JPS6327680B2 - - Google Patents

Info

Publication number
JPS6327680B2
JPS6327680B2 JP54127675A JP12767579A JPS6327680B2 JP S6327680 B2 JPS6327680 B2 JP S6327680B2 JP 54127675 A JP54127675 A JP 54127675A JP 12767579 A JP12767579 A JP 12767579A JP S6327680 B2 JPS6327680 B2 JP S6327680B2
Authority
JP
Japan
Prior art keywords
electron beam
electron
emission window
scanning
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54127675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5651699A (en
Inventor
Hidetoshi Kinuta
Masakatsu Inagaki
Shigeru Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP12767579A priority Critical patent/JPS5651699A/ja
Publication of JPS5651699A publication Critical patent/JPS5651699A/ja
Publication of JPS6327680B2 publication Critical patent/JPS6327680B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP12767579A 1979-10-02 1979-10-02 Electron beam irradiation device Granted JPS5651699A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12767579A JPS5651699A (en) 1979-10-02 1979-10-02 Electron beam irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12767579A JPS5651699A (en) 1979-10-02 1979-10-02 Electron beam irradiation device

Publications (2)

Publication Number Publication Date
JPS5651699A JPS5651699A (en) 1981-05-09
JPS6327680B2 true JPS6327680B2 (enExample) 1988-06-03

Family

ID=14965929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12767579A Granted JPS5651699A (en) 1979-10-02 1979-10-02 Electron beam irradiation device

Country Status (1)

Country Link
JP (1) JPS5651699A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083695A (enExample) * 1973-11-28 1975-07-07
JPS5290798A (en) * 1976-01-26 1977-07-30 Mitsubishi Electric Corp Exit window for charged particles

Also Published As

Publication number Publication date
JPS5651699A (en) 1981-05-09

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