JP2012034019A - Ultrasonic transceiver - Google Patents

Ultrasonic transceiver Download PDF

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JP2012034019A
JP2012034019A JP2010169446A JP2010169446A JP2012034019A JP 2012034019 A JP2012034019 A JP 2012034019A JP 2010169446 A JP2010169446 A JP 2010169446A JP 2010169446 A JP2010169446 A JP 2010169446A JP 2012034019 A JP2012034019 A JP 2012034019A
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piezoelectric element
diaphragm
ultrasonic
substrate
disk
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JP5677780B2 (en
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Koji Noguchi
浩二 野口
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Nippon Ceramic Co Ltd
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Nippon Ceramic Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive ultrasonic transceiver having a high sound pressure where the number of components is decreased, a plurality of ultrasonic transceivers can be manufactured simultaneously on one substrate, and individual ultrasonic transceivers can be mounted on the substrate and demounted therefrom easily.SOLUTION: An ultrasonic transceiver unit is formed by bonding a diaphragm 8 having a terminal on the outer periphery to a piezoelectric element 3. Because of the geometrical features of the bent terminal, the diaphragm 8 oscillates easily to generate an ultrasonic wave of high sound pressure without preventing oscillation of the piezoelectric element. The tip of the terminal of the diaphragm is soldered to a substrate 9.

Description

この発明は、金属板に圧電素子を貼り付けてなる空中用の超音波送受信器に関するものである。
The present invention relates to an aerial ultrasonic transmitter / receiver in which a piezoelectric element is bonded to a metal plate.

金属からなる円盤状の板に、両面電極の施された圧電素子を接着することでユニモルフ振動子を形成する。圧電素子の両面に設けられた電極にユニモルフ振動子の固有振動数と同じ周波数のパルス電圧を引加することで、ユニモルフ振動子はベンディング振動を行い、超音波を発生させる。
A unimorph vibrator is formed by bonding a piezoelectric element provided with double-sided electrodes to a disk-shaped plate made of metal. By applying a pulse voltage having the same frequency as the natural frequency of the unimorph vibrator to the electrodes provided on both surfaces of the piezoelectric element, the unimorph vibrator performs bending vibration and generates ultrasonic waves.

開放型の超音波送受信器として、金属からなる円盤状の金属板に両面電極の施された圧電素子を接着し、電極にリード線を半田付けした単純な構造のものと、円盤状の金属板に圧電素子を接着し、金属板の上に円錐形の共振子を接着した構造のものが広く使用されている。また、両面電極の施された圧電素子の両面に、中心の凹んだ円盤状(シンバル状)の金属板を接着し、両面電極にリード線を半田付けした超音波送受信器が開発されている。
As an open-type ultrasonic transmitter / receiver, a simple structure in which a piezoelectric element with a double-sided electrode is bonded to a disk-shaped metal plate made of metal, and a lead wire is soldered to the electrode, and a disk-shaped metal plate A structure in which a piezoelectric element is bonded to a conical resonator on a metal plate is widely used. In addition, an ultrasonic transmitter / receiver has been developed in which a disc-shaped (cymbal) metal plate with a concave center is bonded to both surfaces of a piezoelectric element provided with a double-sided electrode, and a lead wire is soldered to the double-sided electrode.

図1に金属板の上に円錐形の共振子を取り付けた開放型超音波送受信器の例を示す。
金属からなる円盤状の振動板2に、両面電極の取り付けられた円盤状の圧電素子3が接着剤によって接着されている。金属板2の上に金属からなる円錐形の共振子1が接着剤によって取り付けられている。圧電素子3とモールド5の間は、低い硬度のシリコーンで圧電素子3をモール5ドから浮かすように接着されている。圧電素子3の両面にはそれぞれリード線4が半田つけされている。リード線4の一端はモールド5の電極ピン6に半田つけされている。圧電素子3と金属板2によって生じたベンディング振動が、円錐形の共振子1によって増幅される。共振子1が無い場合に比べて、大きな音圧と感度を得ることができる。
FIG. 1 shows an example of an open-type ultrasonic transceiver in which a conical resonator is attached on a metal plate.
A disc-shaped piezoelectric element 3 to which double-sided electrodes are attached is bonded to a disc-shaped diaphragm 2 made of metal with an adhesive. A conical resonator 1 made of metal is attached on a metal plate 2 by an adhesive. The piezoelectric element 3 and the mold 5 are bonded so as to float the piezoelectric element 3 from the molding 5 with low hardness silicone. Lead wires 4 are soldered to both surfaces of the piezoelectric element 3. One end of the lead wire 4 is soldered to the electrode pin 6 of the mold 5. Bending vibration generated by the piezoelectric element 3 and the metal plate 2 is amplified by the conical resonator 1. Compared with the case where the resonator 1 is not provided, a large sound pressure and sensitivity can be obtained.

図2に、シンバル状の金属板を貼り合わせた超音波送受信器の例を示す。金属からなる中心の凹んだ2枚の円盤7が、凹み側が圧電素子側になるように円盤7と同じ外径の円盤状の圧電素子3の両面に接着剤によって接着されている。
圧電素子3の両面電極には、リード線4が半田付けされている。圧電素子3の伸縮が2つの円盤7の形状的特徴によって増幅され、単純なユニモルフ構造の超音波送受信器に比べて高い音圧を得ることができる。
FIG. 2 shows an example of an ultrasonic transceiver in which a cymbal metal plate is bonded. Two discs 7 made of metal and recessed at the center are bonded to both surfaces of a disk-like piezoelectric element 3 having the same outer diameter as the disk 7 so that the recessed side is on the piezoelectric element side.
Lead wires 4 are soldered to the double-sided electrodes of the piezoelectric element 3. The expansion and contraction of the piezoelectric element 3 is amplified by the shape characteristics of the two disks 7, and a high sound pressure can be obtained as compared with an ultrasonic transceiver having a simple unimorph structure.

空中用の超音波送受信器は、これまで距離計用または物体検知用に多く使用されている。最近、超音波の特性を利用して指向性をもつスピーカー(パラメトリックスピーカー)の開発が盛んに行われている。パラメトリックスピーカー用の超音波送受信器として円錐形の共振子を用いた超音波送受信器が多く使用されている。パラメトリックスピーカーの音源としては、超音波送受信器の音圧が低い為に、10〜100個程度の複数個の超音波送受信器が並べて使用される。また、超音波は音源の面積が広いほど指向性が狭くなるという特徴を持つことから、指向性を狭くするためにも複数超音波送受信器が並べて使用されている。超音波送受信器を横に並べることで、広い面積の音源が得られ、より狭い範囲にのみ音を当てることができる。 Airborne ultrasonic transmitters / receivers have been widely used for distance meters or object detection. Recently, a speaker having directivity (parametric speaker) using the characteristics of ultrasonic waves has been actively developed. As an ultrasonic transmitter / receiver for a parametric speaker, an ultrasonic transmitter / receiver using a conical resonator is often used. As the sound source of the parametric speaker, since the sound pressure of the ultrasonic transmitter / receiver is low, a plurality of ultrasonic transmitter / receivers of about 10 to 100 are used side by side. In addition, since ultrasonic waves have a feature that the directivity becomes narrower as the area of the sound source is larger, a plurality of ultrasonic transmitters / receivers are used side by side in order to narrow the directivity. By arranging ultrasonic transmitters / receivers horizontally, a sound source with a large area can be obtained, and sound can be applied only to a narrower range.

特許公開平5−153694Patent Publication 5-153694 特許公開平5−328496Patent Publication 5-328296

内野研二、石井孝明著 「強誘電体デバイス」 森北出版株式会社 2005Kenji Uchino and Takaaki Ishii “Ferroelectric Devices” Morikita Publishing Co., Ltd. 2005

単品としての性能では円錐形の共振子を取り付けた超音波送受信器が優れている。しかしこの構造は、圧電素子、金属板、共振子の振動を妨げないように、部品を接合する必要がある為に強度が弱く。また部品点数も多く、小さな負荷でも特性に影響するためバラツキも大きい。この事から、同じ基板状にまとめて複数の超音波送受信器を作成するにはむかない。個々の超音波送受信器に問題が発生した場合に、個々の超音波送受信器を容易に取りはずす事が出来るようにカバーの取り付けられた超音波送受信器を個々に作成し、後で大きな基板に取り付けるこのが一般的である。この為に、超音波送受信器を100個程度並べたパラメトリックスピーカーは非常に高価なものになっている。
In terms of performance as a single product, an ultrasonic transmitter / receiver equipped with a conical resonator is superior. However, this structure has a low strength because it is necessary to join parts so as not to disturb the vibration of the piezoelectric element, the metal plate, and the resonator. In addition, the number of parts is large, and the characteristics are affected even with a small load. For this reason, it is difficult to create a plurality of ultrasonic transmitters / receivers on the same substrate. If a problem occurs in an individual ultrasonic transmitter / receiver, create an ultrasonic transmitter / receiver with a cover attached so that the individual ultrasonic transmitter / receiver can be easily removed, and attach it to a large board later. This is common. For this reason, a parametric speaker in which about 100 ultrasonic transmitters / receivers are arranged is very expensive.

部品点数が少なく、複数の超音波送受信器を1つの基板状の同時に作成でき、かつ容易に個々の超音波送受信器を基板から着脱する事がでいる、音圧の高い超音波送受信器が求められている。
There is a need for an ultrasonic transmitter / receiver with high sound pressure that has a small number of parts, can create multiple ultrasonic transmitters / receivers simultaneously on a single board, and can easily attach / detach individual ultrasonic transmitter / receivers to / from the board. It has been.

請求項1に記載の発明では、
電極の設けられた基板と、金属からなる振動板と、振動板に接着された圧電素子と、基板に設けられた電極と圧電素子に設けられた電極を繋ぐリード線とからなる超音波送受信器において、振動板が、圧電素子との接着面側の中心に凹みのある円盤部と、円盤部の外周から延びた少なくとも2本以上の円盤に対して垂直な方向(上向きまたは下向き)に少なくとも1回曲げられた形状の端部をもち、端部の先を基板に取り付けることで振動板を保持することで、音圧が高く、部品点数が少なく、安価に複数個取付可能な超音波送受信器を実現する。
In the invention according to claim 1,
An ultrasonic transceiver comprising a substrate provided with electrodes, a vibration plate made of metal, a piezoelectric element bonded to the vibration plate, and an electrode provided on the substrate and a lead wire connecting the electrode provided on the piezoelectric element. The vibration plate is at least 1 in a direction (upward or downward) perpendicular to a disk part having a recess in the center of the bonding surface side with the piezoelectric element and at least two or more disks extending from the outer periphery of the disk part. An ultrasonic transmitter / receiver that has a bent end and holds the diaphragm by attaching the tip of the end to the circuit board, so that the sound pressure is high, the number of components is small, and a plurality of parts can be attached at low cost. Is realized.

請求項2に記載の発明では、金属からなる中心に凹みのある円盤を、前記圧電素子の前記振動板を接着した面と反対の面に接着することで、より音圧の高い超音波送受信器を実現する。 According to the second aspect of the present invention, an ultrasonic transmitter / receiver having a higher sound pressure is obtained by bonding a disk made of metal and having a recess in the center to a surface opposite to the surface of the piezoelectric element to which the diaphragm is bonded. Is realized.

請求項3に記載の発明では、
前記振動板の端部が、円盤に近い位置で、円盤の上または下の一方に曲げられ、さらにその先で曲げた方向とは逆の方向に曲げることで、端部がU字またはV字になるように加工されていることによって、
圧電素子の伸縮運度によって振動板が容易に変形し、音圧の高い超音波送受信器を実現する。基板への振動伝達を抑え、複数個並べた際の干渉を低減することが出来る。
In invention of Claim 3,
The end of the diaphragm is bent at one of the top and bottom of the disk at a position close to the disk, and further bent in a direction opposite to the direction bent at the end, so that the end is U-shaped or V-shaped. By being processed to become
The diaphragm is easily deformed by the expansion and contraction of the piezoelectric element, and an ultrasonic transmitter / receiver with high sound pressure is realized. Vibration transmission to the substrate can be suppressed, and interference when a plurality of substrates are arranged can be reduced.

請求項4に記載の発明では、前記圧電素子が両面電極をもち、
前記振動板のバネ部の先と、前記基板の電極を半田付けまたは接着剤で接着することで、振動板の接着された面の電極と基板の電極を電気的に接続していることを
特徴とする請求項1から3に記載の超音波送受信器
In invention of Claim 4, the said piezoelectric element has a double-sided electrode,
The electrode on the surface of the vibration plate and the electrode on the substrate are electrically connected by soldering or bonding the electrode of the substrate with the tip of the spring portion of the vibration plate with an adhesive. The ultrasonic transceiver according to claim 1

請求項5に記載の発明では、前記基板が、複数の振動板取付部をもち、複数の振動板を取り付けた、複数の音源を有することで、安価なパラメトリックスピーカー用の超音波送受信器を実現する。
According to a fifth aspect of the present invention, the substrate has a plurality of diaphragm mounting portions and a plurality of sound sources to which the plurality of diaphragms are mounted, thereby realizing an inexpensive ultrasonic transceiver for a parametric speaker. To do.

実地例1Practical example 1

本発明の実施例を示す。図3に圧電素子に接着する振動板の例を示す。
厚さ2mmの中央が凹んだφ8の円盤(シンバルのような形の円盤)の外周に4本の端子が伸びている、端子は円盤の近くで円盤から下向きに曲げられている。さらにその先で上向きに曲がられ、先端がまた曲げられている。U字状に曲げられている。振動板8は、厚さ2mmの金属板を所定の形状に打ち抜き、プレスすることで成形されている。
The Example of this invention is shown. FIG. 3 shows an example of a diaphragm bonded to the piezoelectric element.
Four terminals extend on the outer periphery of a φ8 disk (a disk shaped like a cymbal) with a 2 mm-thick recessed center, and the terminals are bent downward from the disk near the disk. Further, it is bent upward and the tip is bent again. It is bent in a U shape. The vibration plate 8 is formed by punching a metal plate having a thickness of 2 mm into a predetermined shape and pressing it.

図4に圧電素子のもう一方の面に接着する円盤の例を示す。
厚さ2mmの中央が凹んだφ7.5の円盤(シンバルのような形の円盤)形をしている。
円盤7は厚さ2mmの金属板を所定の形状に打ち抜き、プレスすることで成形される。
FIG. 4 shows an example of a disk bonded to the other surface of the piezoelectric element.
It is in the shape of a φ7.5 disc (cymbal-like disc) with a 2 mm thick recess in the center.
The disk 7 is formed by punching a metal plate having a thickness of 2 mm into a predetermined shape and pressing it.

図5に組立図を示す。前述振動板8と円盤7を両面電極の施された厚さφ7.5厚さ0.2mmの圧電素子3にエポキシ接着剤によって接着する。振動板8と圧電素子3の電極は接触しており、電気的に接続されている。振動板8を、基板9に設けられた貫通穴に入れる。基板9の両面には独立した電極が取り付けられている。図5(a)に分解部、図5(b)に取り付けた状態を示す。
基板9の表面電極と振動板8の端部の先を半田10で半田付けし、圧電素子3の一方の面に半田つけしたリード線4を基板9の裏面の電極に半田つけする。
図6(a)に振動板8の端部の先端と基板9の電極が半田付けされた面の斜面図を示す図6(b)に裏側からみた斜面図を示す。
振動板8を基板9に設けられた穴に差し込み、半田付けすることで、基板9に超音波送受信器を容易に取り付ける事ができる。また、容易に取り外すことが出来る。
FIG. 5 shows an assembly drawing. The vibration plate 8 and the disk 7 are bonded to the piezoelectric element 3 having a thickness of φ7.5 and a thickness of 0.2 mm to which double-sided electrodes are applied by an epoxy adhesive. The diaphragm 8 and the electrode of the piezoelectric element 3 are in contact with each other and are electrically connected. The diaphragm 8 is put into a through hole provided in the substrate 9. Independent electrodes are attached to both surfaces of the substrate 9. FIG. 5A shows a disassembled portion and FIG.
The front electrode of the substrate 9 and the tip of the end of the diaphragm 8 are soldered with solder 10, and the lead wire 4 soldered to one surface of the piezoelectric element 3 is soldered to the electrode on the back surface of the substrate 9.
FIG. 6 (a) is a perspective view of the surface of the end of the diaphragm 8 and the surface of the substrate 9 where the electrodes of the substrate 9 are soldered. FIG. 6 (b) is a perspective view as seen from the back side.
By inserting the diaphragm 8 into a hole provided in the substrate 9 and soldering, the ultrasonic transceiver can be easily attached to the substrate 9. Moreover, it can be easily removed.

電極に超音波送受信器の固有振動と一致する周波数のパルス電圧を加えると、超音波送受信器の振動面が振動し、超音波を発生させる。
図7に超音波送受信器の振動の様子を示す。圧電素子3は加えられた電圧によって収縮し、収縮した圧電素子3によって振動板8と円盤7が内側に引っぱられる。振動板8と円盤7の形状的特徴によって、振動板8と円盤7は、凹み部を大きくたわませて振動する。振動板8が上下に振動することで、大きな超音波が発生する。この時、圧電素子3の収縮によって、振動板8の外周にある端部が一緒に引っぱられる。しかし、端部に施されたU字状の湾曲によって、端部は容易に変形し、端部が大きな負荷となることなく圧電素子3の振動は効率的に超音波へ変化される。
When a pulse voltage having a frequency that matches the natural vibration of the ultrasonic transmitter / receiver is applied to the electrodes, the vibration surface of the ultrasonic transmitter / receiver vibrates to generate ultrasonic waves.
FIG. 7 shows the vibration state of the ultrasonic transceiver. The piezoelectric element 3 contracts due to the applied voltage, and the diaphragm 8 and the disk 7 are pulled inward by the contracted piezoelectric element 3. Due to the shape characteristics of the diaphragm 8 and the disk 7, the diaphragm 8 and the disk 7 vibrate with the dent portions being greatly deflected. When the diaphragm 8 vibrates up and down, a large ultrasonic wave is generated. At this time, due to the contraction of the piezoelectric element 3, the end portions on the outer periphery of the diaphragm 8 are pulled together. However, the end portion is easily deformed by the U-shaped curve applied to the end portion, and the vibration of the piezoelectric element 3 is efficiently changed to ultrasonic waves without the end portion becoming a large load.

円盤7に対して垂直な方向とは、円盤7に対して垂直な方向を示すが、かならず振動板8の端子を90度曲げることを示すものでは無い。45度またはもっと低い角度でも良い。振動板8の端子を曲げる方向はどちらでの良いが、圧電素子3の伸縮を妨げないように、バネ状に曲げることが望ましい。 The direction perpendicular to the disk 7 indicates a direction perpendicular to the disk 7 but does not necessarily mean that the terminal of the diaphragm 8 is bent by 90 degrees. It may be 45 degrees or a lower angle. The bending direction of the terminal of the vibration plate 8 may be any direction, but it is desirable to bend it into a spring shape so as not to prevent expansion and contraction of the piezoelectric element 3.

圧電素子3に円盤7を接着しなくとも、超音波を送受信することができる。円盤7を接着した方が、音圧が高い。 Ultrasonic waves can be transmitted and received without attaching the disk 7 to the piezoelectric element 3. The sound pressure is higher when the disk 7 is bonded.

振動板7の材料としてアルミ合金やインバー材などの金属が考えられる。または、金属にニッケルメッキなどを施し、半田付け性を上げた材料でも良い。 A metal such as an aluminum alloy or an invar material can be considered as the material of the diaphragm 7. Alternatively, a material obtained by applying nickel plating or the like to a metal to improve solderability may be used.

基板9に複数の取付部を設け、複数の超音波送受信器を取り付けることができる。振動板の構造的特徴によって、1つ1つの超音波送受信器の音圧が大きく、超音波送受信器の着脱が容易で、部品点数が少なく、安価な超音波送受信器を実現している。図8に超音波送受信器の例を示す。
A plurality of attachment portions can be provided on the substrate 9, and a plurality of ultrasonic transceivers can be attached. Due to the structural features of the diaphragm, the ultrasonic pressure of each ultrasonic transmitter / receiver is large, the ultrasonic transmitter / receiver can be easily attached / detached, the number of parts is small, and an inexpensive ultrasonic transmitter / receiver is realized. FIG. 8 shows an example of an ultrasonic transceiver.

従来の開放型の超音波送受信器の例Example of conventional open-type ultrasonic transceiver 従来のシンバル構造の超音波送受信器の例Example of an ultrasonic transceiver with a conventional cymbal structure 本発明を実施した振動板の例Examples of diaphragms embodying the present invention シンバル状の円盤の例Example of a cymbal disk 本発明の実施した超音波送受信器の組み付け例Example of assembling an ultrasonic transceiver according to the present invention 本発明を実施した超音波送受信器への電極構造の例Example of electrode structure for ultrasonic transceiver embodying the present invention 振動の様子State of vibration 複数の超音波送受信器を取り付けた超音波送受信器Ultrasonic transceiver with multiple ultrasonic transceivers

1 円錐形の共振体
2 金属板
3 圧電素子
4 リード線
5 樹脂モールド
6 金属ピン
7 シンバル型の金属板
8 振動板
9 基板
10 半田
DESCRIPTION OF SYMBOLS 1 Conical resonator 2 Metal plate 3 Piezoelectric element 4 Lead wire 5 Resin mold 6 Metal pin 7 Cymbal type metal plate 8 Vibration plate 9 Substrate 10 Solder

Claims (5)

電極の設けられた基板と、金属からなる振動板と、振動板に接着された圧電素子と、基板に設けられた電極と圧電素子に設けられた電極を繋ぐリード線とからなる超音波送受信器において、振動板が、圧電素子との接着面側の中心に凹みのある円盤部と、円盤部の外周から延びた少なくとも2本以上の円盤に対して垂直な方向(上向きまたは下向き)に少なくとも1回曲げられた形状の端部をもち、端部の先を基板に取り付けることで振動板を保持することを特徴とする超音波送受信器
An ultrasonic transceiver comprising a substrate provided with electrodes, a vibration plate made of metal, a piezoelectric element bonded to the vibration plate, and an electrode provided on the substrate and a lead wire connecting the electrode provided on the piezoelectric element. The vibration plate is at least 1 in a direction (upward or downward) perpendicular to a disk part having a recess in the center of the bonding surface side with the piezoelectric element and at least two or more disks extending from the outer periphery of the disk part. An ultrasonic transmitter / receiver having an end portion of a bent shape and holding a diaphragm by attaching the end of the end portion to a substrate
金属からなる中心に凹みのある円盤を、前記圧電素子の前記振動板を接着した面と反対の面に、接着した事を特徴とする請求項1に記載の超音波送受信器
The ultrasonic transmitter / receiver according to claim 1, wherein a disk made of metal and having a dent in the center is bonded to a surface opposite to a surface of the piezoelectric element to which the diaphragm is bonded.
前記振動板の端部が、円盤に近い位置で、円盤の上または下の一方に曲げられ、さらにその先で曲げた方向とは逆の方向に曲げることで、端部がU字またはV字になるように加工されている事を特徴とする請求項1と2に記載の超音波送受信器
The end of the diaphragm is bent at one of the top and bottom of the disk at a position close to the disk, and further bent in a direction opposite to the direction bent at the end, so that the end is U-shaped or V-shaped. The ultrasonic transceiver according to claim 1 or 2, wherein the ultrasonic transceiver is processed to be
前記圧電素子が両面電極をもち、
前記振動板の端部の先と、前記基板の電極を半田付けまたは接着剤による接着の少なくとも1つの方法で接続する事で、圧電素子の振動板の接着された面の電極と基板の電極を電気的に接続した事を特徴とする請求高1から3に記載の超音波送受信器
The piezoelectric element has double-sided electrodes,
The electrode on the surface of the diaphragm of the piezoelectric element and the electrode on the substrate are connected by connecting the tip of the end of the diaphragm to the electrode on the substrate by at least one method of soldering or bonding with an adhesive. The ultrasonic transmitter / receiver according to claim 1, wherein the ultrasonic transmitter / receiver is electrically connected.
前記基板が、複数の振動板取付部をもち、複数の振動板を取り付けた、複数の音源を有する超音波送受信器である事を特徴とする請求項1から4に記載の超音波送受信器 5. The ultrasonic transmitter / receiver according to claim 1, wherein the substrate is an ultrasonic transmitter / receiver having a plurality of sound sources and having a plurality of diaphragm mounting portions and having a plurality of diaphragms attached thereto.
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