JPS63255677A - Ultrasonic vibrator - Google Patents
Ultrasonic vibratorInfo
- Publication number
- JPS63255677A JPS63255677A JP9042087A JP9042087A JPS63255677A JP S63255677 A JPS63255677 A JP S63255677A JP 9042087 A JP9042087 A JP 9042087A JP 9042087 A JP9042087 A JP 9042087A JP S63255677 A JPS63255677 A JP S63255677A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- diaphragm
- center
- recessed part
- vibrating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000035945 sensitivity Effects 0.000 abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
（技術分野）
本遷明は、超音波を発信し、又は、超音波を受信して電
圧を発生させる超音波振動子に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to an ultrasonic transducer that transmits ultrasonic waves or receives ultrasonic waves to generate voltage.
（背景技術〉
第３図は従来の超音波振動子の概略構成を示す断面図で
ある。超音波振動子は一般に金属製の振動板１に圧電素
子２（特に圧電セラミックス）を接合して作られる。振
動板１への圧電素子２の接合は、主に接着剤を用いて行
われる。また、発信周波数を調整しやすくするために、
振動板１と圧電素子２とは一般に円盤型の形状を取る。(Background Art) Fig. 3 is a cross-sectional view showing the schematic configuration of a conventional ultrasonic transducer.An ultrasonic transducer is generally made by bonding a piezoelectric element 2 (particularly piezoelectric ceramics) to a metal diaphragm 1. The piezoelectric element 2 is bonded to the diaphragm 1 mainly using adhesive.In addition, in order to easily adjust the oscillation frequency,
The diaphragm 1 and the piezoelectric element 2 generally have a disk shape.
第４図は振動板１の中心Ｃ１と圧電素子２の中心Ｃ２と
のずれと、出力音圧との関係を示す図である。第４図に
おいて、横軸は圧電素子２の中心Ｃ２と振動板１の中心
Ｃ１とのずれ（Ｉｎ Ｉｌｌ ）を表し、縦軸は出力音
圧［ｄＢ）を表す。この出力音圧は、圧電素子２への印
加電圧をＩＯＶとし、振動面からの距離３０ｃｍにおい
て測定した。出力音圧の基準値（ＯｃｌＢ値）は、２
Ｘ １０−’μｂａｒである。第４図から明らかなよう
に、振動板１の中心Ｃ１と圧電素子２の中心Ｃ２とのず
れが大きくなるにつれて、出力音圧が低下する。このよ
うに、圧電素Ｔ−２の接き位置は超音波振動子の出力音
圧に関係しており、重要な要素であるが、現状ては、圧
電素子２の接着時において、圧電素子２の位置決めが困
難であり、振動板１の中心Ｃ１と圧電素子２の中心Ｃ２
との間にずれが生じていた。また、接着剤のみによる接
きては、振動板１と圧電素子２との接合強度が不足する
ことがあった。FIG. 4 is a diagram showing the relationship between the deviation between the center C1 of the diaphragm 1 and the center C2 of the piezoelectric element 2 and the output sound pressure. In FIG. 4, the horizontal axis represents the deviation (In Ill ) between the center C2 of the piezoelectric element 2 and the center C1 of the diaphragm 1, and the vertical axis represents the output sound pressure [dB]. This output sound pressure was measured at a distance of 30 cm from the vibration surface, with the voltage applied to the piezoelectric element 2 being IOV. The standard value (OclB value) of the output sound pressure is 2
X 10-'μbar. As is clear from FIG. 4, as the deviation between the center C1 of the diaphragm 1 and the center C2 of the piezoelectric element 2 increases, the output sound pressure decreases. As described above, the contact position of the piezoelectric element T-2 is related to the output sound pressure of the ultrasonic transducer and is an important element. It is difficult to position the center C1 of the diaphragm 1 and the center C2 of the piezoelectric element 2.
There was a discrepancy between the two. Further, when the diaphragm 1 and the piezoelectric element 2 are bonded together using only an adhesive, the bonding strength between the diaphragm 1 and the piezoelectric element 2 may be insufficient.
（発明の目的）
本発明は上述のような点に鑑みてなされたものであり、
その目的とするところは、圧電素子の接合位置の精度を
改善し、さらに、圧電素子と振動板との接合強度を大き
くした超音波振動子を提供するにある。(Object of the invention) The present invention has been made in view of the above points, and
The purpose is to provide an ultrasonic vibrator that improves the accuracy of the bonding position of the piezoelectric element and further increases the bonding strength between the piezoelectric element and the diaphragm.
（発明の開示）
本発明に係る超音波振動子にあっては、上記の目的を達
成するために、振動板１に圧電素子２を接合して成る超
音波振動子において、振動板１の圧電素子２を接合され
る面に、圧電素子２の形状にきわせて凹部１ ａを設け
、この凹部１ａに圧電素子２を接合して成るものである
。(Disclosure of the Invention) In order to achieve the above object, an ultrasonic transducer according to the present invention has a piezoelectric element 2 bonded to a diaphragm 1. A recess 1a is provided in the surface to which the element 2 is to be bonded in accordance with the shape of the piezoelectric element 2, and the piezoelectric element 2 is bonded to the recess 1a.
本発明によれば、振動板１０凹部ｉ ａに圧電素子２を
固定できるため、凹部１ａの中心を振動板１の中心に合
わせれば、圧電素子２の中心が振動板１の中心に合う。According to the present invention, the piezoelectric element 2 can be fixed in the recess ia of the diaphragm 10, so that when the center of the recess 1a is aligned with the center of the diaphragm 1, the center of the piezoelectric element 2 is aligned with the center of the diaphragm 1.
したがって、出力音圧や受波感度を高くすることができ
る。ここて、出力音圧は超音波振動子の発信特性を表し
、受渡感度は超音波振動子の受信特性を表すが、両者は
関連しており、出力音圧の高い超音波振動子は受渡感度
も高い。それ故、本発明においては、発信及び受信性能
の共に優れた超音波振動子が得られるものである。また
、圧電素子２が振動板１の凹部１ａに嵌め込まれている
ことにより、圧電素子２の振動板１への接合強度が増す
ものである。Therefore, the output sound pressure and wave receiving sensitivity can be increased. Here, the output sound pressure represents the transmitting characteristics of the ultrasonic transducer, and the delivery sensitivity represents the receiving characteristics of the ultrasonic transducer, but the two are related, and the ultrasonic transducer with higher output sound pressure has a higher delivery sensitivity. It's also expensive. Therefore, according to the present invention, an ultrasonic transducer having excellent transmitting and receiving performance can be obtained. Furthermore, since the piezoelectric element 2 is fitted into the recess 1a of the diaphragm 1, the strength of the bond between the piezoelectric element 2 and the diaphragm 1 is increased.
夫ｎ匠
第１図は本発明の一実施例に係る超音波振動子の断面図
であり、第２図は同上に用いる振動板の断面図である。Fig. 1 is a sectional view of an ultrasonic transducer according to an embodiment of the present invention, and Fig. 2 is a sectional view of a diaphragm used in the same.
この振動板１は、アルミニウム製で、一端が円錐台形で
他端が開放された筒状の形状をなし、その内底面には、
円形の凹部１ａを有している。この凹部１ａは圧電素子
２の形状に合わせて、圧電素子２を嵌め込めるように形
成されている。本実施例ては、凹部１ａの直径は９．０
ｍｍ、深さは０ 、１ ｍｍである。この凹部１ａに、
直径８゜９ｍ＋ｎ、厚さ０．３ｍｍで、円盤型のＰＺＴ
系の圧電素子２を嵌め込み、エポキシ接着剤４（チバガ
イギー製ＸＮＲ４１５０）を用いて１３０℃、１時間の
条件で接着した。本実施例にあっては、圧電素−３＝
子２の密着強度は０．７ｋｇとなった。凹部】ａを設け
ない場合には、密着強度は０．６ｋｇてあったのて、そ
れに比べると、密着強度は上昇した。The diaphragm 1 is made of aluminum and has a cylindrical shape with one end shaped like a truncated cone and the other end open.
It has a circular recess 1a. This recess 1a is formed to fit the piezoelectric element 2 in accordance with the shape of the piezoelectric element 2. In this embodiment, the diameter of the recess 1a is 9.0
mm, depths are 0 and 1 mm. In this recess 1a,
Disk-shaped PZT with a diameter of 8°9m+n and a thickness of 0.3mm.
The piezoelectric element 2 of the system was fitted and bonded using an epoxy adhesive 4 (XNR4150 manufactured by Ciba Geigy) at 130° C. for 1 hour. In this example, the adhesion strength of piezoelectric element-3 = element 2 was 0.7 kg. When the recess [a] was not provided, the adhesion strength was 0.6 kg, and compared to that, the adhesion strength increased.
圧電素子２は、平面部の両面に銀ペースト（昭栄化学製
８４５６３＞を約１．０μｍ塗布し、６００℃で焼き付
け、銀型顧３となし、さらに電圧を１ｋＶ印加して分極
処理を施しである。振動板１と接合される側の銀型ｊｆ
１３は、アルミニラ１１製の振動板１に接触している。The piezoelectric element 2 is made by applying approximately 1.0 μm of silver paste (Shoei Kagaku 84563> made by Shoei Kagaku) on both sides of the flat part, baking it at 600°C to form a silver mold 3, and applying a voltage of 1 kV to polarize it. There is a silver type jf on the side that is joined to the diaphragm 1.
13 is in contact with the diaphragm 1 made of aluminum 11.
振動板］には、導電性接着剤６を介して導線７が接続さ
れている。他方の銀電極３には、半田５を介して導線７
が接続されている９導線７を介して銀電極３の間に高周
波電圧を印加すると、圧電素子２の圧電気逆効果により
、振動板１が振動し、超音波の発信が行われる。A conducting wire 7 is connected to the diaphragm via a conductive adhesive 6. A conductive wire 7 is connected to the other silver electrode 3 via solder 5.
When a high frequency voltage is applied between the silver electrodes 3 via the nine conductive wires 7 to which the diaphragm is connected, the diaphragm 1 vibrates due to the piezoelectric reverse effect of the piezoelectric element 2, and ultrasonic waves are transmitted.
また、超音波の反射波が振動板１を振動させると、圧電
素子２の圧電気効果により、銀電極３の間に高周波電圧
が発生し、超音波の受信が行われる。Further, when the reflected waves of the ultrasonic wave vibrate the diaphragm 1, a high frequency voltage is generated between the silver electrodes 3 due to the piezoelectric effect of the piezoelectric element 2, and the ultrasonic wave is received.
〈発明の効果）
本発明にあっては、上述のように、振動板の圧電素子を
接合される面に、圧電素子の形状に合わせて凹部を設け
、この凹部に圧電素子を接合するようにしたから、振動
板の中心と圧電素子の中心とのずれを小さくすることが
でき、また、振動板と圧電素子との接き強度を大きくす
ることがてきるという効果がある。<Effects of the Invention> In the present invention, as described above, a recess is provided in the surface of the diaphragm to which the piezoelectric element is to be joined, in accordance with the shape of the piezoelectric element, and the piezoelectric element is joined to this recess. Therefore, the deviation between the center of the diaphragm and the center of the piezoelectric element can be reduced, and the strength of the contact between the diaphragm and the piezoelectric element can be increased.
第１図は本発明の一実施例の断面図、第２図は同上に用
いる振動板の断面図、第３図は従来例の断面図、第４図
は同上の特性図である。
１は振動板、１ａは凹部、２は圧電素子である。FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a sectional view of a diaphragm used in the same, FIG. 3 is a sectional view of a conventional example, and FIG. 4 is a characteristic diagram of the same. 1 is a diaphragm, 1a is a recess, and 2 is a piezoelectric element.
Claims (1)
おいて、振動板の圧電素子を接合される面に、圧電素子
の形状に合わせて凹部を設け、この凹部に圧電素子を接
合して成ることを特徴とする超音波振動子。(1) In an ultrasonic transducer formed by bonding a piezoelectric element to a diaphragm, a recess is provided on the surface of the diaphragm to which the piezoelectric element is bonded, matching the shape of the piezoelectric element, and the piezoelectric element is bonded to this recess. An ultrasonic transducer characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9042087A JPS63255677A (en) | 1987-04-13 | 1987-04-13 | Ultrasonic vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9042087A JPS63255677A (en) | 1987-04-13 | 1987-04-13 | Ultrasonic vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63255677A true JPS63255677A (en) | 1988-10-21 |
Family
ID=13998107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9042087A Pending JPS63255677A (en) | 1987-04-13 | 1987-04-13 | Ultrasonic vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63255677A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012034019A (en) * | 2010-07-28 | 2012-02-16 | Nippon Ceramic Co Ltd | Ultrasonic transceiver |
| WO2012066983A1 (en) * | 2010-11-15 | 2012-05-24 | オリンパスメディカルシステムズ株式会社 | Ultrasound transducer, ultrasound treatment tool, ultrasound treatment device, and method for assembling ultrasound transducer |
-
1987
- 1987-04-13 JP JP9042087A patent/JPS63255677A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012034019A (en) * | 2010-07-28 | 2012-02-16 | Nippon Ceramic Co Ltd | Ultrasonic transceiver |
| WO2012066983A1 (en) * | 2010-11-15 | 2012-05-24 | オリンパスメディカルシステムズ株式会社 | Ultrasound transducer, ultrasound treatment tool, ultrasound treatment device, and method for assembling ultrasound transducer |
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