JPS58182255U - 試料汚染防止装置 - Google Patents

試料汚染防止装置

Info

Publication number
JPS58182255U
JPS58182255U JP7843182U JP7843182U JPS58182255U JP S58182255 U JPS58182255 U JP S58182255U JP 7843182 U JP7843182 U JP 7843182U JP 7843182 U JP7843182 U JP 7843182U JP S58182255 U JPS58182255 U JP S58182255U
Authority
JP
Japan
Prior art keywords
fins
heat transfer
contamination prevention
transfer member
prevention device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7843182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326924Y2 (cg-RX-API-DMAC7.html
Inventor
後藤　正弐
洋一 渋木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP7843182U priority Critical patent/JPS58182255U/ja
Publication of JPS58182255U publication Critical patent/JPS58182255U/ja
Application granted granted Critical
Publication of JPS6326924Y2 publication Critical patent/JPS6326924Y2/ja
Granted legal-status Critical Current

Links

JP7843182U 1982-05-28 1982-05-28 試料汚染防止装置 Granted JPS58182255U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7843182U JPS58182255U (ja) 1982-05-28 1982-05-28 試料汚染防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7843182U JPS58182255U (ja) 1982-05-28 1982-05-28 試料汚染防止装置

Publications (2)

Publication Number Publication Date
JPS58182255U true JPS58182255U (ja) 1983-12-05
JPS6326924Y2 JPS6326924Y2 (cg-RX-API-DMAC7.html) 1988-07-21

Family

ID=30087638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7843182U Granted JPS58182255U (ja) 1982-05-28 1982-05-28 試料汚染防止装置

Country Status (1)

Country Link
JP (1) JPS58182255U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008047536A (ja) * 2006-08-18 2008-02-28 Axcelis Technologies Inc イオン注入機用の汚染物質を減少させる構造体及びその方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145980U (cg-RX-API-DMAC7.html) * 1974-10-04 1976-04-05
JPS5451372A (en) * 1977-09-30 1979-04-23 Hitachi Ltd Sampler of scanning electron microscope of the like

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145980U (cg-RX-API-DMAC7.html) * 1974-10-04 1976-04-05
JPS5451372A (en) * 1977-09-30 1979-04-23 Hitachi Ltd Sampler of scanning electron microscope of the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008047536A (ja) * 2006-08-18 2008-02-28 Axcelis Technologies Inc イオン注入機用の汚染物質を減少させる構造体及びその方法

Also Published As

Publication number Publication date
JPS6326924Y2 (cg-RX-API-DMAC7.html) 1988-07-21

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