JPS6326346A - ＴｉＮ被覆加工物とその製造方法及び装置 - Google Patents
ＴｉＮ被覆加工物とその製造方法及び装置Info
- Publication number
- JPS6326346A JPS6326346A JP16918386A JP16918386A JPS6326346A JP S6326346 A JPS6326346 A JP S6326346A JP 16918386 A JP16918386 A JP 16918386A JP 16918386 A JP16918386 A JP 16918386A JP S6326346 A JPS6326346 A JP S6326346A
- Authority
- JP
- Japan
- Prior art keywords
- work
- tin
- workpiece
- layer
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 61
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 238000001704 evaporation Methods 0.000 claims abstract description 35
- 239000010410 layer Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 19
- 239000002131 composite material Substances 0.000 claims abstract description 7
- 239000011247 coating layer Substances 0.000 claims abstract description 6
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 239000000155 melt Substances 0.000 claims abstract 2
- 230000008020 evaporation Effects 0.000 claims description 19
- 238000000576 coating method Methods 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 abstract description 15
- 238000007740 vapor deposition Methods 0.000 abstract description 7
- 238000005520 cutting process Methods 0.000 abstract description 6
- 239000002994 raw material Substances 0.000 abstract description 6
- 238000010891 electric arc Methods 0.000 abstract description 5
- 229910004356 Ti Raw Inorganic materials 0.000 abstract description 4
- 238000004140 cleaning Methods 0.000 abstract description 3
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 239000010936 titanium Substances 0.000 description 29
- 239000007789 gas Substances 0.000 description 18
- 238000001816 cooling Methods 0.000 description 8
- 238000005240 physical vapour deposition Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 229910000997 High-speed steel Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000635 electron micrograph Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000000112 cooling gas Substances 0.000 description 2
- 239000010730 cutting oil Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005496 tempering Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- -1 titanium carbides Chemical class 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16918386A JPS6326346A (ja) | 1986-07-18 | 1986-07-18 | ＴｉＮ被覆加工物とその製造方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16918386A JPS6326346A (ja) | 1986-07-18 | 1986-07-18 | ＴｉＮ被覆加工物とその製造方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6326346A true JPS6326346A (ja) | 1988-02-03 |
| JPH0424424B2 JPH0424424B2 (enExample) | 1992-04-27 |
Family
ID=15881777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16918386A Granted JPS6326346A (ja) | 1986-07-18 | 1986-07-18 | ＴｉＮ被覆加工物とその製造方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6326346A (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4919968A (en) * | 1987-03-06 | 1990-04-24 | Balzers Aktiengesellschaft | Method and apparatus for vacuum vapor deposition |
| JPH02243757A (ja) * | 1989-03-16 | 1990-09-27 | Sumitomo Metal Mining Co Ltd | ステンレス合金被膜の形成方法 |
| US5704994A (en) * | 1994-10-27 | 1998-01-06 | Honda Giken Kogyo Kabushiki Kaisha | Method of case-hardening shaped object |
| US5730847A (en) * | 1993-03-15 | 1998-03-24 | Kabushiki Kaisha Kobeseikosho | Arc ion plating device and arc ion plating system |
| JPH11217141A (ja) * | 1998-02-03 | 1999-08-10 | Fuji Photo Film Co Ltd | 写真感光材料搬送用ガイドレール及びその製造方法 |
| US5945167A (en) * | 1994-10-27 | 1999-08-31 | Honda Giken Kogyo Kabushiki Kaisha | Method of manufacturing composite material |
-
1986
- 1986-07-18 JP JP16918386A patent/JPS6326346A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4919968A (en) * | 1987-03-06 | 1990-04-24 | Balzers Aktiengesellschaft | Method and apparatus for vacuum vapor deposition |
| JPH02243757A (ja) * | 1989-03-16 | 1990-09-27 | Sumitomo Metal Mining Co Ltd | ステンレス合金被膜の形成方法 |
| US5730847A (en) * | 1993-03-15 | 1998-03-24 | Kabushiki Kaisha Kobeseikosho | Arc ion plating device and arc ion plating system |
| US5704994A (en) * | 1994-10-27 | 1998-01-06 | Honda Giken Kogyo Kabushiki Kaisha | Method of case-hardening shaped object |
| US5945167A (en) * | 1994-10-27 | 1999-08-31 | Honda Giken Kogyo Kabushiki Kaisha | Method of manufacturing composite material |
| JPH11217141A (ja) * | 1998-02-03 | 1999-08-10 | Fuji Photo Film Co Ltd | 写真感光材料搬送用ガイドレール及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0424424B2 (enExample) | 1992-04-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |