JP3488102B2 - Ultrasonic probe - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention
Ultrasonic probe having at least one matching layer on the launch side
About the child. 2. Description of the Related Art An ultrasonic diagnostic apparatus such as an ultrasonic endoscope is used.
The ultrasonic probe obtained is generally shown in FIGS.
It has such a structure. That is, the ultrasonic probe
Is configured to have a piezoelectric vibrator 201, and this piezoelectric vibrator
A surface electrode 202 made of baked silver or the like
a and the back electrode 202b are formed. On the acoustic radiation side of the piezoelectric vibrator 201,
Is provided with a matching layer 203 and an acoustic lens 204,
On the back side of the piezoelectric vibrator 201, the backing layer 20
5 are provided. Here, the backing layer 205
Is a housing 2 made of stainless steel via an insulating layer 207.
06. The back electrode 202b is connected to the signal line 20.
8, connected to the inner conductor of the coaxial cable 211,
The electrode 202a has a notch provided in the matching layer 203.
From part 209 to ground connection line 210 and stainless steel
Of the coaxial cable 211 through the housing 206 of FIG.
It is connected to the window (external conductor). Furthermore, coaxial
Cable 211 is a pulser / receiver circuit of the observation device
(Not shown). [0005] By the way, such an ultrasonic probe has a uniform shape.
Since the thickness of the laminated layer directly affects the performance, the center frequency of 4
The matching layer with a thickness of about one-half wavelength is acoustically radiated by the piezoelectric vibrator.
It is important to provide them evenly on the surface. [0006] In the ultrasonic probe, an acoustic probe is used.
By providing one or more matching layers on the emitting surface,
Increase sensitivity by broadening the frequency response of the transducer
It is also known that Specifically, a piezoelectric vibrating element
Using piezoelectric ceramics such as lead zirconate
In this case, a thin glass plate is used as the first matching layer, and the second matching layer
Can be provided with an epoxy resin. Also, the pressure
When a composite piezoelectric body is used as the electro-oscillation element, the first
An epoxy resin can be provided as a matching layer. A method of providing such a matching layer on an acoustic radiation surface
Conventionally, filler-containing resin and the like have been
Embossed on the acoustic emission surface of the probe to obtain a matching layer of constant thickness
The method and the acoustic radiation surface of the piezoelectric vibrator
The thickness is adjusted by polishing directly after hardening directly with
Method and sheet or film with the desired thickness in advance
Method of laminating adhesive with epoxy adhesive etc. is known.
You. [0008] As described above, the ultrasonic probe
Broadening the transmitted and received ultrasonic waves at the antenna
In order to transmit and receive waves efficiently, it is necessary to adjust the thickness around λ / 4.
It is preferable that the laminated layers are uniformly provided on the piezoelectric vibrator. Ma
In addition, defects such as bubbles are found on the bonding surface between the piezoelectric vibrator and the matching layer.
It is important that they do not exist. However, in the conventional matching layer forming method,
There was such a problem. First, a filler-containing resin or the like is used for the piezoelectric vibrator.
Method of obtaining a matching layer with a constant thickness by embossing on the sound emitting surface
The thickness is controlled by the shrinkage of curing of the filler-containing resin, etc.
It was difficult to control. Next, a filler-containing resin or the like is applied to the piezoelectric vibrator.
Thickness is obtained by directly hardening on the sound emitting surface and then polishing.
In the method of adjusting only the work requires skill, the thickness or
Measurement of impedance characteristics and polishing must be repeated.
I didn't. Next, a matching layer polished to a thickness near λ / 4
Attach a flat plate or film to the piezoelectric vibrator surface with adhesive
In the method, air enters between the transducer surface and the matching layer surface.
It is not possible to obtain sufficient adhesion over the entire surface, or
The adhesive remains between the transducer surface and the matching layer surface and the adhesive layer thickness
Cannot be made sufficiently thin. Special
When glass is used as the matching layer, the piezoelectric vibrator
If air is trapped between the and the matching layer, remove it
Is difficult and there is no air entrapment
It is also difficult to perform
It was difficult to produce well. The present invention has been made in view of the above circumstances.
And without intervening bubbles, etc.
A uniform matching layer with a thickness of
It is an object of the present invention to provide an ultrasonic probe that can be used. [0014] The present invention has been made to solve the above problems.
Therefore, the ultrasonic probe according to the present invention has
At least one layer of film or sheet alignment on the side
In an ultrasonic probe in which layers are laminated via an adhesive,
A plurality of through holes are provided in the matching layer. That is, the ultrasonic probe according to the present invention is
When bonding the matching layer to the vibrator, excess adhesive
And an outer edge of the matching layer and a through hole provided in the matching layer.
The vibrator can have a large area because it can escape from the through hole.
Even when the vibrator and the matching layer are formed
A thin adhesive layer can be formed between
The bubbles trapped between the vibrator and the matching layer are
Can be discharged to the outside through the through hole.
A good probe for receiving ultrasonic waves can be easily formed with good yield.
It is. The preferred embodiments of the present invention will be described below with reference to the accompanying drawings.
An embodiment will be described. 1 to 4 show a first embodiment of the present invention.
FIG. 1 is a sectional view showing a main part of an ultrasonic probe according to the embodiment.
FIG. 2 is an explanatory view and a view showing a bonding step of the first matching layer.
3 is an exploded perspective view showing a part of the components of the ultrasonic probe,
FIG. 4 is a view showing a process of bonding the second matching layer and the acoustic lens.
It is an illustration. As shown in FIG. 1, the ultrasonic probe is a disc.
The piezoelectric vibrator 1 is configured to have a piezoelectric vibrator 1. This piezoelectric vibration
The entire surface of both sides of the moving element 1 is displayed, for example, by printing silver.
The surface electrode 2a and the back surface electrode 2b are formed. Also before
The piezoelectric vibrator 1 has a front surface side and a rear surface side of the piezoelectric vibrator 1.
Are provided. here
The through-hole 3 is formed, for example, as a hole having a diameter of 0.4 mm.
Have been. On the side of the surface electrode 2a of the piezoelectric vibrator 1, a probe
To improve the sensitivity by broadening the frequency response of the
The first matching layer 4 is provided. This first matching layer
Reference numeral 4 denotes a diameter of the piezoelectric vibrator 1 which is the same as that of the piezoelectric vibrator 1 by grinding and polishing.
The diameter is slightly larger than the diameter and the thickness is
Crystallization gas formed to a thickness of one quarter of the driving frequency
It is composed of a lath or ceramic thin plate,
Adhered to the surface electrode 2a with, for example, an epoxy adhesive
Have been. The first matching layer 4 includes the piezoelectric vibrator
A through-hole 5 is provided at a position substantially corresponding to the through-hole 3.
Have been. Here, the through hole 5 is provided in the piezoelectric vibrator 1.
It is formed in a hole smaller in diameter than the drilled through hole 3,
For example, it is formed in a hole having a diameter of 0.2 mm. Also, a part of the outer periphery of the first matching layer 4
Is provided with a notch 6 from which the piezoelectric vibration
Part of the surface electrode 2a provided on the moving element 1 is exposed to the outside.
Have been. The piezoelectric vibrator 1 and the first matching layer 4
Is a housing made of stainless steel via an insulating frame 7 made of resin.
And is held on the tip side of the plug 8. That is, the insulating frame 7 has a step 9
Is formed on a cylindrical member provided with
While holding the electric vibrator 1, the step 9
The layer 4 is held. Further, the housing 8 has a circular shape.
It is formed in a cylindrical shape, and holds the insulating frame 7 on the inner periphery. Here, the cylindrical portion of the insulating frame 7 has an inner diameter.
The piezoelectric vibrator 1 is formed to have a diameter about 1 mm larger than the outer diameter.
In addition, the step 9 has an inner diameter of the first matching layer 4.
The first matching layer having a slightly larger diameter than the outer diameter and a depth
4 are formed to have substantially the same thickness as
To the extent that the positioning accuracy of each member
The insertability is good. And the piezoelectric vibrator 1
And the first matching layer 4 are held by an insulating frame 7.
When the housing 7 is held in the housing 8, the first alignment
Layer 4, insulating frame 7 and housing 8 have the same end face
It is designed to be on a plane. The first matching layer 4 is provided on the insulating frame 7.
The notch 10 is provided at a position corresponding to the notch 6 of
A part of the surface electrode 2a exposed by the notch 6 and a notch
A part of the inner wall of the housing 8 exposed by
Electrically connected via the land electrode connection line 11.
You. The second alignment layer 4 has a second alignment layer
A layer 12 is provided. This second matching layer 12
The diameter is formed to be substantially the same as that of the housing 8, for example,
A thin plate or film made of polyamide resin
For example, an epoxy
It is bonded by an adhesive. The second alignment layer 12 has the first alignment
A through-hole 13 is provided at a position substantially corresponding to the through-hole 5 in the laminated layer 4.
Have been killed. Here, the through hole 13 is formed in the first hole.
It is formed in a hole having a smaller diameter than the through hole 5 provided in the matching layer 4.
For example, it is formed in a hole with a diameter of 0.1 mm.
You. On the front surface of the second matching layer 12, an acoustic
Lens 14 is provided. This acoustic lens 14 is an example
For example, it is composed of a silicone resin member molded on a convex surface
Have been. The acoustic lens 14 has a sound velocity of a living body.
Or when the sound speed is slower than the acoustic medium (not shown),
Molded concave if faster than living body or acoustic medium (not shown)
Is what is done. On the other hand, on the back electrode 2b side of the piezoelectric vibrator 1,
For example, from epoxy resin mixed with ferrite rubber
A backing layer 15 is provided. Also, the base ends of the insulating frame 7 and the housing 8
Is closed by the back cover 16. In the figure, reference numeral 17 denotes a coaxial cable.
One end of this coaxial cable 17 is
And the internal conductor 17a is connected to the back electrode 2b.
In addition, the outer conductor 17b is connected to the electrode connection wire 11, the housing
And connected to the surface electrode 2a via a plug 8. On the other hand,
The other end side of the shaft cable 17 is the base end side surface of the housing 8.
Pulsar of an observation device (not shown)
Connected to receiver circuit. Incidentally, this ultrasonic probe is shown in FIGS.
As shown in FIG. 4, the bonding table 20 and the first pressing member 21
And a second pressing member 22 using an adhesive jig provided with
The assembly is performed. The bonding table 20 has a columnar portion 20a,
Flange part 20 provided on the outer periphery of the base part of cylindrical part 20a
b. Outer diameter of the cylindrical portion 20a
Is formed slightly smaller in diameter than the inner diameter of the insulating frame 7.
Further, the cylindrical portion 20a is viewed from the upper surface of the flange portion 20b.
The height is determined when the insulating frame 7 is externally fitted to the cylindrical portion 20a.
The upper surface of the piezoelectric vibrator 1 is placed when the piezoelectric vibrator 1 is placed
Is designed to be located at the step 9 of the insulating frame 7.
The piezoelectric vibrator 1 is provided on the upper surface of the cylindrical portion 20a.
Corresponds to the through hole 3 of the piezoelectric vibrator 1 when the
An intake hole 20c is provided at the position, and the intake hole 20c
A vacuum pump (not shown) is connected via the intake pipe 20d.
Has been continued. The first pressing member 21 includes a first matching layer
4 is a cylindrical member having a pressing surface 21a having a diameter substantially the same as that of
The second pressing member 22 that is formed is
The curved pressing surface 22a along the lens surface of No. 4 is at the bottom.
It has a cylindrical member. Next, an ultrasonic probe using the above-mentioned bonding jig
A method of assembling a child will be described. As shown in FIGS. 2 and 3
First, the insulating frame 7 to which the housing 8 is externally fitted and bonded is connected.
It is mounted on the cylindrical portion 20a of the platform 20. Next, the piezoelectric vibrator 1 is connected to the cylindrical portion of the insulating frame 7.
Is arranged on the upper surface of the cylindrical portion 20a along the
After positioning so that the through hole 3 and the
It is fixed to the inner periphery of the frame 7. Here, the inside diameter of the cylindrical portion of the insulating frame 7 is
The outer diameter of the piezoelectric vibrator 1 is about 1 mm larger than the outer diameter.
Therefore, the positioning accuracy of the piezoelectric vibrator 1 in the insulating frame 7 is improved.
Good insertability can be obtained without deteriorating the degree
You. Next, the surface electrode 2a of the piezoelectric vibrator 1 is
While soldering one end of the ground electrode connection wire 11,
Housing facing inside from cutout 10 of insulating frame 7
8 is soldered to the other end of the ground electrode connection line 11
Then, the surface electrode 2a and the housing 8 are electrically connected to each other.
Connect to Next, the first matching layer 4 is connected to the stepped portion of the insulating frame 7.
9 and the through hole 5 is connected to the through hole 3 of the piezoelectric vibrator 1.
Ground electrode connection line on the surface electrode 2a
11 so that the soldered portion 11 is exposed to the outside through the cutout 6
Piezoelectric vibrator via epoxy adhesive
The moving element 1 is laminated and bonded to the surface electrode 2a side. The piezoelectric vibrator 1 and the first matching layer 4 are
The curing of the epoxy adhesive to be adhered is as shown in FIG.
While pressing the first matching layer 4 with the first pressing member 21,
Perform at warm. At this time, the load by the first pressing member 21
Depending on the weight, the piezoelectric vibrator 1 and the first matching layer 4
Air bubbles and excess adhesive between the outer edge
And flows into the through holes 3 and 5. Obedience
Thus, the adhesive layer between the piezoelectric vibrator 1 and the first matching layer 4
The thickness can be reduced, and the first matching with the piezoelectric vibrator 1 can be achieved.
The adhesive force with the layer 4 can be made strong. Here, a diagram is shown when the epoxy adhesive is cured.
Activate the vacuum pump, suction hole 20c, suction
By creating a negative pressure in the through holes 3 and 5 through the pipe 20d.
Therefore, the flow of the adhesive into the through holes 3 and 5 is promoted,
The thickness of the adhesive layer between the piezoelectric vibrator 1 and the first matching layer 4
The thickness can be further reduced, and the first matching with the piezoelectric vibrator 1 can be achieved.
The adhesive force with the layer 4 can be made stronger. When the viscosity of the adhesive before curing is sufficiently low.
Only the load of the first pressing member 21 is sufficient. Next, the second matching layer 12 is replaced with the first matching layer.
4 was positioned so that the through-hole 13 could communicate with the through-hole 5.
In the state, the front surface of the first matching layer 4 via an epoxy adhesive
Laminated and bonded, and the bonding surface was primer-treated
The acoustic lens 14 is connected to the second matching layer via an epoxy adhesive.
12 is laminated and adhered to the front surface. The first matching layer 4 and the second matching layer 1
Bond the second and second matching layers 12 and the acoustic lens 14
As shown in Fig. 4, the curing of the epoxy adhesive
While pressing the lens 14 with the second pressing member 22 at room temperature
Do. At this time, the load by the second pressing member 22
The first matching layer 4 and the second matching layer 1
2 and between the second matching layer 12 and the acoustic lens.
Bubbles and excess adhesive between the outer edges 14
Is discharged to the outside, and flows to the through holes 5 and 13.
Get into it. Therefore, the first matching layer 4 and the second matching layer 12
And the second matching layer 12 and the acoustic lens 1
4, the thickness of the adhesive layer can be reduced.
Matching layer 4, second matching layer 12, and second matching layer 12
And the acoustic lens 14 can have a strong adhesive strength.
Wear. Here, a diagram is shown when the epoxy adhesive is cured.
Activate the vacuum pump, suction hole 20c, suction
The inside of the through holes 3, 5, 13 is made to have a negative pressure through the pipe 20d.
With this, the flow of the adhesive into the through holes 5 and 13 is prevented.
Facilitates the contact between the first matching layer 4 and the second matching layer 12.
Between the deposition layer and the second matching layer 12 and the acoustic lens 14
Can further reduce the thickness of the first adhesive layer.
The combined layer 4 and the second matching layer 12, and the second matching layer 12
To make the adhesive strength of the acoustic lens 14 stronger
it can. When the viscosity of the adhesive before curing is sufficiently low.
Only the load of the second pressing member 22 is sufficient. Next, the above-described assembly is removed from the bonding table 20.
And remove the coaxial cable 17 from the insulating frame 7 and housing 8
The internal conductor 17a is penetrated to the base end side and the piezoelectric vibrator 1
Of the external conductor 17
b is soldered to a part of the housing 8. Next, a ferrite rubber is mixed into the insulating frame 7.
Filled and cured epoxy resin, the back of the piezoelectric vibrator 1
After forming the packing layer 15 on the surface electrode 2b side, the housing
The back cover 16 is adhered to the back of the ring 8. As described above, according to the present embodiment, the piezoelectric
Through holes are formed in the vibrator 1, the first matching layer 4, and the second matching layer 12.
Since 3, 5, and 13 are provided respectively, these members are mutually connected.
When bonding, the air bubbles and excess adhesive are
To reduce the thickness of the adhesive layer between each member.
And have strong adhesion.
Can be. Each of the through holes 3, 5, 13 is formed
Are provided at positions where they communicate with each other, and the diameter of each through hole is
The through holes 3> the through holes 5> the through holes 13 were formed.
More effectively, air bubbles and excess adhesive are removed from each of the through holes.
To reduce the thickness of the adhesive layer between each member.
And have strong adhesion.
Can be. Further, when the adhesive is cured, the first and second pressings are performed.
By the pressure members 21 and 22, the piezoelectric vibrator 1, the first alignment
A load is applied to the layer 4, the second matching layer 12, the acoustic lens 14, and the like.
By removing air bubbles and excess adhesive more effectively
An adhesive layer between each member that can be poured into each of the through holes.
Thickness can be reduced and the adhesive strength is strong.
Things. When the adhesive is cured, a vacuum pump
To make each through hole 3, 5, 13 negative pressure
More effectively, bubbles and excess adhesive penetrate each of the above
It can be poured into the holes, reducing the thickness of the adhesive layer between each member.
And strengthen the adhesive strength
be able to. Further, as described above, each adhesive layer is separated from bubbles.
Can be formed into a sufficiently thin product,
When providing a layer, a member previously formed to a desired thickness is contacted.
It only needs to be glued with an adhesive, when creating an ultrasonic probe
Work efficiency can be improved. Further, each matching layer is previously formed to a desired thickness.
The formed member is passed through a sufficiently thin adhesive layer without bubbles.
Since it is formed by bonding, a matching layer with a uniform thickness
It can be formed with high accuracy, and from the effective surface of the piezoelectric vibrator
It has a sufficient matching layer effective area when looking at the ultrasonic radiation side
Ultrasonic probe can be produced with high yield. Also, the piezoelectric vibrator 1, the first matching layer 4, the first
The through holes 3, 5, 13 of the second matching layer 12 communicate with each other.
By using a material with low ultrasonic attenuation
When the acoustic lens 14 is bonded, excess adhesive and air bubbles
Can be removed through the through-hole, air-free adhesion
An adhesive layer having excellent properties can be obtained. As described above, the 分 の
A film or thin plate with a thickness of about one wavelength
To form a matching layer.
Excess adhesive and air bubbles can be discharged through
You. Therefore, the adhesive layer between the piezoelectric vibrator and the matching layer is
It can be formed thin without intervening bubbles, etc.
An excellent ultrasonic probe can be easily and stably produced. Also, a through hole is provided in the piezoelectric vibrator so that the piezoelectric vibrator is aligned.
Double-penetration by bonding and laminating with the position of part of the through hole of the layer
A continuous through hole is formed by the hole, and the matching layer and ultrasonic attenuation
Excess adhesive and air bubbles between the small acoustic lens
No bubbles etc. are interposed by pouring into continuous through holes
Bonding the matching layer and the acoustic lens with a thin adhesive layer
Can be. Therefore, bubbles and the like remain in the adhesive layer.
Deterioration of the ultrasonic characteristics can be suppressed. In this embodiment, the matching layer is added to the ultrasonic probe.
Although the example in which two layers are provided is shown, the present invention is not limited to this.
The ultrasonic probe is configured by providing one matching layer.
Alternatively, three or more layers may be provided. In the present embodiment, the second
A through hole was also provided in the laminated layer, but the acoustic lens was cured at room temperature.
When forming without using an adhesive with silicone resin, etc.
The through holes of the two matching layers may not be provided. Next, FIGS. 5 to 10 show a second embodiment of the present invention.
FIG. 5 is a cross-sectional view of an ultrasonic probe according to the embodiment, and FIG.
Fig. 7 is a front view of the ultrasonic probe, and Fig. 7 is a composite pressure having a matching layer.
8 is a sectional view of FIG. 7, and FIG. 9 is a matching layer.
FIG. 10 is a front view of another composite piezoelectric vibrator provided with
It is sectional drawing. The ultrasonic probe according to this embodiment is
A plurality of piezoelectric elements 100 formed in a prism shape are formed of resin 101.
The composite piezoelectric element is fixed at predetermined intervals by
The vibrator 102 is provided. Here,
The combined piezoelectric vibrators 102 are arranged, for example, at a pitch of 0.4 mm.
Between rows of 0.2 mm × 0.2 mm piezoelectric elements 100
After resin 101 is embedded in the surface, both sides are polished and formed
The composite piezoelectric vibrator 102 has both sides.
Front electrode 103a, back electrode 10 by the sputtering method
3b is provided. The acoustic radiation surface side of the composite piezoelectric vibrator 102
Has a matching thickness formed to a quarter of the drive center frequency.
A layer 104 is provided. This matching layer 104 is, for example,
For example, the surface electrode 103a is connected with an epoxy adhesive.
A notch 106 is provided in a part of the outer periphery.
And superimposed on the composite piezoelectric vibrator 102
The through hole 105 (eg,
(For example, 0.1 mm in diameter). A table exposed to the outside from the notch 106
One end of the ground line 108 is conductive on the surface electrode 103a.
The back electrode 103b is fixed by bonding with an adhesive.
, One end of the signal line 107 is bonded with a conductive adhesive
Fixed. The composite piezoelectric vibrator 102 has a cylindrical shape.
Housed and fixed in the formed stainless steel housing 109
Of the ferrite rubber backing layer 110
Adhesively fixed. More specifically, the backing layer 1
On the front surface of 10, for example, a concave surface with a radius of curvature of 15 mm is formed.
The composite piezoelectric vibrator 102 is located on the back electrode 103 side.
Is curved along the concave surface of the backing layer 110
Fixed. Further, on the side of the backing layer 110,
The notch groove 111 is formed near the bonding portion of the ground line 108.
a is provided, and the ground penetrates the notch groove 111a.
The other end of the line 108 leads to the back side of the backing layer 110
And also corresponds to the bonding portion of the signal line 107.
Notch groove 111b is provided at a position
b through the backing layer 11
0 is guided to the back side. The signal line 107 and the ground line 10
8 extends from the rear of the housing 109 to the outside, and
The pulsar of the observation device via a shaft cable (not shown)
Connected to a receiver circuit (not shown). Also, the notches 111a and 111b
The opening formed on the front side of the ultrasonic probe
It is closed by the resin 113. Also, at the rear of the housing 109,
Improves the waterproofing property and improves the backing layer 110
The signal line 107 and the ground line 108 on the back
In order to fix, epoxy resin 114 is poured and hardened.
Has been Further, at the rear end of the housing 109,
The back cover 115 made of stainless steel is adhered and fixed. Further, the durability of the ultrasonic probe is improved.
Therefore, at least the parylene
The film 116, which has excellent water resistance and chemical resistance,
Has been established. In the ultrasonic probe having the above configuration,
When bonding the matching layer 104 to the composite piezoelectric vibrator 102
As shown in FIG. 7 and FIG.
The matching layer 104 is provided on the combined piezoelectric vibrator
Is located in the resin 101 portion of the composite piezoelectric vibrator 102
Laminate and apply a load to cure and bond at room temperature.
You. Using such a composite piezoelectric vibrator 102
Also in the ultrasonic probe, substantially the same as the first embodiment described above.
Similar effects can be obtained. In particular, in this embodiment, the composite pressure
When the electric vibrator 102 and the matching layer 104 are bonded,
Excess adhesive and air can escape from 105
Therefore, make the adhesive layer thin without intervening air.
And strengthen the composite piezoelectric vibrator 102 and the matching layer 104.
Can be firmly adhered. Therefore, excellent ultrasonic characteristics
Probe can be easily manufactured. The resin 101 of the composite piezoelectric vibrator 102
Arranged so that the through hole 105 of the matching layer 104 is located
By doing so, the through-hole 105 affects the ultrasonic characteristics.
It is possible to have a structure that does not shrink. Therefore, the vibration element 1
Sufficient matching when viewing the ultrasonic emission side from the effective surface of 01
The effective area of the layer can be secured,
Sex can be fully utilized. As described above, the supersonic wave using the composite piezoelectric vibrator is
In the wave probe, the through holes in the matching layer are
The composite pressure transducer and matching layer
Without intervening air bubbles etc. in the adhesive layer between
Matching layer on ultrasonic transmitter side viewed from micro-oscillator part of electric oscillator
Ultrasound transmission is effective because sufficient area can be secured.
It can be done efficiently. In the present embodiment, the prism is formed in the shape of a prism.
Are fixed at predetermined intervals by resin.
Probe with composite formed piezoelectric transducer as an example
Of course, but of course it is limited to this.
However, for example, a columnar or strip-shaped
A complex formed by fixing electronic elements at predetermined intervals with resin
A combined piezoelectric vibrator may be used. Here, an example of another composite piezoelectric vibrator is shown in FIG.
9, the composite piezoelectric vibrator will be described.
Reference numeral 122 denotes a plurality of piezoelectric elements 120 formed in a strip shape.
Fixed at predetermined intervals by resin 121, both sides polished
After that, for example, by a sputtering method, the surface electrode
123a and a back surface electrode 123b are provided. This compound
Matching layer provided on the acoustic emission surface side of combined piezoelectric vibrator 122
124 is formed to a thickness of a quarter of the driving center frequency,
For example, the surface electrode 123a side by an epoxy adhesive
The notch 126 is formed in a part of the outer periphery.
Provided and overlapped with the composite piezoelectric vibrator 122.
When combined, a through-hole 125 is formed in a portion corresponding to resin 121.
Are provided. In the present embodiment, the through holes in the matching layer
Is provided on the resin portion of the composite piezoelectric vibrator.
The piezoelectric element part, which is manufactured by the GA process, is very small
(For example, 20 to 100 μm).
Small (for example, 10 to 100 μm) composite piezoelectric vibration
If using a hole, make a hole in the matching layer.
Since it is difficult to provide a part corresponding to the grease part,
It is possible to sparsely provide small through holes that do not disturb the characteristics
Preferred (for example, a through hole of about 10 μm
Provided at an interval). Further, in the present embodiment, the matching layer is one layer.
However, it is not limited to this and it is necessary to provide multiple layers
Is also possible. In this case, a composite pressure is applied to each matching layer.
Contact so that each through hole is located in the resin part of the
If worn, the ultrasonic radiation side was viewed from the effective surface of the piezoelectric vibrator.
In this case, a sufficient matching layer effective area can be secured. In this embodiment, the composite piezoelectric element is
Although the ultrasonic wave is focused by making it concave,
The piezoelectric vibrator is arranged on a plane and the sound is the same as in the first embodiment.
A lens may be provided in front of the matching layer. In the present invention, the excess adhesive and air are used as the matching layer.
(Bubbles) from the bonding surface between the piezoelectric vibrator and the matching layer,
The matching layer is formed using a thin plate or film with through holes.
The material and shape of the piezoelectric vibrator, matching layer
And the material and shape of the acoustic lens, the structure and
The legal procedures are not limited to those described above.
Of course. For example, it can be applied to array transducers
it can. [Supplementary Note] (Supplementary Note 1) Front of Piezoelectric Vibrator
And at least one film-like or sheet-like matching layer
Are laminated via an adhesive, and a sound is
In an ultrasonic probe provided with an acoustic lens, the piezoelectric vibration
A plurality of through holes are provided in the
Are provided, and the positions of these through holes are determined by piezoelectric vibration.
Of the through holes provided in the connector and the through holes provided in the matching layer
It is characterized in that it is set at a position where some parts communicate with each other
Ultrasonic probe. (Supplementary Note 2) Through holes provided in the matching layer
Is a through-hole smaller in diameter than the through-hole provided in the piezoelectric vibrator.
3. The ultrasonic probe according to claim 1, wherein That is, the ultrasonic waves described in the above supplementary notes 1 and 2
The probe bonds the acoustic lens to the front surface of the matching layer.
Extra adhesive and bubbles on the piezoelectric vibrator and matching layer
The matching layer and the
Adhesion without intervening air layer between acoustic lens
The layer can be formed thin. Therefore, polymethylpe
Of ultrasonic wave propagation attenuation of stainless steel, polyamide elastomer, etc.
When bonding acoustic lenses made of small materials,
Adhesive acoustic lens on matching layer without intervening air
Can improve the sensitivity of ultrasonic probe
it can. (Supplementary Note 3) The piezoelectric microvibrator portion and the resin portion
At least on the ultrasonic radiation surface of the composite piezoelectric vibrator having
One film or thin plate matching layer is put through an adhesive
In the ultrasonic probe laminated by the above, in the matching layer,
Multiple penetrations corresponding to the position of the resin part of the composite piezoelectric vibrator
An ultrasonic probe characterized by having holes. That is, the ultrasonic probe described in Appendix 3
The through hole provided in the matching layer affects the ultrasonic characteristics.
Without affecting the composite piezoelectric vibration through the through hole
Remove excess adhesive and air bubbles between the child and the matching layer
be able to. As described above, according to the present invention, the vibration
The desired thickness without intervening bubbles etc.
Since a uniform and uniform matching layer is provided on the vibrator with high yield
It is possible to provide an ultrasonic probe which can be cut.

BRIEF DESCRIPTION OF THE DRAWINGS FIGS. 1 to 4 relate to a first embodiment of the present invention, and FIG. 1 is a cross-sectional view showing a main part of an ultrasonic probe. FIG. 3 is an exploded perspective view showing a part of constituent members of an ultrasonic probe. FIG. 4 is an explanatory view showing a bonding step of a second matching layer and an acoustic lens. 5 to 10 relate to a second embodiment of the present invention, and FIG. 5 is a cross-sectional view of the ultrasonic probe. FIG. 6 is a front view of the ultrasonic probe. FIG. 7 is a matching layer. FIG. 8 is a cross-sectional view of FIG. 7; FIG. 9 is a front view of another composite piezoelectric vibrator having a matching layer; FIG. 10 is a cross-sectional view of FIG. FIG. 12 is a cross-sectional view showing a conventional ultrasonic probe. FIG. 12 is a cross-sectional view taken along the line AA ′ of FIG. 11. Explanation of symbols 1... Piezoelectric vibrator 3... Through-hole 4. … Second alignment Layer 13: Through hole 102: Composite piezoelectric vibrator 104: Matching layer 105: Through hole 122: Composite piezoelectric vibrator 124: Matching layer 125: Through hole

Claims (1)

(57) [Claims 1] At least one of the transducers is provided on the ultrasonic radiation side.
An ultrasonic probe in which a plurality of film-like or thin-plate-like matching layers are laminated via an adhesive, wherein a plurality of through holes are provided in the matching layer.