JPS6327036U - - Google Patents

Info

Publication number
JPS6327036U
JPS6327036U JP12120786U JP12120786U JPS6327036U JP S6327036 U JPS6327036 U JP S6327036U JP 12120786 U JP12120786 U JP 12120786U JP 12120786 U JP12120786 U JP 12120786U JP S6327036 U JPS6327036 U JP S6327036U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
jig
wafer
water
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12120786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12120786U priority Critical patent/JPS6327036U/ja
Publication of JPS6327036U publication Critical patent/JPS6327036U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Extraction Or Liquid Replacement (AREA)
JP12120786U 1986-08-07 1986-08-07 Pending JPS6327036U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12120786U JPS6327036U (enrdf_load_stackoverflow) 1986-08-07 1986-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12120786U JPS6327036U (enrdf_load_stackoverflow) 1986-08-07 1986-08-07

Publications (1)

Publication Number Publication Date
JPS6327036U true JPS6327036U (enrdf_load_stackoverflow) 1988-02-22

Family

ID=31010259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12120786U Pending JPS6327036U (enrdf_load_stackoverflow) 1986-08-07 1986-08-07

Country Status (1)

Country Link
JP (1) JPS6327036U (enrdf_load_stackoverflow)

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