JPS63286670A - Small-sized he liquefying refrigerator - Google Patents

Small-sized he liquefying refrigerator

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Publication number
JPS63286670A
JPS63286670A JP11911287A JP11911287A JPS63286670A JP S63286670 A JPS63286670 A JP S63286670A JP 11911287 A JP11911287 A JP 11911287A JP 11911287 A JP11911287 A JP 11911287A JP S63286670 A JPS63286670 A JP S63286670A
Authority
JP
Japan
Prior art keywords
liquid
refrigerator
valve
container
liquefaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11911287A
Other languages
Japanese (ja)
Other versions
JPH0689956B2 (en
Inventor
黒木 邦広
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP11911287A priority Critical patent/JPH0689956B2/en
Publication of JPS63286670A publication Critical patent/JPS63286670A/en
Publication of JPH0689956B2 publication Critical patent/JPH0689956B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Containers, Films, And Cooling For Superconductive Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は小型He液化冷凍装置に関するものである。[Detailed description of the invention] (Industrial application field) The present invention relates to a small-sized He liquefaction refrigeration device.

(従来技術) 現在小型超電導磁石を含む極低温機器の冷却は、液体窒
素(以下L N2)で予冷した後、LN2を排出し、H
eガスに置換してから、さらに液体ヘリウム(以下LH
e)で予冷してLHeを溜めるという方法で行っている
。その後はLHeの補給、またはHe冷凍機によるシー
ルド板の冷却および蒸発Heガスの再凝縮等の方法で長
期冷却を行っている。
(Prior technology) Currently, cryogenic equipment including small superconducting magnets is cooled by pre-cooling with liquid nitrogen (hereinafter referred to as LN2), then discharging the LN2 and using H
After replacing with e gas, liquid helium (hereinafter referred to as LH) is added.
This is done by pre-cooling in e) and storing LHe. After that, long-term cooling is performed by replenishing LHe, cooling the shield plate with a He refrigerator, and recondensing the evaporated He gas.

(発明により解決しようとする問題点)小型超電導磁石
等の冷却を外部のLN、やLHeを使用しないで、予冷
・液化・長期冷却・ガス回収が出来る閉サイクルの小型
He液化冷凍装置を提供し、素人でも簡単に操作できる
様自動化して省力化並びに操作性の向上を図ろうとする
ものである。
(Problems to be Solved by the Invention) To provide a closed-cycle small He liquefaction refrigeration system that can perform precooling, liquefaction, long-term cooling, and gas recovery for cooling small superconducting magnets, etc. without using external LN or LHe. This is an attempt to save labor and improve operability by automating the process so that even an amateur can easily operate it.

(発明による解決手段) He液化冷凍機と該冷凍機にHeを供給するためのHe
容器に接続された圧縮機ユニットを閉回路で接続し、前
記He液化冷凍機は高圧Heを自由膨脹させるための熱
交換器とJ−T弁及び配管を有し、かつ切換可能なHe
液化回路と凝縮器回路を備えたJ−7回路と、凝縮用H
eを供給する回路と、これら両回路を流れるHeを予冷
するためのY・冷片冷凍機を備え、さらに被冷却体を収
納する液体He容器が設けられ、該容器内にHe液化冷
凍装置の運転制御用信号を得るため、温度計と液体He
液面計を設けた。
(Solution Means by the Invention) A He liquefying refrigerator and a He liquefier for supplying He to the refrigerator.
A compressor unit connected to the container is connected in a closed circuit, and the He liquefaction refrigerator has a heat exchanger, a J-T valve, and piping for freely expanding high-pressure He, and has a switchable He
J-7 circuit with liquefaction circuit and condenser circuit, and H for condensation
A circuit for supplying He, a Y/cold piece refrigerator for pre-cooling the He flowing through both circuits, and a liquid He container for storing the object to be cooled. In order to obtain operation control signals, a thermometer and liquid He
A liquid level gauge was installed.

(実施例) He液化冷凍装置はHe液液化冷凍機へ、該He液化冷
凍機Aに管路34,35.36で接続された圧縮器ユニ
ットBで構成されている。そして一台の装置で被冷却体
の予冷、液体Heの計液、蒸発Heガスの再凝縮、He
ガスの凝縮液化及び液化Heの回収が自動で行えるよう
になっている。
(Example) The He liquefaction refrigeration apparatus is composed of a compressor unit B connected to the He liquefaction refrigerator A by conduits 34, 35, and 36. One device can pre-cool the object to be cooled, measure liquid He, re-condense evaporated He gas, and
Gas condensation and liquefaction and recovery of liquefied He can be performed automatically.

He液液化冷凍機円内は熱負荷フランジ10.11を備
えた予冷用冷凍機21と、J−T弁15と三方弁16及
び凝縮器27からなる凝縮回路の外に、J−T弁15と
三方弁16と液体He容器18及び低温弁28からなる
直接液化回路が設けられている。
He liquid liquefaction refrigerator The inside of the circle includes a pre-cooling refrigerator 21 equipped with a heat load flange 10.11, a J-T valve 15 outside a condensing circuit consisting of a J-T valve 15, a three-way valve 16, and a condenser 27. A direct liquefaction circuit consisting of a three-way valve 16, a liquid He container 18, and a low temperature valve 28 is provided.

又凝縮液化させるためのHeガスを供給するため、フィ
ルタ19、凝縮He供給弁24、減圧弁25、逆止弁2
6及び凝縮He供給系23を備えている。
In addition, in order to supply He gas for condensation and liquefaction, a filter 19, a condensed He supply valve 24, a pressure reducing valve 25, and a check valve 2 are provided.
6 and a condensed He supply system 23.

圧縮機ユニットB内にはストレージタンク6があり、該
タンク6はHe容器8に接続されている。
Inside the compressor unit B is a storage tank 6, which is connected to a He container 8.

(作用及自動制御) 運転前のHeガス系内は高圧側、低圧側に高純度のHe
を10kg/cJGの圧力で封入しである6制御用回路
(図示しない)の運転スイッチをONにして冷却モード
にすると、凝縮He供給弁24が閉じ、三方弁16のc
−b方向と低温弁28と三方弁16aがb−a方向に開
いて切換え作動をすると同時に、−膜圧縮機1と二段圧
縮機2及び予冷用冷凍機21が起動する。
(Action and automatic control) In the He gas system before operation, high-purity He is placed on the high-pressure side and low-pressure side.
When the operation switch of the 6 control circuit (not shown) is turned on to set the cooling mode, the condensed He supply valve 24 closes and the three-way valve 16 c
At the same time as the -b direction, the low temperature valve 28, and the three-way valve 16a open in the b-a direction and perform switching operations, the -membrane compressor 1, two-stage compressor 2, and precooling refrigerator 21 are started.

圧縮機ユニットB内の一段圧縮機1で圧縮されたHeは
二段圧縮機2でさらに圧縮されて20kg/aJGとな
り、油分離機3と吸着器4を通ってクリーンなHeとな
って管路34を経てHe液液化冷凍機へと流れる。
He compressed by the single-stage compressor 1 in the compressor unit B is further compressed by the two-stage compressor 2 to 20 kg/aJG, passes through the oil separator 3 and adsorber 4, becomes clean He, and is sent to the pipe. 34 to the He liquid liquefaction refrigerator.

液化冷凍機Aに流入したHeは、予冷用冷凍機21とJ
−7回路に分れる。予冷用冷凍機21へ流入したHeは
低温を発生させ、一段熱負荷フランジ10、二段熱負荷
フランジ11を冷却して管路35を経て圧縮機ユニット
B内の二段圧縮機2へ吸入される。一方J−T回路のH
eはフィルタ19、一段熱交換器12を通って、一段熱
負荷フランジ1oで冷却され、二段熱交換器13を通り
、さらに二段熱負荷フランジ11で冷却され、三段熱交
換器14、J−T弁15を出たのち、0.21cg/c
J G以下に膨張して、超電導コイル17、液体ヘリウ
ム容器18を直接冷却する。
The He that has flowed into the liquefaction refrigerator A is transferred to the precooling refrigerator 21 and the J
- Divided into 7 circuits. The He that has flowed into the pre-cooling refrigerator 21 generates a low temperature, cools the first heat load flange 10 and the second heat load flange 11, and is sucked into the two-stage compressor 2 in the compressor unit B via the pipe line 35. Ru. On the other hand, H of the J-T circuit
e passes through the filter 19, the single-stage heat exchanger 12, is cooled by the single-stage heat load flange 1o, passes through the two-stage heat exchanger 13, is further cooled by the second-stage heat load flange 11, and is cooled by the three-stage heat exchanger 14, After leaving J-T valve 15, 0.21cg/c
It expands to below JG and directly cools the superconducting coil 17 and liquid helium container 18.

この低圧Heは低温弁28、予冷回路31、三方弁16
a、一段熱交換器12を通って、高圧の流入Heと熱交
換して昇温し圧縮機ユニットBの一段圧縮機1に管路3
6を経て吸入される。この状態で液体He容器18の温
度計29が25Kになると、三方弁16aが切換作動し
て予冷回路31が閉じ、三方弁16aがc−a方向に開
く。このため二段熱交換器13および三段熱交換器14
において熱交換することによりJ−T弁15に流入する
高圧のHeは一層冷却されて、そしてジュールトムソン
効果によって、より低温のHeとなり、超電導コイル1
7、液体He容器18を更に冷却する。最終的には三方
弁16のc−b方向を出たHeの一部は液化し、やがて
液体He容器18に液体Heが溜まり液面は上昇する。
This low pressure He is supplied to the low temperature valve 28, the precooling circuit 31, the three-way valve 16
a. Passes through the single-stage heat exchanger 12, exchanges heat with the high-pressure inflow He, raises the temperature, and connects the pipe 3 to the single-stage compressor 1 of the compressor unit B.
6 and then inhaled. In this state, when the thermometer 29 of the liquid He container 18 reaches 25 K, the three-way valve 16a switches to close the precooling circuit 31, and the three-way valve 16a opens in the ca direction. Therefore, the two-stage heat exchanger 13 and the three-stage heat exchanger 14
The high-pressure He flowing into the J-T valve 15 is further cooled by heat exchange at
7. Further cool the liquid He container 18. Eventually, a portion of the He that exits in the c-b direction of the three-way valve 16 is liquefied, and eventually liquid He accumulates in the liquid He container 18 and the liquid level rises.

液体He容器18内の液体Heが一定の高さになると、
液面計30が感知し、三方弁16が切換作動してc−b
方向が閉じ、Q −a方向が開き、低温弁28が閉じる
When the liquid He in the liquid He container 18 reaches a certain height,
The liquid level gauge 30 senses it, and the three-way valve 16 switches and operates c-b.
direction is closed, Q-a direction is open, and cryogenic valve 28 is closed.

かくしてJ−T弁15におけるジュール・トムソン効果
で発生したHe冷媒(ガスとミストの混合)は凝縮器2
7内を流れる。この結果液体He容器18で気化したH
eは凝縮器27で再凝縮して液体となり、液体He容器
18内の液体Heは一定に保たれる。
Thus, the He refrigerant (mixture of gas and mist) generated by the Joule-Thomson effect in the J-T valve 15 is transferred to the condenser 2.
Flows within 7. As a result, H vaporized in the liquid He container 18
e is recondensed into a liquid in the condenser 27, and the liquid He in the liquid He container 18 is kept constant.

一方この状態で凝縮He供給弁24を開き、減圧弁25
で圧力調整して、液体He容器18の圧力を凝縮器27
の圧力より高< (0,1〜0.3kg/cdG) な
るように凝縮He供給系23を通ってHeを供給すると
、一段熱負荷フランジ10と二段熱負荷フランジ11と
で冷却され、最後に凝縮器27で凝縮して液体Heとな
り溜る。
Meanwhile, in this state, the condensed He supply valve 24 is opened, and the pressure reducing valve 25 is opened.
to adjust the pressure in the liquid He container 18 to the condenser 27.
When He is supplied through the condensed He supply system 23 such that the pressure is higher than the pressure of Then, it condenses in the condenser 27 and becomes liquid He, which accumulates.

以上の冷却運転に必要なHeは圧縮機ユニットAに接続
しであるHe容器8より管路37を経て供給される。
He necessary for the above cooling operation is supplied from a He container 8 connected to the compressor unit A through a conduit 37.

冷却運転を停止するときは、制御回路の停止スイッチを
ONにすれば、回収モードとなり、予冷用冷凍機21が
停止し、低温弁28が開き、圧縮機ユニットBは回収運
転を続け、液体He容器18内の気化HeをHe容器8
へ回収する。その後温度計29が常温になると、圧縮機
ユニットBは停止し、運転前の状態となる。以後は上記
運転の繰返しで運転される。
To stop the cooling operation, turn on the stop switch in the control circuit to enter the recovery mode, the precooling refrigerator 21 will stop, the low temperature valve 28 will open, the compressor unit B will continue the recovery operation, and the liquid He The vaporized He in the container 18 is transferred to the He container 8.
Collect to. After that, when the thermometer 29 reaches normal temperature, the compressor unit B stops and returns to the state before operation. After that, the above operation is repeated.

圧縮機ユニットBの圧力制御の作用は、吸着器4の所の
Heが20kg/cdG以上になると一次圧力調整器5
が作動し、ストレージタンク6へHeを保持し、−膜圧
縮機1の吸入圧力が低下すると、二次圧力調整器7が作
動し、ストレージタンク6とHe容器8内のI−I e
が供給される。又予冷用冷凍機21が停止したときは、
差圧調整器9が作動するので、装置全体の高圧・中圧・
低圧の各圧力は自動的に調整される。
The pressure control function of the compressor unit B is such that when He at the adsorber 4 exceeds 20 kg/cdG, the primary pressure regulator 5
is activated to hold He in the storage tank 6, - When the suction pressure of the membrane compressor 1 decreases, the secondary pressure regulator 7 is activated and the I-I e in the storage tank 6 and the He container 8 is reduced.
is supplied. Also, when the precooling refrigerator 21 stops,
Since the differential pressure regulator 9 operates, the high pressure, medium pressure,
Each pressure of low pressure is automatically adjusted.

次に第2図のブロック図を参照して第1図の装置の制御
方法について説明する。
Next, a method of controlling the apparatus shown in FIG. 1 will be explained with reference to the block diagram shown in FIG.

運転について; 1)制御盤の運転スイッチをONにすると、−膜圧縮機
1、二段圧縮機2、冷凍機用モータ32が起動すると同
時に三方弁16がc−b、三方弁16aがb−aの方向
に開く。又供給弁33も開く。
Regarding operation; 1) When the operation switch on the control panel is turned on, the membrane compressor 1, two-stage compressor 2, and refrigerator motor 32 start, and at the same time, the three-way valve 16 turns c-b and the three-way valve 16a turns b- Open in direction a. Also, the supply valve 33 is opened.

すると圧縮機ユニットBからのHeガスがHe液化冷凍
機Aの予冷用冷凍機21とJ −T回路に流入し、液体
He容器18の予冷運転を開始する。このときJ−T弁
15と15aは両方具間いている。
Then, the He gas from the compressor unit B flows into the precooling refrigerator 21 of the He liquefaction refrigerator A and the J-T circuit, and the precooling operation of the liquid He container 18 is started. At this time, both J-T valves 15 and 15a are in position.

なお、J−T弁15は常時開で固定弁として用いられる
Note that the J-T valve 15 is always open and used as a fixed valve.

2)温度計29が25に以下を示すと、J−T弁15a
が閉じ、J−T弁の流量を減少させ、三方弁16aがc
−a方向に開くことによって液体He容器18内を更に
冷却する。
2) When the thermometer 29 indicates the following at 25, the J-T valve 15a
is closed, reducing the flow rate of the J-T valve, and the three-way valve 16a is closed.
By opening in the -a direction, the inside of the liquid He container 18 is further cooled.

3)温度計29が5に以下になると、液面計30の電源
が入り1作動する。液面計30が100%を示すと、L
He液化が完了するので、三方弁16をc −aの方向
に開き、低温弁28を閉じる。・・・再凝縮液化状態と
なる。
3) When the thermometer 29 becomes 5 or less, the liquid level gauge 30 is turned on and operates 1. When the liquid level gauge 30 shows 100%, L
Since He liquefaction is completed, the three-way valve 16 is opened in the c-a direction, and the low temperature valve 28 is closed. ...recondenses into a liquefied state.

4)この後、パワーリードその他の操作によって液体H
e容器18のLHeを蒸発放出させたとき。
4) After this, liquid H is removed by power lead or other operations.
e When LHe in the container 18 is evaporated and released.

LHeの液面は減少する。液面計30が80%以下を示
すと凝縮He供給弁24が開いてHeが供給され、凝縮
液化し、LHe液面は増す。再び液面計30が100%
を示すと、凝縮He供給弁24が閉じる。以上の動作が
繰返される。
The liquid level of LHe decreases. When the liquid level gauge 30 indicates 80% or less, the condensed He supply valve 24 opens and He is supplied, condensed and liquefied, and the LHe liquid level increases. Level gauge 30 is 100% again
When , the condensed He supply valve 24 closes. The above operations are repeated.

5)冷却運転が完了すると、液体He容器18のLHe
を回収し1次の運転に備える。
5) When the cooling operation is completed, the LHe in the liquid He container 18 is
is collected and prepared for the first operation.

回収について; 6)回収運転とするため、回収スイッチをONにすると
、冷凍機用モータ32が停止し、低温弁28が開いて、
供給弁33が閉じる。LHeが気化しHeガスとして圧
縮機ユニットBのストレージタンク6又はHe容器8に
回収される。
Regarding recovery; 6) When the recovery switch is turned on for recovery operation, the refrigerator motor 32 stops, the low temperature valve 28 opens,
Supply valve 33 is closed. LHe is vaporized and recovered as He gas into the storage tank 6 or He container 8 of the compressor unit B.

7)温度計29が5に以上となると、液面計36の電源
がOFFとなり、液面計30を保護する。その後温度計
29が265に以上を示すと、一段と二段圧縮機1,2
が同時に停止して回収運転を終了する(以上の説明で、
温度計29の設定温度を265に、25に、5にとした
が、265に、25にの設定を変更することも可能であ
る。又液面計30の設定についても同様である)。
7) When the thermometer 29 reaches 5 or higher, the power to the liquid level gauge 36 is turned off to protect the liquid level gauge 30. After that, when the thermometer 29 shows 265 or higher, the first and second stage compressors 1 and 2
stops at the same time and ends the collection operation (in the above explanation,
Although the set temperature of the thermometer 29 was set to 265, 25, and 5, it is also possible to change the setting to 265 and 25. The same applies to the settings of the liquid level gauge 30).

(効果) 1台の装置で被冷却体の予冷、LHeの貯液、蒸発He
ガスの再凝縮、Heガスの凝縮液化及び液化Heの回収
を自動で行えるようにした。このようにしたので、従来
の如く、小型超電導磁石の運転を、まずLN2を入れて
冷却し、次いでHeガスを通して残存のN2ガスを排出
し、LHeを入れるという血判な操作を必要としなくな
り、素人でも容易に操作することができるようになった
(Effects) One device can pre-cool the object to be cooled, store LHe, and evaporate He.
The recondensation of gas, the condensation and liquefaction of He gas, and the recovery of liquefied He can now be performed automatically. This eliminates the need for amateurs to operate a small superconducting magnet, which requires the conventional operation of first introducing LN2 to cool it, then exhausting the remaining N2 gas through He gas, and then introducing LHe. However, it is now easier to operate.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る小型He液化冷凍装置の配管図。 第2図は同じく装置の自動制御ブロック図である。 図において; 1−膜圧縮機   2 二段圧縮機 3 油分離器     4 吸着器 5−次圧力調整器  6 ストレージタンク7 二次圧
力調整器 8  He容器 9 差圧調整器 1〇  −膜外負荷フランジ 11  二段熱負荷フランジ 12 −膜外交換器  13  二段熱交換器14  
三段熱交換器  15  J−T弁(1)15a  (
ガス圧駆動)J−T弁(2)16  (ガス圧駆動)三
方弁(1) 16a(ガス圧駆動)三方弁(2) 17  超電導コイル  18  液体He容器19 
 フィルター    20  シールド板21  予冷
用冷凍機  22  真空断熱容器23  凝縮He供
給系 24(ガス圧駆動)凝縮He供給弁 25  減圧弁     26  逆止弁27  凝縮
器 28(ガス圧駆動)低温弁 29  温度計     30  液面計31  予冷
回路    32  冷凍機用モータ33(ガス圧駆動
)供給弁 34.35,36.37  管路 以上
FIG. 1 is a piping diagram of a small-sized He liquefaction refrigeration system according to the present invention. FIG. 2 is also an automatic control block diagram of the device. In the figure: 1 - membrane compressor 2 two-stage compressor 3 oil separator 4 adsorber 5-order pressure regulator 6 storage tank 7 secondary pressure regulator 8 He container 9 differential pressure regulator 10 - extra-membrane load flange 11 Two-stage heat load flange 12 - Extra-membrane exchanger 13 Two-stage heat exchanger 14
Three-stage heat exchanger 15 J-T valve (1) 15a (
Gas pressure driven) J-T valve (2) 16 (Gas pressure driven) Three-way valve (1) 16a (Gas pressure driven) Three-way valve (2) 17 Superconducting coil 18 Liquid He container 19
Filter 20 Shield plate 21 Pre-cooling refrigerator 22 Vacuum insulation container 23 Condensed He supply system 24 (gas pressure driven) Condensed He supply valve 25 Pressure reducing valve 26 Check valve 27 Condenser 28 (gas pressure driven) Low temperature valve 29 Thermometer 30 Liquid level gauge 31 Pre-cooling circuit 32 Freezer motor 33 (gas pressure driven) supply valves 34, 35, 36, 37 Pipe lines and above

Claims (1)

【特許請求の範囲】[Claims] He液化冷凍機(A)と該冷凍機(A)にHeを供給す
るためのHe容器に接続された圧縮機ユニット(B)を
閉回路で接続し、前記He液化冷凍機(A)は高圧He
を自由膨脹させるための熱交換器とJ−T弁及び配管を
有し、かつ切換可能なHe液化回路と凝縮器回路を備え
たJ−T回路と、凝縮用Heを供給する回路と、これら
両回路を流れるHeを予冷するための予冷用冷凍機を備
え、さらに被冷却体を収納する液体He容器が設けられ
、該容器内にHe液化冷凍装置の運転制御用信号を得る
ため、温度計と液体He液面計を設けたことを特徴とす
る小型He液化冷凍装置。
A He liquefaction refrigerator (A) and a compressor unit (B) connected to a He container for supplying He to the refrigerator (A) are connected in a closed circuit, and the He liquefaction refrigerator (A) is operated under high pressure. He
A J-T circuit that has a heat exchanger for free expansion, a J-T valve and piping, and is equipped with a switchable He liquefaction circuit and a condenser circuit, and a circuit that supplies He for condensation. A pre-cooling refrigerator is provided to pre-cool the He flowing through both circuits, and a liquid He container is provided to store the object to be cooled. A small-sized He liquefaction refrigeration device characterized by being provided with a liquid He liquid level gauge.
JP11911287A 1987-05-18 1987-05-18 Small He liquefaction refrigeration system Expired - Lifetime JPH0689956B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11911287A JPH0689956B2 (en) 1987-05-18 1987-05-18 Small He liquefaction refrigeration system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11911287A JPH0689956B2 (en) 1987-05-18 1987-05-18 Small He liquefaction refrigeration system

Publications (2)

Publication Number Publication Date
JPS63286670A true JPS63286670A (en) 1988-11-24
JPH0689956B2 JPH0689956B2 (en) 1994-11-14

Family

ID=14753215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11911287A Expired - Lifetime JPH0689956B2 (en) 1987-05-18 1987-05-18 Small He liquefaction refrigeration system

Country Status (1)

Country Link
JP (1) JPH0689956B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02275260A (en) * 1989-04-14 1990-11-09 Sumitomo Heavy Ind Ltd Cryogenic cooling device
US5293750A (en) * 1991-11-27 1994-03-15 Osaka Gas Company Limited Control system for liquefied gas container
JP2011091212A (en) * 2009-10-22 2011-05-06 Japan Superconductor Technology Inc Superconducting magnet device and initial cooling method for superconducting coil of the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02275260A (en) * 1989-04-14 1990-11-09 Sumitomo Heavy Ind Ltd Cryogenic cooling device
US5293750A (en) * 1991-11-27 1994-03-15 Osaka Gas Company Limited Control system for liquefied gas container
JP2011091212A (en) * 2009-10-22 2011-05-06 Japan Superconductor Technology Inc Superconducting magnet device and initial cooling method for superconducting coil of the same

Also Published As

Publication number Publication date
JPH0689956B2 (en) 1994-11-14

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