JPS6325530B2 - - Google Patents
Info
- Publication number
- JPS6325530B2 JPS6325530B2 JP54041815A JP4181579A JPS6325530B2 JP S6325530 B2 JPS6325530 B2 JP S6325530B2 JP 54041815 A JP54041815 A JP 54041815A JP 4181579 A JP4181579 A JP 4181579A JP S6325530 B2 JPS6325530 B2 JP S6325530B2
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- soft metal
- thin film
- fork type
- type crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 35
- 239000013078 crystal Substances 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 229910000510 noble metal Inorganic materials 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 16
- 239000010408 film Substances 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000005304 joining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
- H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4181579A JPS55134523A (en) | 1979-04-06 | 1979-04-06 | Support structure of tuning fork type crystal vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4181579A JPS55134523A (en) | 1979-04-06 | 1979-04-06 | Support structure of tuning fork type crystal vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55134523A JPS55134523A (en) | 1980-10-20 |
| JPS6325530B2 true JPS6325530B2 (US07909887-20110322-C00021.png) | 1988-05-25 |
Family
ID=12618796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4181579A Granted JPS55134523A (en) | 1979-04-06 | 1979-04-06 | Support structure of tuning fork type crystal vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55134523A (US07909887-20110322-C00021.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0261919U (US07909887-20110322-C00021.png) * | 1988-10-20 | 1990-05-09 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554175A (en) * | 1978-06-27 | 1980-01-12 | Seiko Epson Corp | Holding method for crystal oscillating reed |
-
1979
- 1979-04-06 JP JP4181579A patent/JPS55134523A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554175A (en) * | 1978-06-27 | 1980-01-12 | Seiko Epson Corp | Holding method for crystal oscillating reed |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0261919U (US07909887-20110322-C00021.png) * | 1988-10-20 | 1990-05-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55134523A (en) | 1980-10-20 |
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