JPS63271858A - 多重電極レンズ系構造 - Google Patents

多重電極レンズ系構造

Info

Publication number
JPS63271858A
JPS63271858A JP62106024A JP10602487A JPS63271858A JP S63271858 A JPS63271858 A JP S63271858A JP 62106024 A JP62106024 A JP 62106024A JP 10602487 A JP10602487 A JP 10602487A JP S63271858 A JPS63271858 A JP S63271858A
Authority
JP
Japan
Prior art keywords
electrode
cylindrical
insulating material
fixed
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62106024A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574187B2 (enrdf_load_stackoverflow
Inventor
Toshimichi Taya
田谷　俊陸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62106024A priority Critical patent/JPS63271858A/ja
Publication of JPS63271858A publication Critical patent/JPS63271858A/ja
Publication of JPH0574187B2 publication Critical patent/JPH0574187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP62106024A 1987-04-28 1987-04-28 多重電極レンズ系構造 Granted JPS63271858A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62106024A JPS63271858A (ja) 1987-04-28 1987-04-28 多重電極レンズ系構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62106024A JPS63271858A (ja) 1987-04-28 1987-04-28 多重電極レンズ系構造

Publications (2)

Publication Number Publication Date
JPS63271858A true JPS63271858A (ja) 1988-11-09
JPH0574187B2 JPH0574187B2 (enrdf_load_stackoverflow) 1993-10-15

Family

ID=14423073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62106024A Granted JPS63271858A (ja) 1987-04-28 1987-04-28 多重電極レンズ系構造

Country Status (1)

Country Link
JP (1) JPS63271858A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260359A (ja) * 1989-03-31 1990-10-23 Ulvac Corp 平行走査用イオン注入装置
JP2007507835A (ja) * 2003-10-08 2007-03-29 ヴァリアン オーストラリア ピーティーワイ．エルティーディー． 質量分析用電極

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260359A (ja) * 1989-03-31 1990-10-23 Ulvac Corp 平行走査用イオン注入装置
JP2007507835A (ja) * 2003-10-08 2007-03-29 ヴァリアン オーストラリア ピーティーワイ．エルティーディー． 質量分析用電極

Also Published As

Publication number Publication date
JPH0574187B2 (enrdf_load_stackoverflow) 1993-10-15

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