Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KKfiledCriticalAkashi Seisakusho KK
Priority to JP56061012ApriorityCriticalpatent/JPS57176656A/ja
Publication of JPS57176656ApublicationCriticalpatent/JPS57176656A/ja
Publication of JPS6329378B2publicationCriticalpatent/JPS6329378B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
JP56061012A1981-04-221981-04-22Method and device for astigmatism correction of scanning electron microscope and similar device
GrantedJPS57176656A
(en)