JPS63265857A - Production of low expansion substrate - Google Patents
Production of low expansion substrateInfo
- Publication number
- JPS63265857A JPS63265857A JP62101379A JP10137987A JPS63265857A JP S63265857 A JPS63265857 A JP S63265857A JP 62101379 A JP62101379 A JP 62101379A JP 10137987 A JP10137987 A JP 10137987A JP S63265857 A JPS63265857 A JP S63265857A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- fibers
- weight
- slurry
- raw materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000000835 fiber Substances 0.000 claims abstract description 30
- 239000002994 raw material Substances 0.000 claims abstract description 25
- 239000000919 ceramic Substances 0.000 claims abstract description 21
- 239000002002 slurry Substances 0.000 claims abstract description 15
- 239000000843 powder Substances 0.000 claims abstract description 14
- 239000004927 clay Substances 0.000 claims abstract description 10
- 239000000454 talc Substances 0.000 claims abstract description 10
- 229910052623 talc Inorganic materials 0.000 claims abstract description 10
- 239000010433 feldspar Substances 0.000 claims abstract description 9
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000005995 Aluminium silicate Substances 0.000 claims abstract description 8
- 235000012211 aluminium silicate Nutrition 0.000 claims abstract description 8
- 239000012784 inorganic fiber Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 abstract description 18
- 229910052878 cordierite Inorganic materials 0.000 abstract description 13
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 abstract description 13
- 238000001354 calcination Methods 0.000 abstract 2
- 238000010304 firing Methods 0.000 description 7
- 238000005245 sintering Methods 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229920001131 Pulp (paper) Polymers 0.000 description 5
- 239000010425 asbestos Substances 0.000 description 5
- 229910052895 riebeckite Inorganic materials 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 235000021168 barbecue Nutrition 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000000701 coagulant Substances 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000011490 mineral wool Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003828 vacuum filtration Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
〈発明の技術分野〉
本発明は緻密で低熱膨張率の基板の製造方法に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a method for manufacturing a dense substrate with a low coefficient of thermal expansion.
〈発明の技術的背景とその問題点〉
コージェライトは熱膨張係数の小さなセラミックスとし
て従来から知られており、面状発熱体の基板などに利用
されている。<Technical background of the invention and its problems> Cordierite has been known as a ceramic with a small coefficient of thermal expansion, and is used for substrates of planar heating elements, etc.
しかしながら、コージェライトはその焼結温度範囲が狭
く、通常の手段では単体での焼結は困難であり、その気
孔率も1.0%以下のものは得られない。そのため、ジ
ルコン等適当な焼結助剤の添加が行なわれるが、この場
合でも、焼成温度が1400°Cと高温であり、焼結温
度範囲も50°C程度と狭く、また原料コストが高くな
るという難点がある。However, since cordierite has a narrow sintering temperature range, it is difficult to sinter it as a single body using normal means, and a porosity of less than 1.0% cannot be obtained. Therefore, an appropriate sintering aid such as zircon is added, but even in this case, the firing temperature is as high as 1400°C, the sintering temperature range is narrow at around 50°C, and the cost of raw materials is high. There is a drawback.
さらに、このような未焼成のシート状物を成形する場合
、プレス成形、ドクターブレード法などの方法が用いら
れるが、前者の場合は少なくとも7.00kg/c+a
以上のプレス圧を必要とし、量産には不向きである。ま
た、後者に於ては有機バインダー及び溶剤等を使用する
ため作業環境上の問題あるいはシート焼成の際の脱バイ
ンダ一工程が非常に複雑かつ困難であるという欠点があ
った。Furthermore, when forming such an unfired sheet-like product, methods such as press forming and doctor blade method are used, but in the case of the former, at least 7.00 kg/c+a
It requires a higher press pressure and is not suitable for mass production. In addition, the latter method uses an organic binder, a solvent, etc., and therefore has problems in the working environment, and has the disadvantage that the binder removal step during sheet firing is extremely complicated and difficult.
以上のような欠点を除去し、緻密な低膨張基板を製造す
る方法として、本発明者らは、無機Ili維を用いた抄
紙法により未焼成シート状物を造る方法を出願している
。すなわちコージェライト組成の原曾粉末に、粘土、長
石、タルク、カオリン等の窯業原料を5〜35重量%の
割合で添加し、これにアスベスト、アルミナ等の無機繊
維を混合して水性スラリーとなし、凝集、抄造すること
で上記原料粉末と窯業原料と無機繊維とから成るシート
状物を製造する方法である。As a method for eliminating the above-mentioned drawbacks and producing a dense, low-expansion substrate, the present inventors have filed an application for a method for producing an unfired sheet-like material by a papermaking method using inorganic Ili fibers. That is, ceramic raw materials such as clay, feldspar, talc, and kaolin are added to raw powder having a cordierite composition at a ratio of 5 to 35% by weight, and inorganic fibers such as asbestos and alumina are mixed with this to form an aqueous slurry. This is a method for producing a sheet-like product made of the above-mentioned raw material powder, ceramic raw material, and inorganic fiber by performing , aggregation, and paper-making.
しかしながら、繊維質として無機繊維を単独で用いた場
合、抄造した未焼成シートの可塑性が乏しく、シートの
ひび割れが生じ易い。従って厚みが2閣以上のシートの
抄造は困難であるといった欠点があった。However, when inorganic fibers are used alone as the fibrous material, the plasticity of the unfired sheet produced is poor and cracks are likely to occur in the sheet. Therefore, there was a drawback that it was difficult to produce a sheet with a thickness of two or more layers.
〈発明の目的〉
本発明では、前記の様な欠点を除去し、緻密で熱膨張係
数が小さく、低価格で作れるセラミックス基板の製造方
法を提供するものである。<Objective of the Invention> The present invention provides a method for manufacturing a ceramic substrate that is dense, has a small coefficient of thermal expansion, and can be manufactured at low cost by eliminating the above-mentioned drawbacks.
〈発明の概要〉
すなわち本発明は、コージェライト組成の原料粉末に、
粘土、長石、タルク、カオリン等の窯業原料を5〜35
重量%の割合で添加し、これに3〜40重量部のアルベ
スト、アルミナ等の無m繊維、及び0.2〜5重世%の
木材パルプ等の有機繊維を混合して水性スラリーとし凝
集、抄造することで上記原料粉末と窯業原料と無機繊維
と有機繊維とからなるシート状物を得、該シート状物を
1300〜1400°Cで焼成することを特徴とする緻
密で低熱膨張率の基板の製造方法である。<Summary of the Invention> That is, the present invention provides a raw material powder having a cordierite composition,
5 to 35 ceramic raw materials such as clay, feldspar, talc, kaolin, etc.
% by weight, and 3 to 40 parts by weight of non-molecular fibers such as albest and alumina, and 0.2 to 5 parts by weight of organic fibers such as wood pulp are mixed to form an aqueous slurry and coagulate. , a sheet-like product made of the raw material powder, ceramic raw materials, inorganic fibers, and organic fibers is obtained by paper-making, and the sheet-like product is fired at 1,300 to 1,400°C, which is dense and has a low coefficient of thermal expansion. This is a method for manufacturing a substrate.
〈発明の詳述〉
すなわち、本発明では、低膨張材料のコージェライトに
粘土、長石、タルク、カオリン等の窯業原料を添加し、
これにアスベスト、アルミナファイバー等の無機繊維質
及び木材パルプ等の有機繊維を混合して水性スラリーと
し凝集、抄造する事で、セラミックグリーンシートを得
、こうすることにより、従来、20〜30 ’Cと非常
に狭い範囲でしか焼結させ得なかったコージェライト系
材料を、1300°C〜1400 ’Cの広い焼成温度
範囲で緻密化する方法を提供するものである。<Detailed Description of the Invention> That is, in the present invention, ceramic raw materials such as clay, feldspar, talc, and kaolin are added to cordierite, which is a low expansion material, and
Ceramic green sheets are obtained by mixing inorganic fibers such as asbestos, alumina fibers, and organic fibers such as wood pulp into an aqueous slurry, coagulating, and papermaking. The present invention provides a method for densifying cordierite materials, which could only be sintered in a very narrow range, over a wide firing temperature range of 1300°C to 1400'C.
この点につき、具体的に説明すると、粘土、長石、タル
ク、カオリン等の窯業原料は、抄紙法により得られる水
系のセラミックグリーンシートの可塑性を向上させ、さ
らには原料コージェライトの焼結を促進させる目的で5
〜35重景%重量される。この際に、窯業原料の添加量
が5重量%以下であると抄造によって得られるグリーン
シートの可塑性が乏しく、ハンドリングが困難であり、
逆に35重四%以上添加すると、その組成がコージェラ
イト組成から大きく外れ、焼結体が低い熱膨張率となら
ない。To explain this point specifically, ceramic raw materials such as clay, feldspar, talc, and kaolin improve the plasticity of the aqueous ceramic green sheet obtained by the papermaking method, and further promote the sintering of the raw material cordierite. 5 for purpose
~35% heavy weight. At this time, if the amount of ceramic raw materials added is less than 5% by weight, the green sheet obtained by papermaking will have poor plasticity and will be difficult to handle.
On the other hand, if more than 35% by weight is added, the composition will deviate greatly from the cordierite composition, and the sintered body will not have a low coefficient of thermal expansion.
なお、ここでいう抄紙法とは、粘土、長石、陶石、タル
ク、カオリン等の一般窯業材料の粉末に対して木材パル
プなどの有機繊維およびアスベスト等の無機繊維、また
はアスベスト等の無機繊維を2〜40重量%添加した水
性スラリーを作成し凝集剤を添加することにより前記固
形分を繊維に吸着凝集させ、該凝集体を均一の厚みにな
るよう濾過板もしくは網上に流し、しかる後自然濾過な
いし減圧濾過などの方法により濾過を行ないシート状物
を得る方法である。この抄紙法を用いる本発明では、ア
スベスト、アルミナファイバー、セラミックファイバー
、岩綿等の無機繊維が、粒体を保持する担体として作用
し、文字通り紙における繊維の役割を果たす。さらに言
えば、水性スラリーを造る段階で、充分に攪拌すること
で、原料粉末、窯業原料、無機繊維は、均質に混ざり合
うから、抄造されたシート状物は焼結するのに好ましい
均質な状態となっているものである。Note that the paper-making method used here refers to the process of adding organic fibers such as wood pulp and inorganic fibers such as asbestos to the powder of general ceramic materials such as clay, feldspar, pottery stone, talc, and kaolin. An aqueous slurry containing 2 to 40% by weight is prepared, and a coagulant is added to adsorb and aggregate the solid content onto the fibers.The aggregate is poured onto a filter plate or screen to a uniform thickness, and then naturally This is a method of obtaining a sheet-like material by performing filtration using a method such as filtration or vacuum filtration. In the present invention using this papermaking method, inorganic fibers such as asbestos, alumina fibers, ceramic fibers, and rock wool act as carriers that hold particles, literally playing the role of fibers in paper. Furthermore, by sufficiently stirring the aqueous slurry at the stage of making the aqueous slurry, the raw material powder, ceramic raw materials, and inorganic fibers are mixed homogeneously, so that the sheet-like material produced is in a homogeneous state that is suitable for sintering. This is the result.
無機繊維は原料粉末に対して3〜40重量%、好ましく
は5〜20重量%の割合で添加される。The inorganic fibers are added in an amount of 3 to 40% by weight, preferably 5 to 20% by weight, based on the raw material powder.
無機繊維の添加量は原料粉体に対し3重量%より小であ
ると抄紙法によるシート成形が困難となり、逆に40重
重量より大であると緻密な焼結体が得られにくい。If the amount of inorganic fiber added is less than 3% by weight based on the raw material powder, it will be difficult to form a sheet by the papermaking method, and conversely, if it is more than 40% by weight, it will be difficult to obtain a dense sintered body.
無i1M維の役割は、粉末の担体となるばかりでなく、
その他に、それ自体が焼結−した低膨張基板の構成要素
のひとつとなることである。すなわち、無機繊維が焼結
物中に繊維のままあるいは一部溶解した形で残り、緻密
な基体の作成に寄与する。The role of the i1M fiber is not only to serve as a carrier for the powder, but also to serve as a carrier for the powder.
In addition, it is itself a component of a sintered low expansion substrate. That is, the inorganic fibers remain in the sintered product as fibers or in a partially dissolved form, contributing to the creation of a dense substrate.
これに対し、木材パルプなどの有機繊維はグリーンシー
トの可塑性を向上させ、3柵〜5輔と抄紙性によるシー
トとしては比較的厚いシートを得る為に添加される。有
機繊維は無機繊維と比較して可塑性に優れており、また
焼結性無機粉末の担持力にも優れているため、生シート
のひび割れを防ぎ、3mm〜5胴厚の生シートを得るこ
とができる。ただ有機繊維を添加する隙に注意しなけれ
ばならないのはその添加量である。即ち、有機繊維は焼
成途上で焼失してしまい、繊維の存在していたところが
空隙となってしまうため緻密な焼結体となりにくい。On the other hand, organic fibers such as wood pulp are added to improve the plasticity of the green sheet and to obtain a sheet that is relatively thick in terms of papermaking properties. Organic fibers have superior plasticity compared to inorganic fibers, and also have superior ability to support sinterable inorganic powder, so they can prevent cracks in raw sheets and produce raw sheets with a body thickness of 3 mm to 5 mm. can. However, when adding organic fibers, one must be careful about the amount of organic fibers added. That is, the organic fibers are burned away during firing, leaving voids where the fibers were, making it difficult to form a dense sintered body.
従って焼結体中に気孔を残さないよう、有機繊維の添加
量は原料粉末に対して0.2〜5重量部、好ましくは1
〜2重量部の範囲になくてはならない。Therefore, in order to avoid leaving pores in the sintered body, the amount of organic fiber added is 0.2 to 5 parts by weight, preferably 1 part by weight, based on the raw material powder.
-2 parts by weight.
さらに言えば、無機繊維のほかに粘土、長石、タルク、
カオリン等の添加物が焼成温度付近で液相を生成し、比
較的低温度かつ広範囲(1300〜1400 ’C)で
基板の焼結を促進するのである。Furthermore, in addition to inorganic fibers, clay, feldspar, talc,
Additives such as kaolin form a liquid phase near the firing temperature and promote sintering of the substrate at relatively low temperatures and over a wide range (1300-1400'C).
すなわち、本発明では、従来困難であったコージェライ
トの水系での成型及び焼結を容易にし、しかも溶剤系を
用いた場合と比較し、はるかに簡単なプロセスで緻密な
低膨張基板を得るものである。In other words, the present invention facilitates molding and sintering of cordierite in an aqueous system, which has been difficult in the past, and provides a dense, low-expansion substrate with a much simpler process than when using a solvent system. It is.
以下、本発明を具体的な実施例に基いて説明する。なお
、組成は全て重量比である。The present invention will be explained below based on specific examples. In addition, all compositions are weight ratios.
〈実施例1〉
FAI試料の調整
(B)凝集剤
二凝集剤0.2%水溶液 120部
まず、パルパー(解繊機)にアルミナファイバー2.5
部、木材パルプ0.5部と適当量の水を加え、30〜6
0分間繊維の解繊を行なう。これに予め粉砕・混合して
おいたコージェライト27.5部、原蛙目粘土10.0
部、タルク1o部、水50部の原料スラリーを加える。<Example 1> Preparation of FAI sample (B) Flocculant 120 parts of 0.2% aqueous solution of di-flocculant First, 2.5 parts of alumina fiber was placed in a pulper (defibration machine).
30 to 6 parts, add 0.5 parts of wood pulp and an appropriate amount of water.
The fibers are defibrated for 0 minutes. 27.5 parts of cordierite, which was crushed and mixed in advance with this, and 10.0 parts of raw frog's eye clay.
1 part of talc, and 50 parts of water are added to the raw material slurry.
原料スラリーを加えた後、適当量の水をさらに加え、固
形分濃度が3〜10%であるような水性スラリーを作る
。After adding the raw material slurry, an appropriate amount of water is further added to prepare an aqueous slurry having a solid content concentration of 3 to 10%.
この水性スラリーに予め作っておいた硫酸バンド水溶液
を加えて撹拌し、溶液のpHを2〜6、望ましくは3〜
4に調整したのち、ここへ、これもあらかじめ作ってお
いたポリアクリルアミド系高分子凝集剤の水溶液120
部を加えて凝集させる。このようにして凝集した試料を
抄紙機にて抄紙し、1.5〜3am厚のシートを作る。A pre-prepared sulfuric acid band aqueous solution is added to this aqueous slurry and stirred to adjust the pH of the solution to 2-6, preferably 3-6.
After adjusting to 4, add the aqueous solution of polyacrylamide polymer flocculant, which was also prepared in advance,
Add 100% to 100% and flocculate. The thus aggregated sample is made into paper using a paper machine to form a sheet having a thickness of 1.5 to 3 am.
適当な形状に加工したものを電気炉に入れ、酸化雰囲気
中にて1380°c1時間焼成し、セラミックスの焼結
を行わせる。The material processed into an appropriate shape is placed in an electric furnace and fired at 1380°C for 1 hour in an oxidizing atmosphere to sinter the ceramic.
このようにして得られたセラミックス平反について熱膨
張係数を調べると、23 x 10−7(1/’c)で
気孔率0.2%、曲げ強度800kg/cIaとなった
。When the thermal expansion coefficient of the thus obtained ceramic sheet was examined, it was found to be 23 x 10-7 (1/'c), porosity 0.2%, and bending strength 800 kg/cIa.
〈実施例2〉
(A)試料の調整
(B)凝集剤
以上のような組成(A)、(B)を用いて、以上は実施
例1と同様にして、1350°c4時間焼成すると、低
膨張基板ができた。この際の熱膨張係数は18 x 1
0−’ (1/℃)であり、気孔率0.3%、曲げ強度
800 kg / crAであった。<Example 2> (A) Preparation of sample (B) Flocculant Using the above compositions (A) and (B) in the same manner as in Example 1, baking at 1350°C for 4 hours resulted in a low The expansion board is ready. The thermal expansion coefficient at this time is 18 x 1
0-' (1/°C), porosity was 0.3%, and bending strength was 800 kg/crA.
〈発明の効果〉
本発明ムこよれば、長石、カオリン、タルク、蛙目粘土
、さらにはアスベスト、アルミナファイバー、麻等の添
加により、難焼結性のコージェライトをその気孔率1%
以下と、緻密化を容易に行うことができ、熱膨張率も2
5xlO−’(1/’C)以下と低(することができる
。<Effects of the Invention> According to the present invention, the porosity of cordierite, which is difficult to sinter, is reduced to 1% by adding feldspar, kaolin, talc, frog's eye clay, asbestos, alumina fiber, hemp, etc.
With the following, densification can be easily performed, and the coefficient of thermal expansion is 2.
It can be as low as 5xlO-'(1/'C) or less.
しかも、本発明では焼成用シートの成形に繊維質を用い
た抄造技術を用いているので、薄型で、加工性が良くて
任意の形状に成型でき、軽量で、強度があり、熱衝撃に
強いという長所を持つ、セラミックス基板となる。Moreover, since the present invention uses paper-making technology using fibers to form the sheet for firing, it is thin, has good workability, can be formed into any shape, is lightweight, strong, and resistant to thermal shock. It is a ceramic substrate with the following advantages.
また、従来に比べて、工程が簡単で、焼成温度も低いた
めに、省エネに役立ち、安価に供給できることが特徴で
ある。In addition, compared to conventional methods, the process is simpler and the firing temperature is lower, so it is useful for energy saving and can be supplied at low cost.
このようにして得られた熱衝撃に優れた低膨張基板は、
面状ヒータ用基板、家庭用の耐熱板、バーベキュー用板
、あるいは医療、食品、化学等の産業用の分野で、耐熱
性基板として使用するのに適している。The low expansion substrate with excellent thermal shock resistance obtained in this way is
It is suitable for use as a heat-resistant substrate in planar heater substrates, household heat-resistant plates, barbecue plates, and industrial fields such as medical, food, and chemical fields.
Claims (2)
タルク、カオリン等の窯業原料を5〜35重量%の割合
で添加し、これに3〜40重量部の無機繊維、及び0.
2〜5重量%の有機繊維を混合して水性スラリーとし、
凝集、抄造することで上記原料粉末と窯業原料と無機繊
維と有機繊維とからなるシート状物を得、該シート状物
を1300〜1400℃で焼成することを特徴とする緻
密で低熱膨張率の基板の製造方法。(1) Clay, feldspar,
Ceramic raw materials such as talc and kaolin are added in a proportion of 5 to 35% by weight, and to this is added 3 to 40 parts by weight of inorganic fibers and 0.5% by weight.
2 to 5% by weight of organic fibers are mixed to form an aqueous slurry,
By agglomerating and paper-making, a sheet-like material made of the above-mentioned raw material powder, ceramic raw materials, inorganic fibers, and organic fibers is obtained, and the sheet-like material is fired at 1300 to 1400°C. Substrate manufacturing method.
ある特許請求範囲第1項記載の緻密で低熱膨張率の基板
の製造方法。(2) The method for producing a dense substrate with a low coefficient of thermal expansion according to claim 1, wherein the thickness of the obtained unfired sheet is 1 to 5 mm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62101379A JPS63265857A (en) | 1987-04-24 | 1987-04-24 | Production of low expansion substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62101379A JPS63265857A (en) | 1987-04-24 | 1987-04-24 | Production of low expansion substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63265857A true JPS63265857A (en) | 1988-11-02 |
Family
ID=14299156
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62101379A Pending JPS63265857A (en) | 1987-04-24 | 1987-04-24 | Production of low expansion substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63265857A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02212358A (en) * | 1989-02-14 | 1990-08-23 | Asuku:Kk | Low expansion refractory board |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56150506A (en) * | 1980-04-23 | 1981-11-21 | Toppan Printing Co Ltd | Manufacture of ceramic |
JPS6183675A (en) * | 1984-09-28 | 1986-04-28 | 凸版印刷株式会社 | Manufacture of low expansion substrate |
-
1987
- 1987-04-24 JP JP62101379A patent/JPS63265857A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56150506A (en) * | 1980-04-23 | 1981-11-21 | Toppan Printing Co Ltd | Manufacture of ceramic |
JPS6183675A (en) * | 1984-09-28 | 1986-04-28 | 凸版印刷株式会社 | Manufacture of low expansion substrate |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02212358A (en) * | 1989-02-14 | 1990-08-23 | Asuku:Kk | Low expansion refractory board |
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