JPH0479101B2 - - Google Patents

Info

Publication number
JPH0479101B2
JPH0479101B2 JP60202412A JP20241285A JPH0479101B2 JP H0479101 B2 JPH0479101 B2 JP H0479101B2 JP 60202412 A JP60202412 A JP 60202412A JP 20241285 A JP20241285 A JP 20241285A JP H0479101 B2 JPH0479101 B2 JP H0479101B2
Authority
JP
Japan
Prior art keywords
scanning
electron beam
dynamic focus
objective lens
focus lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60202412A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6261253A (ja
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP60202412A priority Critical patent/JPS6261253A/ja
Publication of JPS6261253A publication Critical patent/JPS6261253A/ja
Publication of JPH0479101B2 publication Critical patent/JPH0479101B2/ja
Granted legal-status Critical Current

Links

JP60202412A 1985-09-12 1985-09-12 電子線装置 Granted JPS6261253A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60202412A JPS6261253A (ja) 1985-09-12 1985-09-12 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60202412A JPS6261253A (ja) 1985-09-12 1985-09-12 電子線装置

Publications (2)

Publication Number Publication Date
JPS6261253A JPS6261253A (ja) 1987-03-17
JPH0479101B2 true JPH0479101B2 (en:Method) 1992-12-15

Family

ID=16457075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60202412A Granted JPS6261253A (ja) 1985-09-12 1985-09-12 電子線装置

Country Status (1)

Country Link
JP (1) JPS6261253A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432143A (ja) * 1990-05-25 1992-02-04 Hitachi Ltd 電子線装置
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
US6452175B1 (en) * 1999-04-15 2002-09-17 Applied Materials, Inc. Column for charged particle beam device
JP7027538B2 (ja) * 2018-06-04 2022-03-01 株式会社日立ハイテク 電子線装置

Also Published As

Publication number Publication date
JPS6261253A (ja) 1987-03-17

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