JPS6329127B2 - - Google Patents
Info
- Publication number
- JPS6329127B2 JPS6329127B2 JP56147523A JP14752381A JPS6329127B2 JP S6329127 B2 JPS6329127 B2 JP S6329127B2 JP 56147523 A JP56147523 A JP 56147523A JP 14752381 A JP14752381 A JP 14752381A JP S6329127 B2 JPS6329127 B2 JP S6329127B2
- Authority
- JP
- Japan
- Prior art keywords
- base member
- floating base
- frequency vibrator
- floating
- reference member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14752381A JPS5850315A (ja) | 1981-09-16 | 1981-09-16 | 高速高精度浮動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14752381A JPS5850315A (ja) | 1981-09-16 | 1981-09-16 | 高速高精度浮動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5850315A JPS5850315A (ja) | 1983-03-24 |
| JPS6329127B2 true JPS6329127B2 (enrdf_load_stackoverflow) | 1988-06-13 |
Family
ID=15432237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14752381A Granted JPS5850315A (ja) | 1981-09-16 | 1981-09-16 | 高速高精度浮動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5850315A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0356922U (enrdf_load_stackoverflow) * | 1989-10-06 | 1991-05-31 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0637892B2 (ja) * | 1983-10-24 | 1994-05-18 | キヤノン株式会社 | スライダ |
| JPS62250200A (ja) * | 1986-04-23 | 1987-10-31 | Kawasaki Steel Corp | オ−ステナイト系ステンレス鋼板の製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3359045A (en) * | 1966-05-20 | 1967-12-19 | Bendix Corp | Squeeze film bearing |
| US3471205A (en) * | 1966-07-05 | 1969-10-07 | Bendix Corp | Squeeze film bearings |
-
1981
- 1981-09-16 JP JP14752381A patent/JPS5850315A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0356922U (enrdf_load_stackoverflow) * | 1989-10-06 | 1991-05-31 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5850315A (ja) | 1983-03-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5524502A (en) | Positioning apparatus including a hydrostatic bearing for spacing apart a supporting surface and a guide surface | |
| KR0166987B1 (ko) | 자중지지장치 | |
| JP3107933B2 (ja) | 振動波駆動装置および振動波駆動装置を備えた装置 | |
| CN110545050B (zh) | 压电执行器驱动的目标图像跟踪云台及其驱动控制方法 | |
| US3339421A (en) | Dynamic gas film supported inertial instrument | |
| JPH02111271A (ja) | X−yステージ | |
| JPS6329127B2 (enrdf_load_stackoverflow) | ||
| JPS61209838A (ja) | 一軸ステ−ジ | |
| JPS63244205A (ja) | 位置決め装置 | |
| US3359045A (en) | Squeeze film bearing | |
| JP2780817B2 (ja) | 精密ステージ装置 | |
| US3433538A (en) | Dynamic gas film bearing structure | |
| JP3143582B2 (ja) | 静圧軸受装置およびこれを用いた位置決めステージ | |
| JPH0229194B2 (enrdf_load_stackoverflow) | ||
| JPH0321765B2 (enrdf_load_stackoverflow) | ||
| JPH0625698Y2 (ja) | ティルティングパッド軸受 | |
| JPH0228010B2 (enrdf_load_stackoverflow) | ||
| SU851561A1 (ru) | Вибродвигатель | |
| US3054076A (en) | Potentiometer | |
| SU1509565A1 (ru) | Газовый подшипник | |
| JPS6377687A (ja) | 送り機構の発塵防止装置 | |
| JPH0724658Y2 (ja) | 微動機構 | |
| JP2024104556A (ja) | 駆動装置、駆動方法 | |
| JP3027165B2 (ja) | 位置決め装置 | |
| JP2643115B2 (ja) | リニアモータ |