JPS6325738Y2 - - Google Patents

Info

Publication number
JPS6325738Y2
JPS6325738Y2 JP1983060696U JP6069683U JPS6325738Y2 JP S6325738 Y2 JPS6325738 Y2 JP S6325738Y2 JP 1983060696 U JP1983060696 U JP 1983060696U JP 6069683 U JP6069683 U JP 6069683U JP S6325738 Y2 JPS6325738 Y2 JP S6325738Y2
Authority
JP
Japan
Prior art keywords
gasket
container
semiconductor wafer
pressure
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983060696U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59166439U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6069683U priority Critical patent/JPS59166439U/ja
Publication of JPS59166439U publication Critical patent/JPS59166439U/ja
Application granted granted Critical
Publication of JPS6325738Y2 publication Critical patent/JPS6325738Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Closures For Containers (AREA)
  • Gasket Seals (AREA)
JP6069683U 1983-04-25 1983-04-25 半導体ウエ−ハ包装容器用ガスケツト Granted JPS59166439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6069683U JPS59166439U (ja) 1983-04-25 1983-04-25 半導体ウエ−ハ包装容器用ガスケツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6069683U JPS59166439U (ja) 1983-04-25 1983-04-25 半導体ウエ−ハ包装容器用ガスケツト

Publications (2)

Publication Number Publication Date
JPS59166439U JPS59166439U (ja) 1984-11-08
JPS6325738Y2 true JPS6325738Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-13

Family

ID=30190928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6069683U Granted JPS59166439U (ja) 1983-04-25 1983-04-25 半導体ウエ−ハ包装容器用ガスケツト

Country Status (1)

Country Link
JP (1) JPS59166439U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613114Y2 (ja) * 1987-04-21 1994-04-06 信越ポリマ−株式会社 密閉容器の係止構造
JP4556205B2 (ja) * 2003-03-28 2010-10-06 ニチアス株式会社 金属ガスケット

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232815Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-21 1977-07-26
JPS5266853U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-11-14 1977-05-18
JPS5268763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-11-18 1977-05-21
JPS5552132Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-05-10 1980-12-03
JPS5320053A (en) * 1976-08-06 1978-02-23 Mitsubishi Heavy Ind Ltd Seal ring
JPS53142652U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-04-15 1978-11-10
JPS53162259U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-05-25 1978-12-19
JPS53163454U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-05-27 1978-12-21
JPS5430154U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-08-02 1979-02-27
JPS5734141U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-07-30 1982-02-23

Also Published As

Publication number Publication date
JPS59166439U (ja) 1984-11-08

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