JPH0553206B2 - - Google Patents

Info

Publication number
JPH0553206B2
JPH0553206B2 JP62121862A JP12186287A JPH0553206B2 JP H0553206 B2 JPH0553206 B2 JP H0553206B2 JP 62121862 A JP62121862 A JP 62121862A JP 12186287 A JP12186287 A JP 12186287A JP H0553206 B2 JPH0553206 B2 JP H0553206B2
Authority
JP
Japan
Prior art keywords
film
layer
ultrasonic
film thickness
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62121862A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63285406A (ja
Inventor
Katsumi Oohira
Jusuke Tsukahara
Nobutaka Nakaso
Masao Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP62121862A priority Critical patent/JPS63285406A/ja
Publication of JPS63285406A publication Critical patent/JPS63285406A/ja
Publication of JPH0553206B2 publication Critical patent/JPH0553206B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP62121862A 1987-05-19 1987-05-19 膜厚測定方法 Granted JPS63285406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62121862A JPS63285406A (ja) 1987-05-19 1987-05-19 膜厚測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62121862A JPS63285406A (ja) 1987-05-19 1987-05-19 膜厚測定方法

Publications (2)

Publication Number Publication Date
JPS63285406A JPS63285406A (ja) 1988-11-22
JPH0553206B2 true JPH0553206B2 (enrdf_load_stackoverflow) 1993-08-09

Family

ID=14821770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62121862A Granted JPS63285406A (ja) 1987-05-19 1987-05-19 膜厚測定方法

Country Status (1)

Country Link
JP (1) JPS63285406A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5257991B2 (ja) * 2009-04-01 2013-08-07 トヨタ自動車東日本株式会社 膜厚測定方法及び測定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182508A (ja) * 1987-01-23 1988-07-27 Toppan Printing Co Ltd 膜厚測定方法

Also Published As

Publication number Publication date
JPS63285406A (ja) 1988-11-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees