JPS63274128A - Liquid growth device - Google Patents

Abstract

PURPOSE:To assure the high evenness in compositions by a method wherein two different kinds of compositions respectively contained in two melt reservoirs of movable sheets are alternately formed by liquid growth. CONSTITUTION:A movable sheet (a) is composed of two melt reservoirs 10a, 10b in two slender rows in the slide (c) direction of a slide boat while multiple holes 1 are made in the bottom of respective melt reservoirs at specified intervals. The bottoms 2 provided in the melt reservoirs 10a, 10b of movable sheet (a) and the covers 3 provided in the melt reservoir 11 of another movable sheet (b) protect the melt in the movable sheet (a) from running into the movable sheet (b). In such a state, after melting in the melting reservoirs 10a, 10b, the movable sheet (a) is slidden forward. At this time, the melts A, B in the movable sheet (a) are alternately fed to the melt reservoirs 11 in the movable sheet (b). Next, the movable sheet (b) is slidden forward to successively pass the melts A, B to a substrate 5. Through these procedures, the material once weighed for liquid growth is enabled to be fed to specified multiple melt reservoirs 10a, 10b to form grown layer in high evenness.

Description

[Detailed Description of the Invention] [Summary] The present invention is a slide boat for liquid phase epitaxial growth, which has a structure of two upper and lower movable plates each having a solution reservoir.
In particular, the upper movable plate has two solution reservoirs in the sliding direction.
At least two solution reservoirs are provided in the lower movable plate in a direction perpendicular to the sliding direction, and two kinds of solutions on the upper movable plate are alternately distributed to the solution reservoirs on the lower movable plate to cause liquid phase growth.

[Industrial application field]

The present invention relates to a liquid phase growth apparatus, and particularly to a liquid phase growth apparatus that can easily produce a uniform superlattice structure in liquid phase epitaxial growth.

[Conventional technology and problems]

Conventionally, in liquid phase epitaxial growth using a slide boat, a sliding method is known in which a substrate is slid together with a holder to grow single crystal layers having different conductivity types and compositions on the substrate. When using this sliding method to grow layers of multiple compositions, for example two types, by stacking them alternately, solutions with two types of compositions must be weighed and stored in each solution reservoir, and the non-uniformity of the solutions may cause Liquid layer growth with a uniform superlattice structure could not be obtained.

An object of the present invention is to provide a liquid phase growth apparatus capable of manufacturing a highly uniform superlattice structure.

[Means for solving problems]

The above problem is solved according to the present invention in a liquid phase growth apparatus equipped with a slide boat for liquid phase epitaxial growth having a solution reservoir. The movable plate a is provided with two solution reservoirs having long axes in the sliding direction, the lower movable plate is provided with at least two solution reservoirs having long axes in a direction perpendicular to the sliding direction, and the upper movable plate When a solution is poured into the upper movable plate a, the solution in the upper movable plate a does not flow into the lower movable plate until the movable plate is moved.Also, when the upper movable plate a is slid forward, A bottom and a hole are provided in a part of the solution reservoir of the upper movable plate a so that the two kinds of solutions contained in the two solution reservoirs of the lower movable plate A alternately flow into the solution reservoir of the lower movable plate A. This solution is solved by a liquid phase growth apparatus characterized in that the solution reservoir is provided with lids and holes alternately.

[For production]

According to the present invention, the two types of materials respectively stored in the two solution reservoirs of the movable plate a become solutions with the compositions in the weighed state, and the compositions are alternately grown in liquid phase, so that the compositions are highly uniform. can be achieved.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

FIGS. 1A and 1B and 2A and 2B respectively show plan views of a movable plate a and a movable plate of a slide boat according to an embodiment of the present invention.

The movable plates a and b are used in two stages, upper and lower, with movable plate a facing upward, as shown in FIGS. 3A and 3B.

As shown in FIG. 1A, the movable plate a has two elongated rows of solution reservoirs 10a and 1 along the sliding direction of the slide boat.
0b, each solution reservoir is provided with a plurality of holes 1 at a constant distance from each other at the bottom thereof, and one of the two rows of movable plate a is designated as row P, and the other is designated as row Q. Then column P
, Q have a hole 1 on one side and a bottom 2 on the other side.

Further, as shown in FIG. 2A, the movable plate provided under the movable plate a consists of a plurality of (seven in the figure) long solution reservoirs 11 in the direction orthogonal to the sliding direction, and each solution reservoir At the top, lids 3 (indicated by broken lines) each having a size half the area of the solution reservoir are provided alternately.

Figures 3A and 3B are cross-sectional views of the slide boat set. In particular, Figure 3A is a diagram before the solution flows from the solution reservoir of movable plate a into the movable plate, and Figure 3B is a diagram of movable plate a. After the solution flows from the solution reservoir to the movable plate (after sliding)
FIG.

According to FIG. 2(a), a movable plate a is provided on a fixed plate 6 on which a base plate 5 is provided, and on the base of the movable plate.

Melt A (for example, InGaAsP) and melt B (InP) are stored in two types of solution reservoirs 10a and 10b of the upper movable plate a, respectively.

The bottom 2 provided on the solution reservoirs 10a, 10b of the movable plate a and the lid 3 provided on the solution reservoir 11 of the movable plate are the movable plate a.
This prevents the melt inside from flowing into the movable plate. In this state, melt the melt in the solution reservoir, then slide the movable plate a forward, and from the arrangement method and size relationship of the bottom of the movable plate a and the lid of the movable plate, the melt in the movable plate A) and B are shown in FIG. 3B, which alternately flow into the solution reservoir 11 of the movable plate. That is, when in the state shown in Fig. 3A, melt A and melt B shown in Fig. 1A cannot fall because the part of the lid 3 shown in Fig. 2A becomes hole 1 in Fig. 3A. When it slides to Figure 3B, the first
The hole in Figure A corresponds to the hole in Figure 2A, and Mel)A and Mel)B are alternately flowed in as shown in Figure 3B. Next, the movable plate is slid forward to sequentially pass melt A (InGaAsP) and melt B (InP) onto the substrate to obtain a grown layer with a superlattice structure.

〔Effect of the invention〕

As explained above, according to the present invention, it is possible to flow the once weighed liquid phase growth material into a plurality of predetermined solution reservoirs, and it is possible to maintain high uniformity of the same material, thereby obtaining a highly uniform growth layer. be able to.

[Brief explanation of the drawing]

1A and 1B are a plan view and a side view of a movable plate a which is an embodiment of the present invention, and FIGS. 2A and 2B are a plan view of a movable plate a which is an embodiment of the present invention. 3A and 3B are cross-sectional views of the set diagram of the slide boat, and in particular, FIG. 3A shows the flow of the solution from the solution reservoir of the movable Fia into the movable plate. It is a diagram. 1... Hole, 2... Bottom, 3... Lid, 10a, 10b, 11... Solution reservoir.

Claims (1)

[Scope of Claims] 1. In a liquid phase growth apparatus equipped with a slide boat for liquid phase epitaxial growth having a solution reservoir, the slide boat has a two-stage structure of a movable plate a and a movable plate b disposed vertically, and the upper movable Plate a is provided with two solution reservoirs (10a, 10b) having long axes in the sliding direction, and lower movable plate b is provided with at least two solution reservoirs (11) having long axes in a direction perpendicular to the sliding direction. The upper movable plate a was moved so that when the solution was put into the upper movable plate a, the solution in the upper movable plate a would not flow into the lower movable plate b until the movable plate was moved. In this case, the solution reservoir on the upper movable plate a is arranged so that the two types of solutions put into the two solution reservoirs (10a, 10b) on the upper movable plate alternately flow into the solution reservoir (11) on the lower movable plate b. A liquid phase growth apparatus characterized in that a bottom (2) and a hole (1) are provided in a part of the lower movable plate b, and a lid (3) and a hole (1) are provided alternately in the solution reservoir of the lower movable plate b. .