JPS6326881Y2 - - Google Patents

Info

Publication number
JPS6326881Y2
JPS6326881Y2 JP1982004792U JP479282U JPS6326881Y2 JP S6326881 Y2 JPS6326881 Y2 JP S6326881Y2 JP 1982004792 U JP1982004792 U JP 1982004792U JP 479282 U JP479282 U JP 479282U JP S6326881 Y2 JPS6326881 Y2 JP S6326881Y2
Authority
JP
Japan
Prior art keywords
microwave
discharge
waveguide
impedance
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982004792U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58107563U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP479282U priority Critical patent/JPS58107563U/ja
Publication of JPS58107563U publication Critical patent/JPS58107563U/ja
Application granted granted Critical
Publication of JPS6326881Y2 publication Critical patent/JPS6326881Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP479282U 1982-01-18 1982-01-18 マイクロ波放電光源装置 Granted JPS58107563U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP479282U JPS58107563U (ja) 1982-01-18 1982-01-18 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP479282U JPS58107563U (ja) 1982-01-18 1982-01-18 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS58107563U JPS58107563U (ja) 1983-07-22
JPS6326881Y2 true JPS6326881Y2 (cs) 1988-07-21

Family

ID=30017622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP479282U Granted JPS58107563U (ja) 1982-01-18 1982-01-18 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS58107563U (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5129555B2 (ja) * 2007-12-05 2013-01-30 独立行政法人日本原子力研究開発機構 ビーム終端方法及びビーム終端装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3872349A (en) * 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation

Also Published As

Publication number Publication date
JPS58107563U (ja) 1983-07-22

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