JPS63303855A - Production of low-expansion substrate - Google Patents

Production of low-expansion substrate

Info

Publication number
JPS63303855A
JPS63303855A JP62137938A JP13793887A JPS63303855A JP S63303855 A JPS63303855 A JP S63303855A JP 62137938 A JP62137938 A JP 62137938A JP 13793887 A JP13793887 A JP 13793887A JP S63303855 A JPS63303855 A JP S63303855A
Authority
JP
Japan
Prior art keywords
parts
ceramic
low
raw material
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62137938A
Other languages
Japanese (ja)
Inventor
Satoshi Hatta
聡 八田
Ichiro Yazawa
一郎 矢沢
Goro Saito
悟朗 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP62137938A priority Critical patent/JPS63303855A/en
Publication of JPS63303855A publication Critical patent/JPS63303855A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain the title dense and low-expansion substrate having a smooth surface by forming a green sheet from an aq. slurry obtained by mixing a ceramic material and fibers into the powder of a low-expansion material, further coating a slurry obtained by adding the ceramic material to the raw powder, and calcining the obtained material. CONSTITUTION:The ceramic material such as clay, feldspar, talc, and kaolin is added at the rate of 5-35pts.wt. to the raw powder of the low-expansion material having a cordierite composition, and 3-40 parts of the inorg. fiber of asbestos, alumina, etc., and 0.2-5 parts of the org. fiber of wood pulp are further incorporated. An aq. slurry is obtained from the above-mentioned mixture, flocculated, and formed into a ceramic green sheet. A raw slurry obtained by adding 5-35 parts ceramic material to the raw powder having a cordierite composition is coated on one side of the sheet material. The ceramic green sheet is calcined at 1,300-1,400 deg.C. As a result, a low-expansion substrate highly resistant to thermal shock can be obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は緻密で表面の平滑な低膨張率の基板の製造方法
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a substrate with a dense, smooth surface and a low coefficient of expansion.

〔従来技術およびその問題点〕[Prior art and its problems]

従来、コージェライトは熱膨張係数の小さなセラミック
スとして知られておシ、面状発熱体の基板などに利用さ
れている。
Conventionally, cordierite is known as a ceramic with a small coefficient of thermal expansion, and has been used for substrates of planar heating elements.

しかしながら、コージェライトはその焼結温度範囲が狭
く、通常の手段では単体での焼結は困難であり、その気
孔率も1.0%以下のものは得られない。そのため、ジ
ルコン等適当な焼成助剤の添加が行われるが、この場合
でも、焼結温度範囲も50℃程度と狭く、又原料コスト
が高くなるという難点がある。
However, since cordierite has a narrow sintering temperature range, it is difficult to sinter it as a single body using normal means, and a porosity of less than 1.0% cannot be obtained. Therefore, a suitable sintering aid such as zircon is added, but even in this case, the sintering temperature range is narrow at about 50° C., and the cost of raw materials is high.

さらに、このような未焼成のシート状物を成形する場合
、プレス成形、ドクターブレード法などの方法が用いら
れるが、前者の場合は少なくとも700匁以上のプレス
圧を必要とし、量産には不向きである。又、後者に於て
は有機バインダー及び溶剤等を使用するため作業環境上
の問題あるいはシート焼成の際の脱バインダ一工程が非
常に複雑かつ困難であるという欠点があった。
Furthermore, when forming such an unfired sheet-like product, methods such as press molding and doctor blade method are used, but the former requires a press pressure of at least 700 momme or more and is not suitable for mass production. be. In addition, the latter method uses an organic binder, a solvent, etc., and therefore has problems in the working environment, and has the disadvantage that the binder removal step during sheet firing is extremely complicated and difficult.

以上のような欠点を除去し、緻密な低膨張基板を製造す
る方法として、本発明者らは、無機繊維と有機繊維を用
いた抄紙法により未焼成シート状物を造る方法を出願し
ている。即ちコージェライト組成の原料粉末に、粘土、
長石、タルク、カオリン等の窯業原料を5〜35重量部
の割合で添加し、これにアスベスト、アルミナ等の無機
繊維、及び木材パルプ、麻等の有機繊維を混合して水性
スラリーとなし、凝集、抄造することで上記原料粉末と
窯業原料と無機繊維、及び有機繊維とから成るシート状
物を製造する方法である。
In order to eliminate the above-mentioned drawbacks and produce a dense, low-expansion substrate, the present inventors have filed an application for a method of producing an unfired sheet-like material by a papermaking method using inorganic fibers and organic fibers. . That is, raw material powder of cordierite composition, clay,
Ceramic raw materials such as feldspar, talc, and kaolin are added at a ratio of 5 to 35 parts by weight, and inorganic fibers such as asbestos and alumina, and organic fibers such as wood pulp and hemp are mixed with this to form an aqueous slurry and agglomerated. This is a method for producing a sheet-like product made of the raw material powder, ceramic raw material, inorganic fiber, and organic fiber by papermaking.

この方法によって、繊維質として無機繊維を単独で用い
た場合よりも、抄造した未焼成シートの可塑性が増し、
シートのひび割れも生じ難い為、厚みが21以上のシー
トの抄造も可能である。
By this method, the plasticity of the unfired sheet produced is increased compared to when inorganic fibers are used alone as the fibers,
Since the sheet is less likely to crack, it is also possible to manufacture sheets with a thickness of 21 mm or more.

しかし々がら、繊維質を用いる為、抄造したシート状物
の表面を平滑にすることが困難であるといった問題がな
いでもなかった。
However, since fibrous materials are used, there are problems in that it is difficult to smooth the surface of the paper-formed sheet.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

本発明では、前記の様な欠点を除去し、緻密で表面の平
滑な、熱膨張係数が小さく、低価格で作れるセラミック
ス基板の製造方法を提供するものである。
The present invention eliminates the above-mentioned drawbacks and provides a method for manufacturing a ceramic substrate that is dense, has a smooth surface, has a small coefficient of thermal expansion, and can be manufactured at low cost.

〔問題点を解決するための手段〕[Means for solving problems]

本発明では、低膨張材料であるコージェライト組成の原
料粉末に、粘土、長石、タルク、カオリン等の窯業原料
を5〜35重量部の割合で添加し、これに3〜40重量
部のアスベスト、アルミナ等の無機繊維、及び0.2〜
5重量部の木材パルプ等の有機繊維を混合して水性スラ
リーとし、凝集、抄造する事で上記原料粉末と窯業原料
と無機繊維および有機繊維からなるセラミックグリーン
シート料を5〜35重量部の割合で添加した原料スラリ
ー゛を塗布する。
In the present invention, ceramic raw materials such as clay, feldspar, talc, and kaolin are added in a ratio of 5 to 35 parts by weight to a raw material powder having a cordierite composition, which is a low expansion material, and to this, asbestos in an amount of 3 to 40 parts by weight, Inorganic fibers such as alumina, and 0.2~
By mixing 5 parts by weight of organic fibers such as wood pulp to form an aqueous slurry, agglomerating and papermaking, a ceramic green sheet material consisting of the above raw material powder, ceramic raw material, inorganic fibers, and organic fibers is produced in a ratio of 5 to 35 parts by weight. Apply the raw material slurry added in step.

こうすることにより、従来、20〜30℃と非常に狭い
範囲でしか焼結させ得なかったコージェライト系材料を
、1300〜1400℃の広い焼成温度範囲で緻密化し
、更に表面性を向上させる方法を提供するものである。
By doing this, cordierite materials, which could conventionally be sintered only in a very narrow range of 20 to 30 degrees Celsius, can be sintered in a wide firing temperature range of 1300 to 1400 degrees Celsius, and the surface properties can be further improved. It provides:

原料スラリーは、セラミックグリーンシートの片面表面
上において、均一に塗布されることが好ましく、例えば
、ドクターブレード法、スプレー法、印刷法等によって
、塗布されることが望ましい。
The raw material slurry is preferably applied uniformly onto one surface of the ceramic green sheet, for example, preferably by a doctor blade method, a spray method, a printing method, or the like.

セラミックグリーンシートの抄造につき、具体的に説明
すると、粘土、長石、タルク、カオリン等の窯業原料は
、抄紙法により得られる水系のセラミックグリーンシー
トの可塑性を向上させ、さらには原料コージェライトの
焼結を促進させる目的で5〜35重量部添加する。この
際に、窯業原料の添加量が5重量%以下であると抄造に
よって得られるグリーンシートの可塑性が乏しく、ハン
ドリングが困難であり、逆に35重量部以上添加すると
、その組成がコージェライト組成から大きく外れ、焼結
体が低い熱膨張率となら々い。
To explain specifically about the papermaking of ceramic green sheets, ceramic raw materials such as clay, feldspar, talc, and kaolin improve the plasticity of the water-based ceramic green sheets obtained by the papermaking method, and also improve the sintering of the raw material cordierite. It is added in an amount of 5 to 35 parts by weight for the purpose of promoting. At this time, if the amount of ceramic raw materials added is less than 5% by weight, the green sheet obtained by papermaking will have poor plasticity and will be difficult to handle.On the other hand, if more than 35 parts by weight is added, the composition will change from the cordierite composition. The difference is large, and the sintered body has a low coefficient of thermal expansion.

尚、ここでいう抄紙法とは、粘土、長石、陶石、メルク
、カオリン等の一般窯業材料の粉末に対して木材パルプ
などの有機繊維及びアスベスト等の無機繊維、又はアス
ベスト等の無機繊維を2〜40重量部添加した水性スラ
リーを作成し凝集剤を添加することにより前記固形分を
繊維に吸着させ、該凝集体を均一の厚みになるよう濾過
板もしくは網上に流し、しかる後自然濾過ないし減圧濾
過衣どの方法によシ濾過を行ないシート状物を得る方法
である。
The paper-making method used here refers to the process of adding organic fibers such as wood pulp and inorganic fibers such as asbestos to powders of general ceramic materials such as clay, feldspar, pottery stone, melk, and kaolin. An aqueous slurry containing 2 to 40 parts by weight is prepared, and a flocculant is added to adsorb the solid content onto the fibers, and the aggregate is poured onto a filter plate or net so as to have a uniform thickness, and then subjected to natural filtration. This is a method of obtaining a sheet-like material by performing filtration using a vacuum filtration cloth or a vacuum filtration cloth.

第1図に、本発明の製造方法により得られた低膨張基板
の実施例を示す。図において、コージェライト低膨張基
板(1)の片面には、焼結したコージェライト層(2)
が積層され、緻密で表面の平滑な基板と々っている。
FIG. 1 shows an example of a low expansion substrate obtained by the manufacturing method of the present invention. In the figure, one side of the cordierite low expansion substrate (1) has a sintered cordierite layer (2).
are laminated to form a dense, smooth substrate.

〔作用〕[Effect]

本発明では、上記抄紙法を用いることによって、アルミ
ナファイバー等のセラミックスフティパー、アスベスト
等の無機繊維が、粒体を保持する担体として作用し、文
字通り紙における繊維の役割を果たす。さらに言えば、
水性スラリーを造る段階で、充分に攪拌することで、原
料粉末、窯業原料、無機繊維は、均質に混ざり合うから
、抄造されたセラミックグリーンシートは焼結するのに
好ましい均質な状態となっているものである。
In the present invention, by using the paper-making method described above, ceramic fibers such as alumina fibers and inorganic fibers such as asbestos act as carriers that hold particles, literally playing the role of fibers in paper. Furthermore,
By thoroughly stirring the aqueous slurry at the stage of making it, the raw material powder, ceramic raw materials, and inorganic fibers are homogeneously mixed, so the paper-made ceramic green sheets are in a homogeneous state that is suitable for sintering. It is something.

無機繊維の添加量は原料粉体に対し3重量部より小であ
ると抄紙法によるシート成形が困難となり、逆に40重
量部よυ大であると微密な焼結体が得られにくい。
If the amount of inorganic fiber added is less than 3 parts by weight based on the raw material powder, it will be difficult to form a sheet by the papermaking method, and conversely, if it is more than 40 parts by weight, it will be difficult to obtain a finely dense sintered body.

無機繊維の役割は、粉末の担体となるばかりでなく、そ
の他に、それ自体が焼結した低膨張基板の構成要素のひ
とつとなることである。すなわち、無機繊維が焼結物中
に繊維のまま、あるいは、一部溶解した形で残り、緻密
な基板の作成に寄与すこれに対し、木材パルプなどの有
機繊維は、グリーンシートの可塑性を向上させ、3 +
u〜5 TjlNと抄紙法によるシートとしては比較的
厚いシートを得る為に添加される。有機繊維は無機繊維
と比較して可塑性に優れており、また焼結性無機粉末の
担持力にも浸れているため、グリーンシートのひび割れ
を防ぎ、31〜511部厚のグリーンシートを得ること
ができる。ただ有機線維を添加する際に注意しなければ
ならないのは、その添加量である。
The role of the inorganic fiber is not only to serve as a carrier for the powder, but also to serve as one of the constituent elements of the sintered low-expansion substrate. In other words, inorganic fibers remain in the sintered product either as fibers or in partially dissolved form, contributing to the creation of a dense substrate.On the other hand, organic fibers such as wood pulp improve the plasticity of the green sheet. let me, 3 +
u~5 Added in order to obtain a relatively thick sheet by TjlN and paper making method. Organic fibers have superior plasticity compared to inorganic fibers, and also have the supporting power of sinterable inorganic powder, which prevents cracks in green sheets and makes it possible to obtain green sheets with a thickness of 31 to 511 parts. can. However, when adding organic fibers, one must be careful about the amount of addition.

即ち、有機繊維は焼成途上で焼失してしまい、繊維の存
在していたところが空隙と々ってしまうため緻密で表面
状態の良好な焼結体となりにくい。
That is, the organic fibers are burned away during the firing process, and the spaces where the fibers were present are destroyed, making it difficult to form a sintered body that is dense and has a good surface condition.

従って焼結体中に気孔を残さ々いよう、有機繊維の添加
量は原料粉末に対して0.2〜5重量部、好ましくは1
〜2重量部の範囲になくてはならない。
Therefore, in order to leave no pores in the sintered body, the amount of organic fiber added is 0.2 to 5 parts by weight, preferably 1 part by weight, based on the raw material powder.
-2 parts by weight.

グリーンシート表面に塗布されたコージェライト原料粉
末に窯業原料を添加した原料スラリーは、粘土、長石、
タルク、カオリン等の添加物が焼成温度付近で′液相を
生成して表面を被い、また繊維質を含まない為に、比較
的低温度かつ広範囲(’1300〜1400℃)で、よ
り緻密で、繊維質に影響されない、表面状態の良好な基
板の焼結を促進するのである。
The raw material slurry is made by adding ceramic raw materials to the cordierite raw material powder applied to the surface of the green sheet.
Additives such as talc and kaolin form a liquid phase near the firing temperature and cover the surface, and because they do not contain fibers, they can be used at relatively low temperatures and over a wide range (1300 to 1400℃) to create a more dense structure. This promotes sintering of a substrate with a good surface condition that is not affected by fiber quality.

す彦わち、本発明では、従来困難であったコージェライ
トの水系での成型及び焼結を容易にし、しかも溶剤系を
用いた場合と比較し、はるかに簡単なプロセスで緻密で
表面が平滑な低膨張基板を得るものである。
In other words, the present invention makes it easier to mold and sinter cordierite in an aqueous system, which has been difficult in the past, and also creates a dense and smooth surface with a much simpler process than when using a solvent system. This provides a low expansion substrate.

〔実施例〕〔Example〕

以下に、本発明の実施例を述べる。なお、組成は全て重
量比である。
Examples of the present invention will be described below. In addition, all compositions are weight ratios.

〈実施例1〉 (A)試料の調整 「′−′“う′f)          27.5部属
蛙目粘土           10,0部] アルミ
ナファイバー        2.5部木材バルブ  
          0.5部(B)凝集剤 まず、パルバー(解繊機)にアルミナラティバー2.5
部、木材パルプ0.5部と適当量の水を加え、30〜6
0分間繊維の解繊を行彦う。
<Example 1> (A) Preparation of sample "'-'"u'f) 27.5 parts Frog's eye clay 10.0 parts] Alumina fiber 2.5 parts Wood bulb
0.5 parts (B) flocculant First, add 2.5 parts of alumina lativar to the pulper (defibration machine).
30 to 6 parts, add 0.5 parts of wood pulp and an appropriate amount of water.
The fibers are defibrated for 0 minutes.

これに予め粉砕・混合しておいたコージェライト27.
5部、原蛙目粘土10.0部、タルク10部、水50部
の原料スラリーを加える。原料スラリーを加えた後、適
当量の水をさらに加え、固形分濃度が3〜10%である
ような水性スラリーを作る。
Cordierite 27.
Add a raw material slurry of 5 parts of clay, 10.0 parts of clay, 10 parts of talc, and 50 parts of water. After adding the raw material slurry, an appropriate amount of water is further added to prepare an aqueous slurry having a solid content concentration of 3 to 10%.

この水性スラリーに予め作っておいた硫酸バンド水溶液
を加えて攪拌し、溶液の声を2〜6、望ましくは3〜4
に調整した後、ここへ、これも予め作っておいたポリア
クリルアミド系高分子凝集剤の水溶液120部を加えて
凝集させる。このようにして凝集した試料を抄紙機にて
抄紙し、1.5〜3 mm厚のシートを作る。
Add the pre-prepared sulfuric acid band aqueous solution to this aqueous slurry and stir.
After this, 120 parts of an aqueous solution of a polyacrylamide polymer flocculant, which had also been prepared in advance, was added thereto for flocculation. The thus aggregated sample is made into paper using a paper machine to form a sheet with a thickness of 1.5 to 3 mm.

適当な形状に加工した後、予め作っておいた上記配分の
原料スラリーをシート片面表面に均一に塗布したものを
電気炉に入れ、酸化雰囲気中にて1380℃1時間焼成
し、セラミックスの焼結を行わせる。
After processing into an appropriate shape, the raw material slurry prepared in advance with the above distribution was uniformly applied to one side of the sheet, and the sheet was placed in an electric furnace and fired at 1380°C for 1 hour in an oxidizing atmosphere to sinter the ceramics. have them do it.

このようにして得られたセラミックス板について熱膨張
係数を調べると、23 X 10 ’(1/’C)で気
孔率02%、曲げ強度8005Aであり、又、原料スラ
リーの塗布面はRa値1〜2潮 と平滑々表面と々る。
When examining the thermal expansion coefficient of the ceramic plate thus obtained, it was found that it was 23 x 10'(1/'C), the porosity was 02%, and the bending strength was 8005A, and the surface to which the raw material slurry was applied had an Ra value of 1. ~2 tides and smooth surface.

〈実施例2〉 (5)試料の調整 (I3)凝集剤 以上のような組成(5)、(B)を用いて、以上は実施
例1と同様にして、1350℃4時間焼成すると、低膨
張基板ができた。この際の熱膨張係数は、18 X 1
O−7(1/℃)であり、気孔率0.2%、曲げ強度8
00 Jであり、又、原料スラリーの塗布面はRa値1
〜21vnと平滑な表面となる。
<Example 2> (5) Preparation of sample (I3) Flocculant Using the above compositions (5) and (B) and in the same manner as in Example 1, when calcined at 1350°C for 4 hours, a low The expansion board is ready. The thermal expansion coefficient at this time is 18 x 1
O-7 (1/℃), porosity 0.2%, bending strength 8
00 J, and the surface to which the raw material slurry was applied had an Ra value of 1.
~21vn and a smooth surface.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、長石、カオリン、タルク、蛙目粘土、
さらにはアスベスト、アルミナファイバー、麻等の添加
により、難焼結性のコージェライトをその気孔率1%以
下と、緻密化を容易に行うことができ、熱膨張率も25
 X 10 ” (1−/’C)以下と低くすることが
できる。
According to the present invention, feldspar, kaolin, talc, frog's eye clay,
Furthermore, by adding asbestos, alumina fiber, hemp, etc., it is possible to easily densify cordierite, which is difficult to sinter, with a porosity of 1% or less, and a thermal expansion coefficient of 25.
It can be as low as X 10 ''(1-/'C) or less.

しかも、本発明では焼成用シートの成形に繊維質を用い
た抄造技術を用い、また、繊維質を含まない層を表面に
作ることによシ、薄型で、加工性が良くて任意の形状に
成型でき、軽量で、強度がち力、熱衝撃に強く、表面性
が良好であるという長所を持つセラミックス基板となる
Moreover, in the present invention, the sheet for firing is formed using a paper-making technology using fibers, and by creating a layer that does not contain fibers on the surface, the sheet is thin, has good processability, and can be formed into any shape. The ceramic substrate has the advantages of being moldable, lightweight, strong and resistant to thermal shock, and having good surface properties.

また、従来に比べて、工程が簡単で、焼成温度も低いた
めに、省エネに役立ち、安価に供給できることが特徴で
ある。
In addition, compared to conventional methods, the process is simpler and the firing temperature is lower, so it is useful for energy saving and can be supplied at low cost.

このようにして得られた熱衝撃に優れた低膨張基板は、
面状ヒーター用基板、家庭用の耐熱板、バーベキュー用
板、あるいは医療、食品、化学等の産業用の分野で、耐
熱性基板として使用するのに適している。
The low expansion substrate with excellent thermal shock resistance obtained in this way is
It is suitable for use as a heat-resistant substrate for planar heaters, household heat-resistant plates, barbecue plates, and industrial fields such as medical, food, and chemical fields.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の実施例を示すものであって、第1図はコ
ージェライト層を有した低膨張基板を示す断面図である
。 (1)  コージェライト低膨張基板 (2)  コージェライト層
The drawings show an embodiment of the present invention, and FIG. 1 is a sectional view showing a low expansion substrate having a cordierite layer. (1) Cordierite low expansion substrate (2) Cordierite layer

Claims (1)

【特許請求の範囲】[Claims] 1)コージェライト組成の原料粉末に、粘土、長石、タ
ルク、カオリン等の窯業原料を5〜35重量部の割合で
添加し、これに3〜40重量部の無機繊維、及び0.2
〜5重量部の有機繊維を混合して水性スラリーとし、凝
集、抄造することで上記原料粉末と窯業原料と無機繊維
と有機繊維とからなるセラミックグリーンシートを得、
このシート状物の片面に上記コージェライト組成の原料
粉末に窯業原料を5〜35重量%の割合で添加した原料
スラリーを塗布し、該セラミックグリーンシートを13
00〜1400℃で焼成することを特徴とする緻密で、
表面性の良好な低膨張率の基板の製造方法。
1) Add ceramic raw materials such as clay, feldspar, talc, and kaolin at a ratio of 5 to 35 parts by weight to a raw material powder having a cordierite composition, and add 3 to 40 parts by weight of inorganic fibers and 0.2 parts by weight.
~5 parts by weight of organic fibers are mixed to form an aqueous slurry, followed by aggregation and papermaking to obtain a ceramic green sheet consisting of the raw material powder, ceramic raw materials, inorganic fibers, and organic fibers,
A raw material slurry prepared by adding a ceramic raw material to the raw material powder having the above cordierite composition at a ratio of 5 to 35% by weight is applied to one side of this sheet-like material, and the ceramic green sheet is
Dense, characterized by being fired at 00~1400℃,
A method for producing a low expansion coefficient substrate with good surface properties.
JP62137938A 1987-06-01 1987-06-01 Production of low-expansion substrate Pending JPS63303855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62137938A JPS63303855A (en) 1987-06-01 1987-06-01 Production of low-expansion substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62137938A JPS63303855A (en) 1987-06-01 1987-06-01 Production of low-expansion substrate

Publications (1)

Publication Number Publication Date
JPS63303855A true JPS63303855A (en) 1988-12-12

Family

ID=15210210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62137938A Pending JPS63303855A (en) 1987-06-01 1987-06-01 Production of low-expansion substrate

Country Status (1)

Country Link
JP (1) JPS63303855A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03295845A (en) * 1990-04-10 1991-12-26 Nozawa Corp Manufacture of green ceramic sheet
FR2711364A1 (en) * 1993-10-18 1995-04-28 Itech System Sinterable ceramic powder of the cordierite type, ceramic obtained by sintering this powder and heater element including this ceramic
CN109836130A (en) * 2019-03-01 2019-06-04 姚晓东 A kind of preparation method of safe high thermal conductivity floor heating material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03295845A (en) * 1990-04-10 1991-12-26 Nozawa Corp Manufacture of green ceramic sheet
FR2711364A1 (en) * 1993-10-18 1995-04-28 Itech System Sinterable ceramic powder of the cordierite type, ceramic obtained by sintering this powder and heater element including this ceramic
CN109836130A (en) * 2019-03-01 2019-06-04 姚晓东 A kind of preparation method of safe high thermal conductivity floor heating material

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