JPS63285406A - 膜厚測定方法 - Google Patents

膜厚測定方法

Info

Publication number
JPS63285406A
JPS63285406A JP62121862A JP12186287A JPS63285406A JP S63285406 A JPS63285406 A JP S63285406A JP 62121862 A JP62121862 A JP 62121862A JP 12186287 A JP12186287 A JP 12186287A JP S63285406 A JPS63285406 A JP S63285406A
Authority
JP
Japan
Prior art keywords
film
layer
ultrasonic
film thickness
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62121862A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0553206B2 (enrdf_load_stackoverflow
Inventor
Katsumi Ohira
大平　克巳
Yusuke Tsukahara
祐輔 塚原
Noritaka Nakaso
教尊 中曽
Masao Saito
雅雄 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP62121862A priority Critical patent/JPS63285406A/ja
Publication of JPS63285406A publication Critical patent/JPS63285406A/ja
Publication of JPH0553206B2 publication Critical patent/JPH0553206B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP62121862A 1987-05-19 1987-05-19 膜厚測定方法 Granted JPS63285406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62121862A JPS63285406A (ja) 1987-05-19 1987-05-19 膜厚測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62121862A JPS63285406A (ja) 1987-05-19 1987-05-19 膜厚測定方法

Publications (2)

Publication Number Publication Date
JPS63285406A true JPS63285406A (ja) 1988-11-22
JPH0553206B2 JPH0553206B2 (enrdf_load_stackoverflow) 1993-08-09

Family

ID=14821770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62121862A Granted JPS63285406A (ja) 1987-05-19 1987-05-19 膜厚測定方法

Country Status (1)

Country Link
JP (1) JPS63285406A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010243176A (ja) * 2009-04-01 2010-10-28 Kanto Auto Works Ltd 膜厚測定方法及び測定装置
CN115628703A (zh) * 2022-10-19 2023-01-20 深圳市华众自动化工程有限公司 一种基于超声波的测量装置及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182508A (ja) * 1987-01-23 1988-07-27 Toppan Printing Co Ltd 膜厚測定方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182508A (ja) * 1987-01-23 1988-07-27 Toppan Printing Co Ltd 膜厚測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010243176A (ja) * 2009-04-01 2010-10-28 Kanto Auto Works Ltd 膜厚測定方法及び測定装置
CN115628703A (zh) * 2022-10-19 2023-01-20 深圳市华众自动化工程有限公司 一种基于超声波的测量装置及方法

Also Published As

Publication number Publication date
JPH0553206B2 (enrdf_load_stackoverflow) 1993-08-09

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Legal Events

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