JPS6329378B2 - - Google Patents

Info

Publication number
JPS6329378B2
JPS6329378B2 JP56061012A JP6101281A JPS6329378B2 JP S6329378 B2 JPS6329378 B2 JP S6329378B2 JP 56061012 A JP56061012 A JP 56061012A JP 6101281 A JP6101281 A JP 6101281A JP S6329378 B2 JPS6329378 B2 JP S6329378B2
Authority
JP
Japan
Prior art keywords
astigmatism
sawtooth
waves
scanning
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56061012A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57176656A (en
Inventor
Masahiro Inoe
Seiichiro Satomura
Mitsuhisa Myazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP56061012A priority Critical patent/JPS57176656A/ja
Publication of JPS57176656A publication Critical patent/JPS57176656A/ja
Publication of JPS6329378B2 publication Critical patent/JPS6329378B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56061012A 1981-04-22 1981-04-22 Method and device for astigmatism correction of scanning electron microscope and similar device Granted JPS57176656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56061012A JPS57176656A (en) 1981-04-22 1981-04-22 Method and device for astigmatism correction of scanning electron microscope and similar device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56061012A JPS57176656A (en) 1981-04-22 1981-04-22 Method and device for astigmatism correction of scanning electron microscope and similar device

Publications (2)

Publication Number Publication Date
JPS57176656A JPS57176656A (en) 1982-10-30
JPS6329378B2 true JPS6329378B2 (en:Method) 1988-06-13

Family

ID=13158985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56061012A Granted JPS57176656A (en) 1981-04-22 1981-04-22 Method and device for astigmatism correction of scanning electron microscope and similar device

Country Status (1)

Country Link
JP (1) JPS57176656A (en:Method)

Also Published As

Publication number Publication date
JPS57176656A (en) 1982-10-30

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