JPS6326924Y2 - - Google Patents

Info

Publication number
JPS6326924Y2
JPS6326924Y2 JP1982078431U JP7843182U JPS6326924Y2 JP S6326924 Y2 JPS6326924 Y2 JP S6326924Y2 JP 1982078431 U JP1982078431 U JP 1982078431U JP 7843182 U JP7843182 U JP 7843182U JP S6326924 Y2 JPS6326924 Y2 JP S6326924Y2
Authority
JP
Japan
Prior art keywords
sample
heat transfer
fin
transfer member
contamination prevention
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982078431U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58182255U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7843182U priority Critical patent/JPS58182255U/ja
Publication of JPS58182255U publication Critical patent/JPS58182255U/ja
Application granted granted Critical
Publication of JPS6326924Y2 publication Critical patent/JPS6326924Y2/ja
Granted legal-status Critical Current

Links

JP7843182U 1982-05-28 1982-05-28 試料汚染防止装置 Granted JPS58182255U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7843182U JPS58182255U (ja) 1982-05-28 1982-05-28 試料汚染防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7843182U JPS58182255U (ja) 1982-05-28 1982-05-28 試料汚染防止装置

Publications (2)

Publication Number Publication Date
JPS58182255U JPS58182255U (ja) 1983-12-05
JPS6326924Y2 true JPS6326924Y2 (cg-RX-API-DMAC7.html) 1988-07-21

Family

ID=30087638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7843182U Granted JPS58182255U (ja) 1982-05-28 1982-05-28 試料汚染防止装置

Country Status (1)

Country Link
JP (1) JPS58182255U (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7629597B2 (en) * 2006-08-18 2009-12-08 Axcelis Technologies, Inc. Deposition reduction system for an ion implanter

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145980U (cg-RX-API-DMAC7.html) * 1974-10-04 1976-04-05
JPS5855616B2 (ja) * 1977-09-30 1983-12-10 株式会社日立製作所 走査電子顕微鏡等の試料装置

Also Published As

Publication number Publication date
JPS58182255U (ja) 1983-12-05

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