JPS6328857Y2 - - Google Patents
Info
- Publication number
- JPS6328857Y2 JPS6328857Y2 JP1981091840U JP9184081U JPS6328857Y2 JP S6328857 Y2 JPS6328857 Y2 JP S6328857Y2 JP 1981091840 U JP1981091840 U JP 1981091840U JP 9184081 U JP9184081 U JP 9184081U JP S6328857 Y2 JPS6328857 Y2 JP S6328857Y2
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- voltage
- signal
- filament
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 6
- 230000006378 damage Effects 0.000 description 4
- 238000009499 grossing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981091840U JPS6328857Y2 (xx) | 1981-06-22 | 1981-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981091840U JPS6328857Y2 (xx) | 1981-06-22 | 1981-06-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57203453U JPS57203453U (xx) | 1982-12-24 |
| JPS6328857Y2 true JPS6328857Y2 (xx) | 1988-08-03 |
Family
ID=29886909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981091840U Expired JPS6328857Y2 (xx) | 1981-06-22 | 1981-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328857Y2 (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019016857A1 (ja) * | 2017-07-18 | 2019-01-24 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246756A (en) * | 1975-10-11 | 1977-04-13 | Hitachi Ltd | Field-emission type electron gun |
-
1981
- 1981-06-22 JP JP1981091840U patent/JPS6328857Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246756A (en) * | 1975-10-11 | 1977-04-13 | Hitachi Ltd | Field-emission type electron gun |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57203453U (xx) | 1982-12-24 |
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