanting fluorine.
本発明でいうペロブスカイト型構造の酸化物超電導体は
Ｌａ−（Ｂａ、Ｓｒ、Ｃａ）−Ｃｕ−０系の層状ペロブ
スカイト型酸化物超電導体、Ｙ−Ｂａ−Ｃｕ−０系の酸
素欠陥を有する欠陥ペロブスカイト型酸化物超電導体な
どの広義のペロブスカイト型構造の酸化物超電導体をさ
す。The perovskite-type oxide superconductor in the present invention is a La-(Ba, Sr, Ca)-Cu-0-based layered perovskite-type oxide superconductor, and a Y-Ba-Cu-0-based defect having oxygen defects. Refers to oxide superconductors with a broad perovskite structure, such as perovskite-type oxide superconductors.
本発明に用いる酸化物超電導体は、例えば以下に示す製
造方法により得ることができる。The oxide superconductor used in the present invention can be obtained, for example, by the manufacturing method shown below.
Ｙ 、 Ｃｕ 、 Ｂａ等の酸化物超電導体の構成元素
を含有する原料を十分混合する。混合の際にはＹ２Ｏ３
゜ＢａＯ，ＣｕＯ等の酸化物を原料として用いることが
できる。また、これらの酸化物のほかに、焼成後酸化物
に転化する炭酸塩、硝酸塩、水酸化物また弗化イツトリ
ウム、弗化バリウム、弗化銅等の弗化物等の化合物を用
いてもよい。さらには共沈法等で得たしゅう酸塩等を用
いても良い。Raw materials containing constituent elements of the oxide superconductor, such as Y, Cu, and Ba, are thoroughly mixed. Y2O3 when mixing
Oxides such as BaO and CuO can be used as raw materials. In addition to these oxides, compounds such as carbonates, nitrates, hydroxides, and fluorides such as yttrium fluoride, barium fluoride, and copper fluoride, which are converted into oxides after firing, may be used. Furthermore, oxalate obtained by a coprecipitation method or the like may also be used.
前述の原料を混合した後、仮焼・粉砕し所望の形状に成
形した後、９３０−１０００℃程度の温度で焼成する。After mixing the aforementioned raw materials, they are calcined and pulverized to form a desired shape, and then fired at a temperature of about 930-1000°C.
仮焼は必ずしも必要ではない。焼成・仮焼は十分な酸素
が供給できるような酸素含有雰囲気で行なうことが好ま
しい。所望の形状に焼成した後、ＳｉＦ４．ＣＦ４等を
イオン源としてイオン注入を行ない酸素の一部を弗素で
置換する。Calcining is not necessarily necessary. Firing and calcination are preferably carried out in an oxygen-containing atmosphere where sufficient oxygen can be supplied. After firing into the desired shape, SiF4. Ion implantation is performed using CF4 or the like as an ion source to replace a portion of oxygen with fluorine.
本発明にかかる酸化物超電導体は酸素中で加熱処理する
ことにより超電導特性を向上することができる。この加
熱処理は通常６００−９［１０℃程度である。The superconducting properties of the oxide superconductor according to the present invention can be improved by heat treatment in oxygen. This heat treatment is usually about 600-9[10°C.
この様にして得られた酸化物超電導体はＬｎ、 ＡＥ
。The oxide superconductors obtained in this way were Ln, AE
.
Ｃｕを原子比で実質的にｌ：２：３の比率で含有する酸
素欠陥δを有するＬｎＢａ Ｃｕ Ｏ（δは２ ３
７−δ
通常１以下）の酸素欠陥型ペロブスカイト構造となる。LnBa Cu O (δ is 2 3
7-δ (usually 1 or less), resulting in an oxygen-deficient perovskite structure.
Ｃｕ元元素Ｂａ元素の置換元素はそれぞれのサイトに置
換した形で入る。なおＦ元素は０元素を置換する形で入
る。弗素の置換量は超電導特性を低下しない範囲で適宜
設定できるが、実用上は９０原子％以下、好ましくは５
０原子％以下程度である。また少量の置換量で臨界温度
の上昇の効果を得ることができるが０．Ｏ１１原子以上
の置換量で顕著である。Substituting elements for the Cu element and the Ba element enter the respective sites in a substituted form. Note that the F element replaces the 0 element. The amount of fluorine substitution can be set as appropriate within a range that does not deteriorate the superconducting properties, but in practice it is less than 90 atomic %, preferably 5.
It is about 0 atomic % or less. Also, the effect of increasing the critical temperature can be obtained with a small amount of substitution, but 0. This is noticeable when the amount of substitution is more than 11 O atoms.
ペロブスカイト型酸化物超電導体を構成する元素は、基
本的に化学量論比の組成となるように混合するが、多少
製造条件等との関係等でずれていても構わない。例えば
Ｙ−Ｂａ−Ｃｕ−０系ではＹＩＩＩｌｏｌに対しＢ ａ
２ ｍｏｌ、 Ｃｕ ３ ｍｏｌが標準組成であ
るが、実用上はＹＩＩＩｌｏｌに対し、Ｂａ２±０．８
ｆｆ１ｏｌ、Ｃｕ３±０．２１１１０１程度のずれは
問題ない。The elements constituting the perovskite-type oxide superconductor are basically mixed so as to have a stoichiometric composition, but there may be a slight deviation depending on the manufacturing conditions, etc. For example, in the Y-Ba-Cu-0 system, B a
The standard composition is 2 mol, Cu 3 mol, but in practice Ba2 ± 0.8 for YIIIlol.
A deviation of about ff1ol, Cu3±0.211101 is not a problem.
また上述の粉末焼結に限らず、蒸着法、スパッタリング
法、ＣＶＤ法などの方法による膜状の酸化物超電導体を
形成することもできる。更に酸化物超電導体ペーストを
用いたスクリーン印刷法、ゾル・ゲル法等を用いての製
造もできる。°更に金属管等のシース材を用いての線材
化、溶湯急冷法を用いての線材化等も可能である。In addition to the powder sintering described above, a film-like oxide superconductor can also be formed by a method such as a vapor deposition method, a sputtering method, or a CVD method. Furthermore, it can also be manufactured using a screen printing method using an oxide superconductor paste, a sol-gel method, or the like. Further, it is also possible to make a wire using a sheath material such as a metal tube, or to make a wire using a molten metal quenching method.
なお本発明に用いる酸化物超電導体ではＢａ元素をＳｒ
、Ｃａ’の少なくとも一種で置換することができる。こ
の様な置換によっても臨界電流密度を向上することがで
きる。置換は少量でその“効果を発揮するが％−０，０
１ａ＋ｏ１％以上の添加でその効果が顕著となる。置換
量は超電導特性を低下させない程度の範囲で適宜設定可
能であるが、あまり多量の置換は超電導特性を低下して
しまうため８０ｍｏ１％以下、さらに実用上は２０ＩＩ
ｌｏ１％以下程度の添加含有量が好ましい。さらにＣｕ
の一部をＴＩ 、Ｖ、Ｃｒ、Ｍｎ、Ｐｅ、Ｃｏ、Ｎｉ。In addition, in the oxide superconductor used in the present invention, Ba element is replaced with Sr.
, Ca'. Such a substitution can also improve the critical current density. Substitution has its “effect” in small amounts, but %-0,0
The effect becomes remarkable when 1a+o1% or more is added. The amount of substitution can be set as appropriate within a range that does not reduce the superconducting properties, but too much substitution will reduce the superconducting properties, so it should be 80 mo1% or less, and moreover 20 II for practical purposes.
The added content is preferably about 1% or less. Furthermore, Cu
TI, V, Cr, Mn, Pe, Co, Ni.
Ｚｎ等で置換して臨界電流密度を向上することもできる
。置換は少量でその効果を発揮するが、０．０１ｌｌｌ
ｏ１％以上の添加でその効果が顕著となる。置換量は超
電導特性を低下させない程度の範囲で適宜設定可能であ
るが、あまり多量の置換は超電導特性を低下してしまう
ため８０１１１０１％以下、さらに実用上は２０ｍｏ１
％以下程度の添加含有量が好ましい。The critical current density can also be improved by substituting with Zn or the like. Replacement exerts its effect with a small amount, but 0.01lll
The effect becomes remarkable when O1% or more is added. The amount of substitution can be set as appropriate within a range that does not reduce the superconducting properties, but too much substitution will reduce the superconducting properties, so it should be less than 8011101%, and more practically 20 mo1.
% or less is preferable.
（実施例） 以下に本発明の詳細な説明する。(Example) The present invention will be explained in detail below.
実施例−１
原子比でＹ；Ｂａ：Ｃｕ−１： ２ ： ３となるよう
に、Ｙ Ｏ、ＢａＣ０、ＣｕＯを秤量した原料を十分
混合した後９００℃で仮焼した後、粉砕した。Example 1 After sufficiently mixing Y2O, BaC0, and CuO, weighed raw materials were calcined at 900°C so that the atomic ratio was Y;Ba:Cu-1:2:3, and then pulverized.
この混合原料を９６０℃、１２Ｈ１酸素中の条件で焼成
した。次いでＳｉＦ４をイオン源としてＦイオンの注入
を行なった。次いで８６０℃、 ｌｏｇ、酸素中の条件
で加熱処理を施した。This mixed raw material was fired at 960° C. in 12H1 oxygen. Next, F ions were implanted using SiF4 as an ion source. Next, heat treatment was performed at 860° C., log temperature, and in oxygen.
得られた酸化物超電導体の超電導特性を調べたところ、
臨界温度Ｔｃは一６０℃と優れたものであった。When we investigated the superconducting properties of the obtained oxide superconductor, we found that
The critical temperature Tc was excellent at -60°C.
実施例−２
ＹをＹｂに変え、実施例−１と同様にして酸化物超電導
体を製造した。Example 2 An oxide superconductor was produced in the same manner as in Example 1 except that Y was replaced with Yb.
この酸化物超電導体の超電導特性を調べたところ、Ｔｃ
−−５５℃と非常に優れたものであった。When we investigated the superconducting properties of this oxide superconductor, we found that Tc
--55°C, which was very excellent.
比較例−１
Ｆイオンの注入をすることなく、実施例−１と同様にし
て酸化物超電導体を製造した。Comparative Example-1 An oxide superconductor was manufactured in the same manner as in Example-1 without implanting F ions.
得られた酸化物超電導体の超電導特性を調べたところ、
臨界温度はＴ ｃ−−１８０℃と低いものであった。When we investigated the superconducting properties of the obtained oxide superconductor, we found that
The critical temperature was as low as T c -180°C.
［発明の効果コ
以上説明したように本発明によれば臨界温度の高い酸化
物超電導体を得ることができる。従って工業上寄与する
こと大である。[Effects of the Invention] As explained above, according to the present invention, an oxide superconductor having a high critical temperature can be obtained. Therefore, it will make a great contribution to industry.
Claims (4)
Ｅｕ、Ｇｄ、Ｄｙ、Ｈｏ、Ｅｒ、Ｔｍ、Ｙｂ、Ｌｕの少
なくとも一種）、ＡＥ元素（Ｂａ、Ｃａ及びＳｒの少な
くとも一種）及びＣｕを含有するペロブスカイト構造の
酸化物超電導体の製造方法に於いて、弗素イオンを注入
することにより酸素の一部を弗素で置換することを特徴
とする酸化物超電導体の製造方法。(1) Ln element (Ln is Y, La, Sc, Nd, Sm,
In a method for producing an oxide superconductor with a perovskite structure containing at least one of Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), an AE element (at least one of Ba, Ca, and Sr), and Cu. , a method for producing an oxide superconductor, characterized in that part of oxygen is replaced with fluorine by implanting fluorine ions.
質的に１：２：３の比率で含有することを特徴とする特
許請求の範囲第１項記載の酸化物超電導体の製造方法。(2) Production of an oxide superconductor according to claim 1, wherein the oxide superconductor contains Ln, AE, and Cu in an atomic ratio of substantially 1:2:3. Method.
−＿δ（δは酸素欠陥を表わす）で表わされる酸素欠陥
型ペロブスカイト構造を有することを特徴とする特許請
求の範囲第１項記載の酸化物超電導体の製造方法。(3) The oxide superconductor is LnBa_2Cu_3O_7_
2. The method for producing an oxide superconductor according to claim 1, wherein the oxide superconductor has an oxygen-deficient perovskite structure represented by -_δ (δ represents an oxygen defect).
を特徴とする特許請求の範囲第１項記載の酸化物超電導
体の製造方法。(4) The method for producing an oxide superconductor according to claim 1, wherein the amount of fluorine substituted is 90 atomic % or less of oxygen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62133955A JPS63297217A (en) | 1987-05-29 | 1987-05-29 | Production of oxide superconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62133955A JPS63297217A (en) | 1987-05-29 | 1987-05-29 | Production of oxide superconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63297217A true JPS63297217A (en) | 1988-12-05 |
Family
ID=15116984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62133955A Pending JPS63297217A (en) | 1987-05-29 | 1987-05-29 | Production of oxide superconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63297217A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0193424A (en) * | 1987-08-25 | 1989-04-12 | American Teleph & Telegr Co <Att> | Manufacture of structure having superconductive thin film |
-
1987
- 1987-05-29 JP JP62133955A patent/JPS63297217A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0193424A (en) * | 1987-08-25 | 1989-04-12 | American Teleph & Telegr Co <Att> | Manufacture of structure having superconductive thin film |
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