JPS6328602Y2 - - Google Patents

Info

Publication number
JPS6328602Y2
JPS6328602Y2 JP15014581U JP15014581U JPS6328602Y2 JP S6328602 Y2 JPS6328602 Y2 JP S6328602Y2 JP 15014581 U JP15014581 U JP 15014581U JP 15014581 U JP15014581 U JP 15014581U JP S6328602 Y2 JPS6328602 Y2 JP S6328602Y2
Authority
JP
Japan
Prior art keywords
cover
track
support
running
handler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15014581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5856438U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15014581U priority Critical patent/JPS5856438U/ja
Publication of JPS5856438U publication Critical patent/JPS5856438U/ja
Application granted granted Critical
Publication of JPS6328602Y2 publication Critical patent/JPS6328602Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15014581U 1981-10-12 1981-10-12 Ｉｃハンドラの送路カバ− Granted JPS5856438U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15014581U JPS5856438U (ja) 1981-10-12 1981-10-12 Ｉｃハンドラの送路カバ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15014581U JPS5856438U (ja) 1981-10-12 1981-10-12 Ｉｃハンドラの送路カバ−

Publications (2)

Publication Number Publication Date
JPS5856438U JPS5856438U (ja) 1983-04-16
JPS6328602Y2 true JPS6328602Y2 (enExample) 1988-08-02

Family

ID=29942887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15014581U Granted JPS5856438U (ja) 1981-10-12 1981-10-12 Ｉｃハンドラの送路カバ−

Country Status (1)

Country Link
JP (1) JPS5856438U (enExample)

Also Published As

Publication number Publication date
JPS5856438U (ja) 1983-04-16

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