JPS6327036U - - Google Patents
Info
- Publication number
- JPS6327036U JPS6327036U JP12120786U JP12120786U JPS6327036U JP S6327036 U JPS6327036 U JP S6327036U JP 12120786 U JP12120786 U JP 12120786U JP 12120786 U JP12120786 U JP 12120786U JP S6327036 U JPS6327036 U JP S6327036U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- jig
- wafer
- water
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000009835 boiling Methods 0.000 claims 1
- 239000011295 pitch Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
- Extraction Or Liquid Replacement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12120786U JPS6327036U (enExample) | 1986-08-07 | 1986-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12120786U JPS6327036U (enExample) | 1986-08-07 | 1986-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6327036U true JPS6327036U (enExample) | 1988-02-22 |
Family
ID=31010259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12120786U Pending JPS6327036U (enExample) | 1986-08-07 | 1986-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327036U (enExample) |
-
1986
- 1986-08-07 JP JP12120786U patent/JPS6327036U/ja active Pending
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